Patents by Inventor Che-Chen WU

Che-Chen WU has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240120313
    Abstract: A chip package structure is provided. The chip package structure includes a chip. The chip package structure includes a conductive ring-like structure over and electrically insulated from the chip. The conductive ring-like structure surrounds a central region of the chip. The chip package structure includes a first solder structure over the conductive ring-like structure. The first solder structure and the conductive ring-like structure are made of different materials.
    Type: Application
    Filed: December 18, 2023
    Publication date: April 11, 2024
    Inventors: Sheng-Yao YANG, Ling-Wei LI, Yu-Jui WU, Cheng-Lin HUANG, Chien-Chen LI, Lieh-Chuan CHEN, Che-Jung CHU, Kuo-Chio LIU
  • Publication number: 20230335584
    Abstract: A semiconductor device structure and a method for forming the same are provided. The semiconductor device structure includes a gate electrode layer formed over a semiconductor substrate and capped with a conductive capping layer. The semiconductor device structure also includes an insulating capping stack having a lower surface that faces and is spaced apart from an upper surface of the conductive capping layer. In addition, the semiconductor device structure includes gate spacers formed over the semiconductor substrate and covering opposing sidewalls of the gate electrode layer, the conductive capping layer, and the insulating capping stack.
    Type: Application
    Filed: June 14, 2023
    Publication date: October 19, 2023
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tien-Lu LIN, Che-Chen WU, Chia-Lin CHUANG, Yu-Ming LIN, Chia-Hao CHANG
  • Patent number: 11715761
    Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a pair of source/drain features formed in a semiconductor substrate and a gate stack formed over a portion of the semiconductor substrate that is between the pair of source/drain features. The semiconductor device structure also includes gate spacers extend along opposing sidewalls of the gate stack and protrude above an upper surface of the gate stack. Additionally, the semiconductor device structure includes a first capping layer formed over the gate stack and spaced apart from the upper surface of the gate stack by a gap. Opposing sidewalls of the first capping layer are covered by portions of the gate spacers that protrude above the upper surface of the gate stack.
    Type: Grant
    Filed: March 22, 2022
    Date of Patent: August 1, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tien-Lu Lin, Che-Chen Wu, Chia-Lin Chuang, Yu-Ming Lin, Chia-Hao Chang
  • Publication number: 20220216300
    Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a pair of source/drain features formed in a semiconductor substrate and a gate stack formed over a portion of the semiconductor substrate that is between the pair of source/drain features. The semiconductor device structure also includes gate spacers extend along opposing sidewalls of the gate stack and protrude above an upper surface of the gate stack. Additionally, the semiconductor device structure includes a first capping layer formed over the gate stack and spaced apart from the upper surface of the gate stack by a gap. Opposing sidewalls of the first capping layer are covered by portions of the gate spacers that protrude above the upper surface of the gate stack.
    Type: Application
    Filed: March 22, 2022
    Publication date: July 7, 2022
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tien-Lu LIN, Che-Chen WU, Chia-Lin CHUANG, Yu-Ming LIN, Chia-Hao CHANG
  • Patent number: 11282920
    Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a source/drain contact structure formed over a semiconductor substrate, and a first gate stack formed over the semiconductor substrate and adjacent to the source/drain contact structure. The semiconductor device structure also includes an insulating cap structure formed over and separated from an upper surface of the first gate stack. In addition, the semiconductor device structure includes first gate spacers formed over opposing sidewalls of the first gate stack to separate the first gate stack from the source/drain contact structure. The first gate spacers extend over opposing sidewalls of the insulating cap structure, so as to form an air gap surrounded by the first gate spacers, the first gate stack, and the insulating cap structure.
    Type: Grant
    Filed: September 16, 2019
    Date of Patent: March 22, 2022
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Tien-Lu Lin, Che-Chen Wu, Chia-Lin Chuang, Yu-Ming Lin, Chih-Hao Chang
  • Patent number: 11217676
    Abstract: A gate-all-around field effect transistor may be provided by forming a sacrificial gate structure and a dielectric gate spacer around a middle portion of a semiconductor plate stack. A source region and a drain region may be formed on end portions of semiconductor plates within the semiconductor plate stack. The sacrificial gate structure and other sacrificial material portions may be replaced with a combination of a gate dielectric layer and a gate electrode. The gate dielectric layer and the gate electrode may be vertically recessed selective to the dielectric gate spacer. A first anisotropic etch process recesses the gate electrode and the gate dielectric layer at about the same etch rate. A second anisotropic etch process with a higher selectivity may be subsequently used. Protruding remaining portions of the gate dielectric layer are minimized to reduce leakage current between adjacent transistors.
    Type: Grant
    Filed: June 24, 2020
    Date of Patent: January 4, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Che-Chen Wu, Kuo-Cheng Chiang, Chih-Hao Wang, Jia-Chuan You, Li-Yang Chuang
  • Publication number: 20210408256
    Abstract: A gate-all-around field effect transistor may be provided by forming a sacrificial gate structure and a dielectric gate spacer around a middle portion of a semiconductor plate stack. A source region and a drain region may be formed on end portions of semiconductor plates within the semiconductor plate stack. The sacrificial gate structure and other sacrificial material portions may be replaced with a combination of a gate dielectric layer and a gate electrode. The gate dielectric layer and the gate electrode may be vertically recessed selective to the dielectric gate spacer. A first anisotropic etch process recesses the gate electrode and the gate dielectric layer at about the same etch rate. A second anisotropic etch process with a higher selectivity may be subsequently used. Protruding remaining portions of the gate dielectric layer are minimized to reduce leakage current between adjacent transistors.
    Type: Application
    Filed: June 24, 2020
    Publication date: December 30, 2021
    Inventors: Che-Chen WU, Kuo-Cheng CHIANG, Chih-Hao WANG, Jia-Chuan YOU, Li-Yang CHUANG
  • Publication number: 20210083046
    Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a source/drain contact structure formed over a semiconductor substrate, and a first gate stack formed over the semiconductor substrate and adjacent to the source/drain contact structure. The semiconductor device structure also includes an insulating cap structure formed over and separated from an upper surface of the first gate stack. In addition, the semiconductor device structure includes first gate spacers formed over opposing sidewalls of the first gate stack to separate the first gate stack from the source/drain contact structure. The first gate spacers extend over opposing sidewalls of the insulating cap structure, so as to form an air gap surrounded by the first gate spacers, the first gate stack, and the insulating cap structure.
    Type: Application
    Filed: September 16, 2019
    Publication date: March 18, 2021
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Tien-Lu LIN, Che-Chen WU, Chia-Lin CHUANG, Yu-Ming LIN, Chih-Hao CHANG