Abstract: A method of forming solar cell includes the following steps. A substrate having a first region and a second region is provided. A dopant source layer is then formed on the substrate. A laser beam is used to locally irradiate the dopant source layer corresponding to the first region to locally diffuse the dopants of the dopant source layer on the first region downward into the substrate. The laser beam also changes the surface property of the substrate in the first region to form a visible patterned mark. The dopant source layer is then removed, and a patterned electrode is formed on the first region of the substrate using the visible patterned mark as an alignment mark.