Abstract: A pre-processing method, a method for forming a metal silicide and a semiconductor processing apparatus are disclosed by the present invention. In the pre-processing method, a plasma etching process is performed on a semiconductor structure including a substrate. A first conductive portion and an isolation spacer covering a side surface of the first conductive portion are formed on a surface of an active area in the substrate. In the plasma etching process, a bias voltage applied to a surface of the semiconductor structure is adjusted by adjusting power outputs of two RF sources and is not lower than 150 V. In the metal silicide formation method, after a semiconductor structure including a first conductive portion and a second conductive portion is pre-processed in the manner as described above, a metal film is deposited thereon and annealed to result in the formation of the metal silicide.

Abstract: A pre-processing method, a method for forming a metal silicide and a semiconductor processing apparatus are disclosed by the present invention. In the pre-processing method, a plasma etching process is performed on a semiconductor structure including a substrate. A first conductive portion and an isolation spacer covering a side surface of the first conductive portion are formed on a surface of an active area in the substrate. In the plasma etching process, a bias voltage applied to a surface of the semiconductor structure is adjusted by adjusting power outputs of two RF sources and is not lower than 150 V. In the metal silicide formation method, after a semiconductor structure including a first conductive portion and a second conductive portion is pre-processed in the manner as described above, a metal film is deposited thereon and annealed to result in the formation of the metal silicide.

Abstract: The specification discloses a device and method for generating a virtual keyboard/display. By means of optical scanning, a virtual display/keyboard is generated on a physical plane through a scan laser switch. Using the code reading technology, the key position entered by the user can be read and transmitted to a computer. The disclosed device includes a first laser emitter, a second laser emitter, and a laser receiver. The disclosed method has the following steps. First, the first laser emitter performs a surface scan to generate the patterns of the keyboard/display. The second laser emitter simultaneously generates a first reflective beam and a second reflective beam when the user enters input using the virtual keyboard. Finally, the laser receiver receives the first and second reflective beams, thereby obtaining the signals entered by the user.

Abstract: The optical scanning apparatus of light sources with different wavelengths relates to an optical scanning apparatus with a plurality of light sources of different wavelengths. All the light beams generated by the different light sources passing through a collimator lens, a cylindrical lens, and a beam combiner to form a single or parallel beams. The single or parallel beams pass through a reflective lens, and then pass through one or more f-&thgr; lenses installed on a rotating apparatus. Different arrangements of the reflective lens corresponding to the f-&thgr; lenses achieve three different kinds of scanning: (1) light spots corresponding to different wavelengths scanning the same positions in order (2) light spots corresponding to different wavelengths scanning different positions simultaneously (3) light spots corresponding to different wavelengths scanning the same positions simultaneously.

Abstract: The optical scanning apparatus of light sources with different wavelengths relates to an optical scanning apparatus with a plurality of light sources of different wavelengths. All the light beams generated by the different light sources passing through a collimator lens, a cylindrical lens, and a beam combiner to form a single or parallel beams. The single or parallel beams pass through a reflective lens, and then pass through one or more f-&thgr; lenses installed on a rotating apparatus. Different arrangements of the reflective lens corresponding to the f-&thgr; lenses achieve three different kinds of scanning: (1) light spots corresponding to different wavelengths scanning the same positions in order (2) light spots corresponding to different wavelengths scanning different positions simultaneously (3) light spots corresponding to different wavelengths scanning the same positions simultaneously.

Abstract: An apparatus for pattern display is formed by projection. The apparatus includes an aperture electrode device having a plurality of ring electrodes with apertures, a voltage control device connected to the ring electrodes by copper circuits, a movable conductive substrate electrode of a glass substrate evaporated with conductive material thereon and a feeding device for charging the organic luminary powder by friction. The feeding device includes a feeding roller and a magnetic roller with a magnetic rod therein. The magnetic roller rolls in the same direction to feed the organic luminary powder and the ferromagnetic carrier beads. The friction between the ferromagnetic beads and the organic luminary powder charges the powder.

Abstract: The specification discloses a device and method for generating a virtual keyboard/display. By means of optical scanning, a virtual display/keyboard is generated on a physical plane through a scan laser switch. Using the code reading technology, the key position entered by the user can be read and transmitted to a computer. The disclosed device includes a first laser emitter, a second laser emitter, and a laser receiver. The disclosed method has the following steps. First, the first laser emitter performs a surface scan to generate the patterns of the keyboard/display. The second laser emitter simultaneously generates a first reflective beam and a second reflective beam when the user enters input using the virtual keyboard. Finally, the laser receiver receives the first and second reflective beams, thereby obtaining the signals entered by the user.