Patents by Inventor Che-Fu Chiu

Che-Fu Chiu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220352321
    Abstract: A method of forming a semiconductor device includes implanting dopants of a first conductivity type into a semiconductor substrate to form a first well, epitaxially growing a channel layer over the semiconductor substrate, forming a fin from the second semiconductor material, and forming a gate structure over a channel region of the fin. The semiconductor substrate includes a first semiconductor material. Implanting the dopants may be performed at a temperature in a range of 150° C. to 500° C. The channel layer may include a second semiconductor material. The channel layer may be doped with dopants of the first conductivity type.
    Type: Application
    Filed: July 20, 2022
    Publication date: November 3, 2022
    Inventors: Bau-Ming Wang, Che-Fu Chiu, Chun-Feng Nieh, Huicheng Chang, Yee-Chia Yeo
  • Patent number: 11450743
    Abstract: A method of forming a semiconductor device includes implanting dopants of a first conductivity type into a semiconductor substrate to form a first well, epitaxially growing a channel layer over the semiconductor substrate, forming a fin from the second semiconductor material, and forming a gate structure over a channel region of the fin. The semiconductor substrate includes a first semiconductor material. Implanting the dopants may be performed at a temperature in a range of 150° C. to 500° C. The channel layer may include a second semiconductor material. The channel layer may be doped with dopants of the first conductivity type.
    Type: Grant
    Filed: October 21, 2020
    Date of Patent: September 20, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Bau-Ming Wang, Che-Fu Chiu, Chun-Feng Nieh, Huicheng Chang, Yee-Chia Yeo
  • Publication number: 20220123111
    Abstract: A method of forming a semiconductor device includes implanting dopants of a first conductivity type into a semiconductor substrate to form a first well, epitaxially growing a channel layer over the semiconductor substrate, forming a fin from the second semiconductor material, and forming a gate structure over a channel region of the fin. The semiconductor substrate includes a first semiconductor material. Implanting the dopants may be performed at a temperature in a range of 150° C. to 500° C. The channel layer may include a second semiconductor material. The channel layer may be doped with dopants of the first conductivity type.
    Type: Application
    Filed: October 21, 2020
    Publication date: April 21, 2022
    Inventors: Bau-Ming Wang, Che-Fu Chiu, Chun-Feng Nieh, Huicheng Chang, Yee-Chia Yeo
  • Publication number: 20220059394
    Abstract: A method of transferring semiconductor wafers and a semiconductor wafer support device including lift pins having a first end configured to contact a backside surface of the semiconductor wafer and at least one stress reduction feature. The stress reduction feature may be configured to reduce contact stress between the lift pins and the wafer.
    Type: Application
    Filed: August 24, 2020
    Publication date: February 24, 2022
    Inventors: Sih-Jie LIU, Che-Fu CHIU, Bau-Ming WANG, Chun-Feng NIEH, Huicheng CHANG, Yee-Chia YEO
  • Patent number: 11127817
    Abstract: A method for forming a semiconductor device structure is provided. The method includes forming a semiconductor structure over a semiconductor substrate. The method also includes implanting carbon into the semiconductor structure. The method further includes implanting gallium into the semiconductor structure. In addition, the method includes heating the semiconductor structure after the implanting of carbon and gallium.
    Type: Grant
    Filed: September 5, 2018
    Date of Patent: September 21, 2021
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Tsan-Chun Wang, Chiao-Ting Tai, Che-Fu Chiu, Chun-Feng Nieh
  • Patent number: 10832913
    Abstract: A method for forming a semiconductor structure comprises heating a solid material to form a gaseous substance; ionizing the gaseous substance to produce a first type of ions; and implanting the first type of ions into a semiconductor substrate. The method can achieve better abruptness, better shallow junction depth, and better sheet resistance.
    Type: Grant
    Filed: February 14, 2018
    Date of Patent: November 10, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Tsan-Chun Wang, Chiao-Ting Tai, Che-Fu Chiu, Chun-Feng Nieh
  • Publication number: 20200020772
    Abstract: A method for forming a semiconductor device structure is provided. The method includes forming a semiconductor structure over a semiconductor substrate. The method also includes implanting carbon into the semiconductor structure. The method further includes implanting gallium into the semiconductor structure. In addition, the method includes heating the semiconductor structure after the implanting of carbon and gallium.
    Type: Application
    Filed: September 5, 2018
    Publication date: January 16, 2020
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Tsan-Chun WANG, Chiao-Ting TAI, Che-Fu CHIU, Chun-Feng NIEH
  • Publication number: 20190252192
    Abstract: A method for forming a semiconductor structure comprises heating a solid material to form a gaseous substance; ionizing the gaseous substance to produce a first type of ions; and implanting the first type of ions into a semiconductor substrate. The method can achieve better abruptness, better shallow junction depth, and better sheet resistance.
    Type: Application
    Filed: February 14, 2018
    Publication date: August 15, 2019
    Inventors: TSAN-CHUN WANG, CHIAO-TING TAI, CHE-FU CHIU, CHUN-FENG NIEH
  • Publication number: 20060139513
    Abstract: The present invention relates to a tape, comprising a color layer capable of displaying various colors with respect to different viewing angles, and at least one adhesive layer adhering to the color layer. The color layer is formed of at least two stacking materials, each having a refractive index different to that of another material adjacent thereto. In a preferred embodiment, the color layer is composed of a flexible substrate and at least one CLC layer while having the CLC layer adhering to the flexible substrate.
    Type: Application
    Filed: July 27, 2005
    Publication date: June 29, 2006
    Inventors: Che-Fu Chiu, Tung-Lung Li, Long-Hai Wu