Patents by Inventor Che-Ming Hsu

Che-Ming Hsu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20260179462
    Abstract: A warning device that combines a radar module with electronic control technology can accurately detect the velocity and the distance of an object around the warning device and provide dynamic warning (e.g., flashing or buzzing). The radar module, installed in an electronic component box, maintains a given distance from the ground to avoid echo interference from the ground, thereby reducing the noise of the collected point-cloud data. A controller extracts the relative velocity and the location of the object from the point-cloud data, selects dynamically approaching points to determine the relative distance and the direction of the object, and dynamically adjusts the flashing frequency of a warning lamp or turns on a buzzer based on the distance of the object relative to the radar module.
    Type: Application
    Filed: February 13, 2025
    Publication date: June 25, 2026
    Inventors: CHE-MING HSU, CHUN-LIANG LEE, KENG-FU HUANG
  • Publication number: 20260082652
    Abstract: A method for making a semiconductor device includes forming a first patterned structure over an interlayer dielectric. The interlayer dielectric overlays a first source/drain structure and a second source/drain structure. The first patterned structure extends along a first lateral direction and a vertical projection of the first patterned structure is located between the first and second source/drain structures along a second lateral direction perpendicular to the first lateral direction. The method includes reducing a width of the first patterned structure that extends along the second lateral direction. The method includes forming, based on the first patterned structure having the reduced width, contact holes that expose the first source/drain structure and the second source/drain structure, respectively.
    Type: Application
    Filed: November 26, 2025
    Publication date: March 19, 2026
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Lien Huang, Ching-Feng Fu, Guan-Ren Wang, Che-Ming Hsu
  • Patent number: 12501679
    Abstract: A method for making a semiconductor device includes forming a first patterned structure over an interlayer dielectric. The interlayer dielectric overlays a first source/drain structure and a second source/drain structure. The first patterned structure extends along a first lateral direction and a vertical projection of the first patterned structure is located between the first and second source/drain structures along a second lateral direction perpendicular to the first lateral direction. The method includes reducing a width of the first patterned structure that extends along the second lateral direction. The method includes forming, based on the first patterned structure having the reduced width, contact holes that expose the first source/drain structure and the second source/drain structure, respectively.
    Type: Grant
    Filed: December 15, 2022
    Date of Patent: December 16, 2025
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Yu-Lien Huang, Ching-Feng Fu, Guan-Ren Wang, Che-Ming Hsu
  • Publication number: 20250366190
    Abstract: A method includes forming a channel region over a substrate; forming an isolation feature over the substrate and alongside the channel region; forming a source/drain feature interfacing a sidewall of the channel region; forming a gate structure over the channel region, wherein the gate structure comprises at a dielectric layer and a metal layer; etching the gate structure to form an opening that divides the gate structure into two separate segments; forming a first spacer layer along a sidewall of the opening; forming a second spacer layer over the first spacer layer; removing the first spacer layer such that an air spacer is formed between the second spacer layer and one of the separate segments of the gate structure; filling a dielectric material into the opening and over the second spacer layer, with the air spacer being maintained between the second spacer layer and the gate structure.
    Type: Application
    Filed: August 8, 2025
    Publication date: November 27, 2025
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yu-Lien HUANG, Che-Ming HSU, Ching-Feng FU, Huan-Just LIN
  • Patent number: 12477821
    Abstract: A semiconductor device includes a substrate, a semiconductor fin, a shallow trench isolation (STI) structure, an air spacer, and a gate structure. The semiconductor fin extends upwardly from the substrate. The STI structure laterally surrounds a lower portion of the semiconductor fin. The air spacer is interposed the STI structure and the semiconductor fin. The gate structure extends across the semiconductor fin.
    Type: Grant
    Filed: July 31, 2023
    Date of Patent: November 18, 2025
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yu-Lien Huang, Che-Ming Hsu, Ching-Feng Fu, Huan-Just Lin
  • Publication number: 20240387278
    Abstract: A semiconductor device includes a first source/drain structure coupled to an end of a first conduction channel that extends along a first direction; a second source/drain structure coupled to an end of a second conduction channel that extends along the first direction; a first isolation structure extending into the interlayer dielectric, disposed between the first and second source/drain structures, and disposed next to a gate structure along the first direction; and a second isolation structure below the first and second conduction channels. The second isolation structure includes a shallow trench isolation structure.
    Type: Application
    Filed: July 26, 2024
    Publication date: November 21, 2024
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Lien Huang, Ching-Feng Fu, Huan-Just Lin, Che-Ming Hsu
  • Publication number: 20240379419
    Abstract: A semiconductor structure includes a gate, a self-aligned contact (SAC) layer that is disposed on the gate and that has a seam at a top surface of the SAC layer, a gate spacer that is formed on a sidewall of the gate, and a metal contact that is disposed adjacent to the gate spacer and that is spaced apart from the gate by the gate spacer. The SAC layer includes a filler that seals the seam in the SAC layer, and a top surface of the filler is coplanar with a top surface of the gate spacer and a top surface of the metal contact.
