Patents by Inventor Chen Ping

Chen Ping has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11522073
    Abstract: A method of fabricating a semiconductor device is disclosed. The method includes forming semiconductor fins on a substrate. A first dummy gate is formed over the semiconductor fins. A recess is formed in the first dummy gate, and the recess is disposed between the semiconductor fins. A dummy fin material is formed in the recess. A portion of the dummy fin material is removed to expose an upper surface of the first dummy gate and to form a dummy fin. A second dummy gate is formed on the exposed upper surface of the first dummy gate.
    Type: Grant
    Filed: October 27, 2020
    Date of Patent: December 6, 2022
    Assignee: TAIWAN SEMICONDUTOR MANUFACTURING COMPANY LIMITED
    Inventors: Shih-Yao Lin, Chih-Han Lin, Chen-Ping Chen, Kuei-Yu Kao, Hsiao Wen Lee
  • Publication number: 20220384263
    Abstract: A method includes etching a semiconductor substrate to form a trench, with the semiconductor substrate having a sidewall facing the trench, and depositing a first semiconductor layer extending into the trench. The first semiconductor layer includes a first bottom portion at a bottom of the trench, and a first sidewall portion on the sidewall of the semiconductor substrate. The first sidewall portion is removed to reveal the sidewall of the semiconductor substrate. The method further includes depositing a second semiconductor layer extending into the trench, with the second semiconductor layer having a second bottom portion over the first bottom portion, and a second sidewall portion contacting the sidewall of the semiconductor substrate. The second sidewall portion is removed to reveal the sidewall of the semiconductor substrate.
    Type: Application
    Filed: August 9, 2022
    Publication date: December 1, 2022
    Inventors: Shih-Yao Lin, Kuei-Yu Kao, Chen-Ping Chen, Chih-Han Lin
  • Publication number: 20220384617
    Abstract: A device includes a fin protruding from a semiconductor substrate; a gate stack over and along a sidewall of the fin; a gate spacer along a sidewall of the gate stack and along the sidewall of the fin; an epitaxial source/drain region in the fin and adjacent the gate spacer; and a corner spacer between the gate stack and the gate spacer, wherein the corner spacer extends along the sidewall of the fin, wherein a first region between the gate stack and the sidewall of the fin is free of the corner spacer, wherein a second region between the gate stack and the gate spacer is free of the corner spacer.
    Type: Application
    Filed: August 9, 2022
    Publication date: December 1, 2022
    Inventors: Chen-Ping Chen, Kuei-Yu Kao, Shih-Yao Lin, Chih-Han Lin, Ming-Ching Chang, Chao-Cheng Chen
  • Publication number: 20220367672
    Abstract: A method of fabricating a semiconductor device is disclosed. The method includes forming semiconductor fins on a substrate. A first dummy gate is formed over the semiconductor fins. A recess is formed in the first dummy gate, and the recess is disposed between the semiconductor fins. A dummy fin material is formed in the recess. A portion of the dummy fin material is removed to expose an upper surface of the first dummy gate and to form a dummy fin. A second dummy gate is formed on the exposed upper surface of the first dummy gate.
    Type: Application
    Filed: July 26, 2022
    Publication date: November 17, 2022
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Shih-Yao LIN, Chen-Ping Chen, Kuei-Yu Kao, Hsiao Wen Lee, Chih-Han Lin
  • Publication number: 20220359709
    Abstract: A method includes forming a dummy gate electrode on a semiconductor region, forming a first gate spacer on a sidewall of the dummy gate electrode, and removing an upper portion of the first gate spacer to form a recess, wherein a lower portion of the first gate spacer remains, filling the recess with a second gate spacer, removing the dummy gate electrode to form a trench, and forming a replacement gate electrode in the trench.
