Abstract: A metamaterial structure and method of manufacturing the same are disclosed. The metamaterial includes a substrate, a first resonance unit and a second resonance unit. The surface of the substrate has a bump. The first resonance unit and the second resonance unit are disposed on an adhesive direction from the bump, whereby forming the sterical resonance unit, which is able to increase the coupling efficiency of incident light in some specific frequency and form an in-situ reconfigurable metamaterial.

Abstract: A method for real-time monitoring the fabrication of magnetic memory units uses an ion beam milling machine, mainly using plasma to etch the films. The method for real-time measuring resistance during etching can acquire the charge carriers' transport characteristics of tunneling resistance with current perpendicular to the plane of film. By means of monitoring the etching end point by a module of tunneling magneto-resistance (TMR) memory unit on the chip, other tunneling magneto-resistance memory units on the chip can be fabricated in situ. By controlling applied voltage and etch time of the etch machine, samples of varying film thicknesses can be obtained. Different materials have different etch rates which depends on the amount of argon, applied voltage and accelerated voltage used in etching. This invention can modulate adequate parameters according to the requirements of different products, whose advantages include real-time management and analysis of non-conformities and causes.