    Type: Application
    Filed: July 23, 2024
    Publication date: November 14, 2024
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yu-Lien HUANG, Ching-Feng FU, Huan-Just LIN, Che-Ming HSU
  • Patent number: 12142532
    Abstract: A semiconductor device includes a first source/drain structure coupled to an end of a first conduction channel that extends along a first direction. The semiconductor device includes a second source/drain structure coupled to an end of a second conduction channel that extends along the first direction. The semiconductor device includes a first interconnect structure extending through an interlayer dielectric and electrically coupled to the first source/drain structure. The semiconductor device includes a second interconnect structure extending through the interlayer dielectric and electrically coupled to the second source/drain structure. The semiconductor device includes a first isolation structure disposed between the first and second source/drain structures and extending into the interlayer dielectric.
    Type: Grant
    Filed: March 23, 2023
    Date of Patent: November 12, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LIMITED
    Inventors: Yu-Lien Huang, Ching-Feng Fu, Huan-Just Lin, Che-Ming Hsu
  • Patent number: 12094768
    Abstract: A method is provided for sealing a seam in a self-aligned contact (SAC) layer that is disposed on a gate of a semiconductor structure. The method includes depositing a filler in the seam to seal the seam.
    Type: Grant
    Filed: July 8, 2021
    Date of Patent: September 17, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yu-Lien Huang, Ching-Feng Fu, Huan-Just Lin, Che-Ming Hsu
  • Publication number: 20230387125
    Abstract: A semiconductor device includes a substrate, a semiconductor fin, a shallow trench isolation (STI) structure, an air spacer, and a gate structure. The semiconductor fin extends upwardly from the substrate. The STI structure laterally surrounds a lower portion of the semiconductor fin. The air spacer is interposed the STI structure and the semiconductor fin. The gate structure extends across the semiconductor fin.
    Type: Application
    Filed: July 31, 2023
    Publication date: November 30, 2023
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yu-Lien HUANG, Che-Ming HSU, Ching-Feng FU, Huan-Just LIN
  • Patent number: 11769770
    Abstract: A semiconductor device includes a substrate, a semiconductor fin, a shallow trench isolation (STI) structure, an air spacer, and a gate structure. The semiconductor fin extends upwardly from the substrate. The STI structure laterally surrounds a lower portion of the semiconductor fin. The air spacer is interposed the STI structure and the semiconductor fin. The gate structure extends across the semiconductor fin.
    Type: Grant
    Filed: May 6, 2021
    Date of Patent: September 26, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yu-Lien Huang, Che-Ming Hsu, Ching-Feng Fu, Huan-Just Lin
  • Patent number: 11761450
    Abstract: A rotation locking system of a motor of a fan is provided. A closed-loop control circuit outputs an initial duty cycle signal according to a current rotational speed and a target rotational speed. A driver circuit outputs a driving signal to the motor to drive the motor to rotate according to the initial duty cycle signal. A lookup table arithmetic circuit looks up, from a lookup table, two reference duty cycles correspond to two reference rotational speeds that are respectively equal to the current rotational speed and the target rotational speed. The lookup table arithmetic circuit calculates a difference between the two reference duty cycles. A speed feedback control circuit compensates the initial duty cycle signal according to the difference to output a final duty cycle signal to the driver circuit. The driver circuit drives the motor to rotate according to the final duty cycle signal.
    Type: Grant
    Filed: November 30, 2021
    Date of Patent: September 19, 2023
    Assignee: ANPEC ELECTRONICS CORPORATION
    Inventors: Che-Ming Hsu, Kun-Min Chen
  • Publication number: 20230230884
    Abstract: A semiconductor device includes a first source/drain structure coupled to an end of a first conduction channel that extends along a first direction. The semiconductor device includes a second source/drain structure coupled to an end of a second conduction channel that extends along the first direction. The semiconductor device includes a first interconnect structure extending through an interlayer dielectric and electrically coupled to the first source/drain structure. The semiconductor device includes a second interconnect structure extending through the interlayer dielectric and electrically coupled to the second source/drain structure. The semiconductor device includes a first isolation structure disposed between the first and second source/drain structures and extending into the interlayer dielectric.
    Type: Application
    Filed: March 23, 2023
    Publication date: July 20, 2023
    Applicant: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Yu-Lien Huang, Ching-Feng Fu, Huan-Just Lin, Che-Ming Hsu
  • Publication number: 20230121435
    Abstract: A method for making a semiconductor device includes forming a first patterned structure over an interlayer dielectric. The interlayer dielectric overlays a first source/drain structure and a second source/drain structure. The first patterned structure extends along a first lateral direction and a vertical projection of the first patterned structure is located between the first and second source/drain structures along a second lateral direction perpendicular to the first lateral direction. The method includes reducing a width of the first patterned structure that extends along the second lateral direction. The method includes forming, based on the first patterned structure having the reduced width, contact holes that expose the first source/drain structure and the second source/drain structure, respectively.