    Type: Application
    Filed: July 20, 2022
    Publication date: November 10, 2022
    Inventors: Shih-Yao Lin, Kuei-Yu Kao, Chen-Ping Chen, Chih-Han Lin, Ming-Ching Chang, Chao-Cheng Chen
  • Publication number: 20220359722
    Abstract: A method includes simultaneously forming a first dummy gate stack and a second dummy gate stack on a first portion and a second portion of a protruding fin, simultaneously removing a first gate electrode of the first dummy gate stack and a second gate electrode of the second dummy gate stack to form a first trench and a second trench, respectively, forming an etching mask, wherein the etching mask fills the first trench and the second trench, patterning the etching mask to remove the etching mask from the first trench, removing a first dummy gate dielectric of the first dummy gate stack, with the etching mask protecting a second dummy gate dielectric of the second dummy gate stack from being removed, and forming a first replacement gate stack and a second replacement gate stack in the first trench and the second trench, respectively.
    Type: Application
    Filed: July 25, 2022
    Publication date: November 10, 2022
    Inventors: Shih-Yao Lin, Kuei-Yu Kao, Chen-Ping Chen, Chih-Han Lin
  • Patent number: 11488858
    Abstract: A method includes etching a semiconductor substrate to form a trench, with the semiconductor substrate having a sidewall facing the trench, and depositing a first semiconductor layer extending into the trench. The first semiconductor layer includes a first bottom portion at a bottom of the trench, and a first sidewall portion on the sidewall of the semiconductor substrate. The first sidewall portion is removed to reveal the sidewall of the semiconductor substrate. The method further includes depositing a second semiconductor layer extending into the trench, with the second semiconductor layer having a second bottom portion over the first bottom portion, and a second sidewall portion contacting the sidewall of the semiconductor substrate. The second sidewall portion is removed to reveal the sidewall of the semiconductor substrate.
    Type: Grant
    Filed: May 8, 2020
    Date of Patent: November 1, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Shih-Yao Lin, Kuei-Yu Kao, Chen-Ping Chen, Chih-Han Lin
  • Publication number: 20220336662
    Abstract: A semiconductor device in a first area includes first non-planar semiconductor structures separated with a first distance, and a first isolation region including a first layer and a second layer that collectively embed a lower portion of each of the first non-planar semiconductor structures. At least one of the first layer or second layer of the first isolation region is in a cured state. The semiconductor device in a second area includes second non-planar semiconductor structures separated with a second distance, and a second isolation region including a first layer and a second layer that collectively embed a lower portion of each of the second non-planar semiconductor structures. At least one of the first or second layer of the second isolation region is in a cured state.
    Type: Application
    Filed: April 14, 2021
    Publication date: October 20, 2022
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Shih-Yao Lin, Hsiao Wen Lee, Li-Jung Kuo, Chen-Ping Chen, Ming-Ching Chang
  • Patent number: 11476347
    Abstract: A method includes forming a dummy gate electrode on a semiconductor region, forming a first gate spacer on a sidewall of the dummy gate electrode, and removing an upper portion of the first gate spacer to form a recess, wherein a lower portion of the first gate spacer remains, filling the recess with a second gate spacer, removing the dummy gate electrode to form a trench, and forming a replacement gate electrode in the trench.
    Type: Grant
    Filed: September 11, 2020
    Date of Patent: October 18, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Shih-Yao Lin, Kuei-Yu Kao, Chen-Ping Chen, Chih-Han Lin, Ming-Ching Chang, Chao-Cheng Chen
  • Publication number: 20220328646
    Abstract: A semiconductor device is disclosed. The semiconductor device includes a substrate including a semiconductor material. The semiconductor device includes a conduction channel of a transistor disposed above the substrate. The conduction channel and the substrate include a similar semiconductor material. The semiconductor device includes a source/drain region extending from an end of the conduction channel. The semiconductor device includes a dielectric structure. The source/drain region is electrically coupled to the conduction channel and electrically isolated from the substrate by the dielectric structure.
