Patents by Inventor Chee-Mong Loo

Chee-Mong Loo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SHIELDING MEMBER OF PROCESSING SYSTEM
    Publication number: 20090056625
    Abstract: A shielding member applicable in a deposition apparatus is provided. The shielding member includes a base metal and an adhesion promoter layer arc-sprayed on the base metal, wherein adhesion promoter layer has a thickness gradient increasing from an upper end of the shielding member to a lower end of the shielding member. More preferably, no adhesion promoter layer is formed in the upper 10 cm of the shielding member, adjacent to a target layer.
    Type: Application
    Filed: August 29, 2007
    Publication date: March 5, 2009
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Chee-Mong Loo, Yao-Hung Liu