Patents by Inventor Chen-Liang Liao

Chen-Liang Liao has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10083860
    Abstract: A method of forming a semiconductor structure includes; (i) forming an isolation structure in a semiconductor substrate, the isolation structure electrically isolating device regions of the semiconductor substrate; (ii) forming a gate structure extending from one of the device regions to the isolation structure; (iii) forming a resist protective oxide layer overlaying the gate structure and the isolation structure; and (iv) patterning the resist protective oxide layer to form a patterned resist protective oxide that covers at least a portion of the isolation structure and a portion of the gate structure on the isolation structure.
    Type: Grant
    Filed: April 24, 2017
    Date of Patent: September 25, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chen-Liang Liao, Chia-Yao Liang, Jui-Long Chen, Sheng-Yuan Lin, Yi-Lii Huang, Kuo-Hsi Lee, Po-An Chen
  • Publication number: 20170229343
    Abstract: A method of forming a semiconductor structure includes; (i) forming an isolation structure in a semiconductor substrate, the isolation structure electrically isolating device regions of the semiconductor substrate; (ii) forming a gate structure extending from one of the device regions to the isolation structure; (iii) forming a resist protective oxide layer overlaying the gate structure and the isolation structure; and (iv) patterning the resist protective oxide layer to form a patterned resist protective oxide that covers at least a portion of the isolation structure and a portion of the gate structure on the isolation structure.
    Type: Application
    Filed: April 24, 2017
    Publication date: August 10, 2017
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chen-Liang LIAO, Chia-Yao LIANG, Jui-Long CHEN, Sheng-Yuan LIN, Yi-Lii HUANG, Kuo-Hsi LEE, Po-An CHEN
  • Patent number: 9691867
    Abstract: The semiconductor device structures and methods for forming the same are provided. The semiconductor device structure includes a metal gate over a substrate. A first spacer is formed over sidewalls of the metal gate and having a first height. A second spacer is formed over the sidewalls of the metal gate and having a second height. The first height is higher than the second height. The first spacer is farther from the sidewalls of the metal gate than the second spacer. In addition, the semiconductor device structure includes a dielectric layer formed over the substrate to surround the first spacer and the metal gate.
    Type: Grant
    Filed: August 22, 2016
    Date of Patent: June 27, 2017
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chen-Liang Liao, Chih-Hsiao Chen, Yi-Lii Huang, Yao-Yu Li
  • Patent number: 9633860
    Abstract: A semiconductor structure includes an isolation structure, a gate stack, a spacer and a patterned resist protective oxide. The isolation structure is formed in a semiconductor substrate, and electrically isolates device regions of the semiconductor substrate. The gate stack is located on the isolation structure. The spacer is formed along a sidewall of the gate stack on the isolation structure. The patterned resist protective oxide is located on the isolation structure and covers a sidewall of the spacer such that the spacer is interposed between the patterned resist protective oxide and the gate stack.
    Type: Grant
    Filed: July 9, 2015
    Date of Patent: April 25, 2017
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chen-Liang Liao, Chia-Yao Liang, Jui-Long Chen, Sheng-Yuan Lin, Yi-Lii Huang, Kuo-Hsi Lee, Po-An Chen
  • Publication number: 20170011925
    Abstract: A semiconductor structure includes an isolation structure, a gate stack, a spacer and a patterned resist protective oxide. The isolation structure is formed in a semiconductor substrate, and electrically isolates device regions of the semiconductor substrate. The gate stack is located on the isolation structure. The spacer is formed along a sidewall of the gate stack on the isolation structure. The patterned resist protective oxide is located on the isolation structure and covers a sidewall of the spacer such that the spacer is interposed between the patterned resist protective oxide and the gate stack.
    Type: Application
    Filed: July 9, 2015
    Publication date: January 12, 2017
    Inventors: Chen-Liang LIAO, Chia-Yao LIANG, Jui-Long CHEN, Sheng-Yuan LIN, Yi-Lii HUANG, Kuo-Hsi LEE, Po-An CHEN
  • Patent number: 9529956
    Abstract: The integrated circuit (IC) device includes a substrate, an isolation feature, a first gate structure, a second gate structure, a first contact feature and a first supplementary active region. The isolation feature is disposed in the substrate, and the isolation feature defines a boundary between a first active region and a second active region of the substrate. The first gate structure is disposed over the first active region. The second gate structure is disposed over the second active region. The first contact feature is disposed over the first active region, in which a portion of the first active region is disposed between the first gate structure and the isolation feature. The first supplementary active region is disposed adjacent to the portion of the first active region, in which a thickness of the first supplementary active region is substantially in a range from 5 nm to 10 nm.
