Patents by Inventor Chel S. Park

Chel S. Park has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Electron cyclotron resonance apparatus comprising wafer cooling pedestal
    Patent number: 5354382
    Abstract: An electron cyclotron resonance apparatus for treating a wafer by plasma generated by utilizing a resonance of electrons. The apparatus is constructed to improve a temperature uniformity of a wafer by injecting helium as a heat transfer medium between the wafer and a wafer pedestal on which the wafer is laid and thereby transferring a heat from the wafer to the wafer pedestal. The apparatus is also constructed to move a desired wafer treating position. As a result, it is possible to fabricate semiconductor devices having a superior performance.
    Type: Grant
    Filed: February 7, 1994
    Date of Patent: October 11, 1994
    Assignee: Hyundai Electronics Industries Co., Ltd.
    Inventors: Roh Y. Sung, Chel S. Park, Sang Y. Lee, Cheong D. Lee, Dae H. Kim