Patents by Inventor Che-Fu CHENG

Che-Fu CHENG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SYSTEMS AND METHODS FOR ORIENTATOR BASED WAFER DEFECT SENSING
    Publication number: 20190304826
    Abstract: In an embodiment, a system includes: an orientation sensor configured to detect an orientation fiducial on a bevel of a wafer; a pedestal configured to rotate the wafer to allow the orientation sensor to detect the orientation fiducial and place the orientation fiducial at a predetermined orientation position; and a defect sensor configured to detect a wafer defect along a surface of the wafer while rotated by the pedestal.
    Type: Application
    Filed: March 30, 2018
    Publication date: October 3, 2019
    Inventors: Yan-Hong LIU, Daniel M.Y. YANG, Che-Fu CHENG