    Type: Grant
    Filed: August 7, 2014
    Date of Patent: December 27, 2016
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chen-Liang Liao, Cheng-Wei Cheng, Ming Lei, Yi-Lii Huang
  • Publication number: 20160359010
    Abstract: The semiconductor device structures and methods for forming the same are provided. The semiconductor device structure includes a metal gate over a substrate. A first spacer is formed over sidewalls of the metal gate and having a first height. A second spacer is formed over the sidewalls of the metal gate and having a second height. The first height is higher than the second height. The first spacer is farther from the sidewalls of the metal gate than the second spacer. In addition, the semiconductor device structure includes a dielectric layer formed over the substrate to surround the first spacer and the metal gate.
    Type: Application
    Filed: August 22, 2016
    Publication date: December 8, 2016
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO.,LTD.
    Inventors: Chen-Liang LIAO, Chih-Hsiao CHEN, Yi-lii HUANG, Yao-Yu LI
  • Patent number: 9425274
    Abstract: The semiconductor device structures and methods for forming the same are provided. The semiconductor device structure includes a metal gate over a substrate. A first spacer is formed over sidewalls of the metal gate and having a first height. A second spacer is formed over the sidewalls of the metal gate and having a second height. The first height is higher than the second height. The first spacer is farther from the sidewalls of the metal gate than the second spacer. In addition, the semiconductor device structure includes a dielectric layer formed over the substrate to surround the first spacer and the metal gate.
    Type: Grant
    Filed: March 21, 2016
    Date of Patent: August 23, 2016
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
    Inventors: Chen-Liang Liao, Chih-Hsiao Chen, Yi-Lii Huang, Yao-Yu Li
  • Publication number: 20160203984
    Abstract: The semiconductor device structures and methods for forming the same are provided. The semiconductor device structure includes a metal gate over a substrate. A first spacer is formed over sidewalls of the metal gate and having a first height. A second spacer is formed over the sidewalls of the metal gate and having a second height. The first height is higher than the second height. The first spacer is farther from the sidewalls of the metal gate than the second spacer. In addition, the semiconductor device structure includes a dielectric layer formed over the substrate to surround the first spacer and the metal gate.
    Type: Application
    Filed: March 21, 2016
    Publication date: July 14, 2016
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chen-Liang LIAO, Chih-Hsiao CHEN, Yi-Lii HUANG, Yao-Yu LI
  • Patent number: 9349817
    Abstract: Embodiments of the disclosure provide semiconductor device structures and methods of forming the same. The semiconductor device structure includes a metal gate over a substrate. A first spacer is formed over sidewalls of the metal gate and having a first height. A second spacer is formed over the sidewalls of the metal gate and having a second height. The first height is higher than the second height. The first spacer is farther from the sidewalls of the metal gate than the second spacer. In addition, the semiconductor device structure includes a dielectric layer formed over the substrate to surround the first spacer and the metal gate.
    Type: Grant
    Filed: February 3, 2014
    Date of Patent: May 24, 2016
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
    Inventors: Chen-Liang Liao, Chih-Hsiao Chen, Yi-Lii Huang, Yao-Yu Li
  • Patent number: 9324864
    Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a semiconductor substrate. The semiconductor device structure includes an isolation structure positioned in the semiconductor substrate and adjacent to a first active region of the semiconductor substrate. The semiconductor device structure includes a gate stack disposed over the first active region. The semiconductor device structure includes a first contact structure disposed over the first active region and positioned between the isolation structure and the gate stack. The semiconductor device structure includes a dummy gate stack disposed over the isolation structure and adjacent to the gate stack. The dummy gate stack is not positioned over a portion of the isolation structure next to the first contact structure.
    Type: Grant
    Filed: September 30, 2014
    Date of Patent: April 26, 2016
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chia-Yao Liang, Chen-Liang Liao, Ming Lei, Chih-Hsiao Chen, Yi-Lii Huang
  • Publication number: 20160093736
    Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a semiconductor substrate. The semiconductor device structure includes an isolation structure positioned in the semiconductor substrate and adjacent to a first active region of the semiconductor substrate. The semiconductor device structure includes a gate stack disposed over the first active region. The semiconductor device structure includes a first contact structure disposed over the first active region and positioned between the isolation structure and the gate stack. The semiconductor device structure includes a dummy gate stack disposed over the isolation structure and adjacent to the gate stack. The dummy gate stack is not positioned over a portion of the isolation structure next to the first contact structure.
    Type: Application
    Filed: September 30, 2014
    Publication date: March 31, 2016
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chia-Yao LIANG, Chen-Liang LIAO, Ming LEI, Chih-Hsiao CHEN, Yi-Lii HUANG
  • Publication number: 20160042109
    Abstract: The integrated circuit (IC) device includes a substrate, an isolation feature, a first gate structure, a second gate structure, a first contact feature and a first supplementary active region. The isolation feature is disposed in the substrate, and the isolation feature defines a boundary between a first active region and a second active region of the substrate. The first gate structure is disposed over the first active region. The second gate structure is disposed over the second active region. The first contact feature is disposed over the first active region, in which a portion of the first active region is disposed between the first gate structure and the isolation feature. The first supplementary active region is disposed adjacent to the portion of the first active region, in which a thickness of the first supplementary active region is substantially in a range from 5 nm to 10 nm.
