Patents by Inventor Chen-Hsu Hung

Chen-Hsu Hung has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUBSTRATE CLEANING METHOD
    Publication number: 20170207079
    Abstract: A substrate cleaning method is provided. A substrate is provided, followed by performing a first pre-cleaning process with a first rotation speed and a first duration time. After the first pre-cleaning process, a second pre-cleaning process is performed with a second rotation speed and a second duration time, wherein the second rotation speed is greater than the first rotation speed. After the second pre-cleaning process, a cleaning process is performed by using a chemical agent with a cleaning rotation speed.
    Type: Application
    Filed: January 15, 2016
    Publication date: July 20, 2017
    Inventors: Chia-Ming Lee, Kuo-Wei Chih, Chen-Hsu Hung, Chun-Li Lin, Chia-Yen Hsu, Tsung-Hsun Tsai, Po-Lun Cheng