    Type: Application
    Filed: April 7, 2021
    Publication date: October 13, 2022
    Applicant: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Chen-Ping Chen, Chih-Han Lin, Ming-Ching Chang, Chao-Cheng Chen
  • Publication number: 20220319928
    Abstract: In a method of manufacturing a semiconductor device, a fin structure including a stacked layer of first and second semiconductor layers and a hard mask layer over the stacked layer is formed. A sacrificial cladding layer is formed over at least sidewalls of the exposed hard mask layer and stacked layer. An etching is performed to remove lateral portions of the sacrificial cladding layer, thereby leaving the sacrificial cladding layer on sidewalls of the exposed hard mask layer and stacked layer. A first dielectric layer and a second dielectric layer made of a different material than the first dielectric layer are formed. The second dielectric layer is recessed, and a third dielectric layer made of a different material than the second dielectric layer is formed on the recessed second dielectric layer. During the etching operation, a protection layer is formed over the sacrificial cladding layer.
    Type: Application
    Filed: July 6, 2021
    Publication date: October 6, 2022
    Inventors: Shu-Wen SHEN, Chen-Ping CHEN
  • Publication number: 20220310114
    Abstract: A smart audio noise reduction system includes sound-receiving units and a smart audio processing unit. The smart audio processing unit receives audio data generated by the sound-receiving units, recognizes, with an artificial intelligence algorithm, voice data being carried in the audio data and falling within a specific ranged of angles, and generates processed digital audio data by optimizing the voice data. Therefore, the smart audio noise reduction system generates a sound stream of definite voice data falling within a specific range of angles to enhance the ease of collecting voice data within a specific range of angles and reduce interference from voice originating from the other locations or ambient sounds.
    Type: Application
    Filed: March 23, 2021
    Publication date: September 29, 2022
    Inventor: CHEN-PING YANG
  • Patent number: 11448518
    Abstract: A system and method may generate a more realistic augmented reality (AR) overlay by generating a segmentation image and blending it with one or more other images. The system may generate a segmentation image based on an input image. The segmentation image may be blended with an AR path overlay image to generate an object-masked AR path overlay image. The object-masked AR path overlay image may be blended with the input image to generate an output image.
    Type: Grant
    Filed: January 17, 2020
    Date of Patent: September 20, 2022
    Inventors: Chen-Ping Yu, Xinyu Li, Aaditya Chandrasekhar
  • Publication number: 20220216322
    Abstract: Semiconductor devices and methods of forming are described herein. The methods include depositing a dummy gate material layer over a fin etched into a substrate. A gate mask is then formed over the dummy gate material layer in a channel region of the fin. A dummy gate electrode is etched into the dummy gate material using the gate mask. A top spacer is then deposited over the gate mask and along sidewalls of a top portion of the dummy gate electrode. An opening is then etched through the remainder of the dummy gate material and through the fin. A bottom spacer is then formed along a sidewall of the opening and separates a bottom portion of the dummy gate electrode from the opening. A source/drain region is then formed in the opening and the dummy gate electrode is replaced with a metal gate stack.
    Type: Application
    Filed: March 28, 2022
    Publication date: July 7, 2022
    Inventors: Shih-Yao Lin, Kuei-Yu Kao, Chen-Ping Chen, Chih-Han Lin, Ming-Ching Chang, Chao-Cheng Chen
  • Publication number: 20220181214
    Abstract: The disclosure is directed towards semiconductor devices and methods of manufacturing the semiconductor devices. The methods include forming fins in a device region and forming other fins in a multilayer stack of semiconductor materials in a multi-channel device region. A topmost nanostructure may be exposed in the multi-channel device region by removing a sacrificial layer from the top of the multilayer stack. Once removed, a stack of nanostructures are formed from the multilayer stack. A native oxide layer is formed to a first thickness over the topmost nanostructure and to a second thickness over the remaining nanostructures of the stack, the first thickness being greater than the second thickness. A gate dielectric is formed over the fins in the device region. A gate electrode is formed over the gate dielectric in the device region and surrounding the native oxide layer in the multi-channel device region.