    Type: Application
    Filed: August 7, 2014
    Publication date: February 11, 2016
    Inventors: Chen-Liang LIAO, Cheng-Wei CHENG, Ming LEI, Yi-Lii HUANG
  • Publication number: 20150221737
    Abstract: Embodiments of the disclosure provide semiconductor device structures and methods of forming the same. The semiconductor device structure includes a metal gate over a substrate. A first spacer is formed over sidewalls of the metal gate and having a first height. A second spacer is formed over the sidewalls of the metal gate and having a second height. The first height is higher than the second height. The first spacer is farther from the sidewalls of the metal gate than the second spacer. In addition, the semiconductor device structure includes a dielectric layer formed over the substrate to surround the first spacer and the metal gate.
    Type: Application
    Filed: February 3, 2014
    Publication date: August 6, 2015
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd
    Inventors: Chen-Liang LIAO, Chih-Hsiao CHEN, Yi-Lii HUANG, Yao-Yu LI
  • Publication number: 20120227782
    Abstract: In one aspect of the present invention, a photovoltaic module includes a plurality of sub-modules. Each sub-module includes a plurality of photovoltaic cells spatially arranged as an array, each cell having first and second conductive layers sandwiching an active layer therebetween. The cells in each sub-module are electrically connected to each other in series. Each sub-module further includes positive and negative electrodes formed on the second conductive layers of the first and last cells, respectively, in a respective sub-module. The positive electrode of each sub-module is electrically connected to each other and the negative electrode of each sub-module is electrically connected to each other such that the plurality of sub-modules is electrically connected in parallel. The plurality of sub-modules is spatially arranged next to each other as an array such that at least one sub-module is spatially separated from its immediately next sub-module by a gap.
    Type: Application
    Filed: March 11, 2011
    Publication date: September 13, 2012
    Applicant: AURIA SOLAR CO., LTD.
    Inventors: Chin-Yao Tsai, Yu-Chun Peng, Po-Han Lin, Yi-Kai Lin, Chen-Liang Liao, Chih-Hsiung Chang, Kun-Chih Lin
  • Publication number: 20110265847
    Abstract: A thin-film solar cell module includes a substrate, a plurality of thin-film solar cells, a first ribbon, and a second ribbon. The thin-film solar cells are disposed on the substrate in a first direction, and the thin-film solar cell module has an isolation zone between the two thin-film solar cells next to each other. Each of the thin-film solar cells includes a first electrode layer, a photoelectric conversion layer, and a second electrode layer, in which the photoelectric conversion layer and the second electrode layer are disposed on the first electrode layer with a portion of the first electrode layer exposed. The first ribbon is used for connecting the exposed portion of the first electrode layer in each of the thin-film solar cells, and the second ribbon is used for connecting each of the second electrode layers.
    Type: Application
    Filed: July 12, 2011
    Publication date: November 3, 2011
    Applicant: AURIA SOLAR CO., LTD.
    Inventors: Yu-Chun Peng, Chih-Hsiung Chang, Yi-Kai Lin, Chen-Liang Liao
  • Publication number: 20110265850
    Abstract: A solar cell module. In one embodiment, the solar cell module includes a substrate, a battery unit, a first strip electrode and a second strip electrode. The substrate has a plurality of power generation zones and at least one cutting zone, and the cutting zone is located among the power generation zones. The battery unit is disposed on the power generation zones and the cutting zones of the substrate. The first strip electrode is disposed on the battery unit, and located at a first end power generation zone of the power generation zones. The second strip electrode is disposed on the battery unit, and located at a second end power generation zone of the power generation zones.
    Type: Application
    Filed: July 15, 2011
    Publication date: November 3, 2011
    Applicant: AURIA SOLAR CO., LTD.
    Inventors: Chen-Liang Liao, Chih-Hsiung Chang, Yu-Chun Peng, Yi-Kai Lin
  • Publication number: 20080131822
    Abstract: A template, stamp or mold is fabricated by using a low-k material. The structure of the low-k material is transformed when it is baked in a novel heating process. Thus, the template is fabricated to obtain a high hardness and a high aspect-ratio with a low dose of electron beam lithography and an optimized baking process. Consequently, the residual; layer at photoresist bottom is reduced and the time for reactive ion etching is saved. In the end, the stability and the integrity is improved. Hence, the present invention is a solution for fabricating a template, stamp or mold with the feature size from sub-micrometer down to nanometer level.
    Type: Application
    Filed: January 17, 2007
    Publication date: June 5, 2008
    Applicant: National Tsing Hua University
    Inventors: Chen-Liang Liao, Jiann-Heng Chen, Fon-Shan Huang