Patents by Inventor Chen-Hsuan LU

Chen-Hsuan LU has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240105629
    Abstract: A semiconductor package includes a first semiconductor die, a second semiconductor die, a semiconductor bridge, an integrated passive device, a first redistribution layer, and connective terminals. The second semiconductor die is disposed beside the first semiconductor die. The semiconductor bridge electrically connects the first semiconductor die with the second semiconductor die. The integrated passive device is electrically connected to the first semiconductor die. The first redistribution layer is disposed over the semiconductor bridge. The connective terminals are disposed on the first redistribution layer, on an opposite side with respect to the semiconductor bridge. The first redistribution layer is interposed between the integrated passive device and the connective terminals.
    Type: Application
    Filed: November 30, 2023
    Publication date: March 28, 2024
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chen-Hsuan Tsai, Chin-Chuan Chang, Szu-Wei Lu, Tsung-Fu Tsai
  • Patent number: 11855171
    Abstract: A method includes forming source/drain regions in a semiconductor substrate; depositing a zirconium-containing oxide layer over a channel region in the semiconductor substrate and between the source/drain region; forming a titanium oxide layer in contact with the zirconium-containing oxide layer; forming a top electrode over the zirconium-containing oxide layer, wherein no annealing is performed after depositing the zirconium-containing oxide layer and prior to forming the top electrode.
    Type: Grant
    Filed: August 12, 2021
    Date of Patent: December 26, 2023
    Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., NATIONAL TAIWAN UNIVERSITY
    Inventors: Miin-Jang Chen, Sheng-Han Yi, Chen-Hsuan Lu
  • Patent number: 11823895
    Abstract: A method of forming graphene on a flexible substrate includes providing a polymer substrate including a metal structure and providing a carbon source and a carrier gas. The method also includes subjecting the polymer substrate to a plasma enhanced chemical vapor deposition (PECVD) process and growing a graphene layer on the copper structure.
    Type: Grant
    Filed: October 13, 2021
    Date of Patent: November 21, 2023
    Assignees: California Institute of Technology, Industrial Technology Research Institute
    Inventors: Chen-Hsuan Lu, Chyi-Ming Leu, Nai-Chang Yeh, Chih-Cheng Lin, Chi-Fu Tseng
  • Publication number: 20220115230
    Abstract: A method of forming graphene on a flexible substrate includes providing a polymer substrate including a metal structure and providing a carbon source and a carrier gas. The method also includes subjecting the polymer substrate to a plasma enhanced chemical vapor deposition (PECVD) process and growing a graphene layer on the copper structure.
    Type: Application
    Filed: October 13, 2021
    Publication date: April 14, 2022
    Applicants: CALIFORNIA INSTITUTE OF TECHNOLOGY, Industrial Technology Research Institute
    Inventors: Chen-Hsuan Lu, Chyi-Ming Leu, Nai-Chang Yeh, Chih-Cheng Lin, Chi-Fu Tseng
  • Publication number: 20210384315
    Abstract: A method includes forming source/drain regions in a semiconductor substrate; depositing a zirconium-containing oxide layer over a channel region in the semiconductor substrate and between the source/drain region; forming a titanium oxide layer in contact with the zirconium-containing oxide layer; forming a top electrode over the zirconium-containing oxide layer, wherein no annealing is performed after depositing the zirconium-containing oxide layer and prior to forming the top electrode.
    Type: Application
    Filed: August 12, 2021
    Publication date: December 9, 2021
    Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., NATIONAL TAIWAN UNIVERSITY
    Inventors: Miin-Jang CHEN, Sheng-Han YI, Chen-Hsuan LU
  • Patent number: 11101362
    Abstract: A device includes a substrate, a first zirconium-containing oxide layer, a first metal oxide layer and a top electrode. The first zirconium-containing oxide layer is over a substrate and having ferroelectricity or antiferroelectricity. The first metal oxide layer is in contact with the first zirconium-containing oxide layer. The first metal oxide layer has a thickness less than a thickness of the first zirconium-containing oxide layer. The top electrode is over the first zirconium-containing oxide layer.
    Type: Grant
    Filed: December 26, 2018
    Date of Patent: August 24, 2021
    Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., NATIONAL TAIWAN UNIVERSITY
    Inventors: Miin-Jang Chen, Sheng-Han Yi, Chen-Hsuan Lu
  • Publication number: 20200035807
    Abstract: A device includes a substrate, a first zirconium-containing oxide layer, a first metal oxide layer and a top electrode. The first zirconium-containing oxide layer is over a substrate and having ferroelectricity or antiferroelectricity. The first metal oxide layer is in contact with the first zirconium-containing oxide layer. The first metal oxide layer has a thickness less than a thickness of the first zirconium-containing oxide layer. The top electrode is over the first zirconium-containing oxide layer.
    Type: Application
    Filed: December 26, 2018
    Publication date: January 30, 2020
    Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., NATIONAL TAIWAN UNIVERSITY
    Inventors: Miin-Jang CHEN, Sheng-Han YI, Chen-Hsuan LU