Patents by Inventor Chee Foo

Chee Foo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Seasoning process for a deposition chamber
    Publication number: 20060189171
    Abstract: A seasoning process for a deposition chamber, the process comprising providing a silicon-containing seasoning gas inside the deposition chamber; and forming a silicon-based seasoning film on at least one surface inside the deposition chamber, the seasoning film having a refractive index of about 1.48 or more.
    Type: Application
    Filed: February 23, 2005
    Publication date: August 24, 2006
    Inventors: Choon Chua, Lee Kang, Chee Foo