    Type: Application
    Filed: February 28, 2022
    Publication date: June 9, 2022
    Inventors: Shih-Yao Lin, Chih-Chung Chiu, Kuei-Yu Kao, Chen-Ping Chen, Chih-Han Lin
  • Patent number: 11333506
    Abstract: Systems and methods for a more usable Augmented Reality (AR) display of navigation indications is described. A live camera image of a scene may be captured from a device. Navigation instructions may be generated from a navigation system and a navigation indication may be generated for display. A computer vision-based positioning algorithm may be performed on the camera image to determine the relative position between the viewpoint of the device and one or more landmarks in the live camera image. The location or shape of the visual display of the navigation indication may be determined based on the computer vision-based positioning algorithm.
    Type: Grant
    Filed: December 18, 2020
    Date of Patent: May 17, 2022
    Assignee: Phiar Technologies, Inc.
    Inventors: Chen-Ping Yu, Xinyu Li, Jim Zin, Aaditya Chandrasekhar
  • Publication number: 20220125193
    Abstract: A brush roller and its manufacturing method and brush roller mold is provided, the brush roller is manufactured by foaming a gaseous pore filler, while solving the problem of using a solid pore filler foaming method to manufacture the brush roller. In addition, the brush roller of the present invention has a plurality of fluid channels communicating between any adjacent two, and the plurality of fluid channels respectively extend to the surface of the brush roller to form pores to improve the fluid permeability of the brush roller, and in the brush roller manufacturing method of the present invention, after the PVA emulsified solution is cured, the compressive stress under the condition of the predetermined compression ratio can be formed to meet the expected brush roller, and it can be used to brush the circuit substrate.
    Type: Application
    Filed: October 19, 2021
    Publication date: April 28, 2022
    Inventor: CHEN-PING HSU
  • Publication number: 20220130978
    Abstract: A method of fabricating a semiconductor device is disclosed. The method includes forming semiconductor fins on a substrate. A first dummy gate is formed over the semiconductor fins. A recess is formed in the first dummy gate, and the recess is disposed between the semiconductor fins. A dummy fin material is formed in the recess. A portion of the dummy fin material is removed to expose an upper surface of the first dummy gate and to form a dummy fin. A second dummy gate is formed on the exposed upper surface of the first dummy gate.
    Type: Application
    Filed: October 27, 2020
    Publication date: April 28, 2022
    Inventors: Shih-Yao Lin, Chih-Han Lin, Chen-Ping Chen, Kuei-Yu Kao, Hsiao Wen Lee
  • Patent number: 11313695
    Abstract: A system and method may generate a more realistic augmented reality (AR) overlay by generating a segmentation image and blending it with one or more other images. The system may generate a segmentation image based on an input image. The segmentation image may be blended with an AR path overlay image to generate an object-masked AR path overlay image. The object-masked AR path overlay image may be blended with the input image to generate an output image.
    Type: Grant
    Filed: September 12, 2019
    Date of Patent: April 26, 2022
    Assignee: Phiar Technologies, Inc.
    Inventors: Chen-Ping Yu, Xinyu Li, Aaditya Chandrasekhar
  • Publication number: 20220100504
    Abstract: A processing system that includes a shared data fabric resets a first client processor while operating a second client processor. The first client processor is instructed to stop making requests to one or more devices of the shared data fabric. Status communications are blocked between the first client processor and a memory controller, the second client processor, or both, such that the first client processor enters a temporary offline state. The first client processor is indicated as being non-coherent. Accordingly, when the processor is reset some errors and efficiency losses due messages sent during or prior to the reset are prevented.
    Type: Application
    Filed: September 25, 2020
    Publication date: March 31, 2022
    Inventors: Benjamin TSIEN, Alexander J. BRANOVER, John PETRY, Chen-Ping YANG, Rostyslav KYRYCHYNSKYI, Vydhyanathan KALYANASUNDHARAM