Patents by Inventor Chen-Te CHU

Chen-Te CHU has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230352394
    Abstract: A semiconductor packaging structure includes a first passivation layer, a capacitor structure, and a second passivation layer. The capacitor structure is disposed on the first passivation layer. The second passivation layer is disposed on the capacitor structure opposite to the first passivation layer. The second passivation layer has a compressive stress that is smaller than ?0.3 GPa.
    Type: Application
    Filed: April 28, 2022
    Publication date: November 2, 2023
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chen-Te CHU, Yuan-Yang HSIAO, Chih-Pin CHIU, Ying-Yao LAI, Mao-Nan WANG, Chen-Chiu HUANG, Dian-Hau CHEN
  • Publication number: 20230317631
    Abstract: Methods for forming a back-end-of-line (BEOL) passive device structure are provided. A method according to the present disclosure includes depositing a first conductor layer over a substrate, patterning the first conductor layer to form a patterned first conductor layer, depositing a first insulation layer over the patterned first conductor layer, depositing a second conductor layer over the first insulation layer, patterning the second conductor layer to form a patterned second conductor layer, depositing a second insulation layer over the patterned second conductor layer, depositing a third conductor layer over the second insulation layer, and patterning the third conductor layer to form a patterned third conductor layer. The patterning of the first conductor layer includes removing a right-angle edge of the first conductor layer.
    Type: Application
    Filed: April 1, 2022
    Publication date: October 5, 2023
    Inventors: Yuan-Yang Hsiao, Tsung-Chieh Hsiao, Wen-Chiung Tu, Ying-Yao Lai, Chen-Te Chu, Mao-Nan Wang, Chen-Chiu Huang, Dian-Hau Chen