Patents by Inventor Chen-Chu HSU

Chen-Chu HSU has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD OF MANUFACTURING PIEZOELECTRIC ELEMENT AND PIEZOELECTRIC SUBSTRATE
    Publication number: 20170133582
    Abstract: A method of manufacturing a piezoelectric element includes: forming a patterned mask layer over a substrate, in which the patterned mask layer has an opening exposing a portion of the substrate; forming a piezoelectric element in the opening; and removing the patterned mask layer to obtain the piezoelectric element, in which the piezoelectric element has a central portion and a peripheral portion adjacent to the central portion, and the peripheral portion has a maximum height greater than a height of the central portion.
    Type: Application
    Filed: March 3, 2016
    Publication date: May 11, 2017
    Inventors: Chen-Chu HSU, Ying-Hung TSAI, Wei-Chung CHUANG, Somnath MONDAL