    Type: Application
    Filed: December 15, 2022
    Publication date: April 20, 2023
    Applicant: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Yu-Lien Huang, Ching-Feng Fu, Guan-Ren Wang, Che-Ming Hsu
  • Patent number: 11626326
    Abstract: A semiconductor device includes a first source/drain structure coupled to an end of a first conduction channel that extends along a first direction. The semiconductor device includes a second source/drain structure coupled to an end of a second conduction channel that extends along the first direction. The semiconductor device includes a first interconnect structure extending through an interlayer dielectric and electrically coupled to the first source/drain structure. The semiconductor device includes a second interconnect structure extending through the interlayer dielectric and electrically coupled to the second source/drain structure. The semiconductor device includes a first isolation structure disposed between the first and second source/drain structures and extending into the interlayer dielectric.
    Type: Grant
    Filed: February 3, 2021
    Date of Patent: April 11, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED
    Inventors: Yu-Lien Huang, Ching-Feng Fu, Huan-Just Lin, Che-Ming Hsu
  • Patent number: 11621221
    Abstract: A package substrate is adapted to a ball grid array package. The substrate includes two substrate contacts, two solder ball pads, two via holes and two signal lines. A connection line of the two substrate contacts is substantially perpendicular to a connection line of the two solder ball pads. The two substrate contacts are respectively connected to the two via holes by the two signal lines. Each signal line includes a circuit trace section, an approaching section and a bifurcating section connected in sequence. The two circuit trace sections of each signal line are substantially arranged in parallel. The two approaching sections are substantially arranged in parallel and substantially symmetrical about the connection line of the solder ball pads. The two bifurcating sections are substantially symmetrical about the pad connection line and respectively electrically connected to the two via holes.
    Type: Grant
    Filed: May 11, 2021
    Date of Patent: April 4, 2023
    Assignee: REALTEK SEMICONDUCTOR CORP.
    Inventors: Che-Ming Hsu, Sung-Yuan Lin, Nai-Jen Hsuan, Yu-Hsin Wang
  • Publication number: 20230049456
    Abstract: A rotation locking system of a motor of a fan is provided. A closed-loop control circuit outputs an initial duty cycle signal according to a current rotational speed and a target rotational speed. A driver circuit outputs a driving signal to the motor to drive the motor to rotate according to the initial duty cycle signal. A lookup table arithmetic circuit looks up, from a lookup table, two reference duty cycles correspond to two reference rotational speeds that are respectively equal to the current rotational speed and the target rotational speed. The lookup table arithmetic circuit calculates a difference between the two reference duty cycles. A speed feedback control circuit compensates the initial duty cycle signal according to the difference to output a final duty cycle signal to the driver circuit. The driver circuit drives the motor to rotate according to the final duty cycle signal.
    Type: Application
    Filed: November 30, 2021
    Publication date: February 16, 2023
    Inventors: CHE-MING HSU, KUN-MIN CHEN
  • Publication number: 20230008165
    Abstract: A method is provided for sealing a seam in a self-aligned contact (SAC) layer that is disposed on a gate of a semiconductor structure. The method includes depositing a filler in the seam to seal the seam.
    Type: Application
    Filed: July 8, 2021
    Publication date: January 12, 2023
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yu-Lien HUANG, Ching-Feng FU, Huan-Just LIN, Che-Ming HSU
  • Patent number: 11532712
    Abstract: A method for making a semiconductor device includes forming a first patterned structure over an interlayer dielectric. The interlayer dielectric overlays a first source/drain structure and a second source/drain structure. The first patterned structure extends along a first lateral direction and a vertical projection of the first patterned structure is located between the first and second source/drain structures along a second lateral direction perpendicular to the first lateral direction. The method includes reducing a width of the first patterned structure that extends along the second lateral direction. The method includes forming, based on the first patterned structure having the reduced width, contact holes that expose the first source/drain structure and the second source/drain structure, respectively.
    Type: Grant
    Filed: February 3, 2021
    Date of Patent: December 20, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED
    Inventors: Yu-Lien Huang, Ching-Feng Fu, Guan-Ren Wang, Che-Ming Hsu
  • Publication number: 20220359516
    Abstract: A semiconductor device includes a substrate, a semiconductor fin, a shallow trench isolation (STI) structure, an air spacer, and a gate structure. The semiconductor fin extends upwardly from the substrate. The STI structure laterally surrounds a lower portion of the semiconductor fin. The air spacer is interposed the STI structure and the semiconductor fin. The gate structure extends across the semiconductor fin.
    Type: Application
    Filed: May 6, 2021
    Publication date: November 10, 2022
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yu-Lien HUANG, Che-Ming HSU, Ching-Feng FU, Huan-Just LIN