Abstract: During polishing of a backside conductive layer, a sensor of an in-situ eddy current monitoring system is repeatedly swept across the substrate so that each respective sweep of the sensor generates a respective signal trace that includes a sequence of signal values. For each respective signal trace, the sequence of signal values is converted to a corresponding thickness trace that includes sequence of thickness values for different locations on the substrate, thus generating a sequence of thickness traces. For each respective thickness trace in the sequence of thickness traces, a plurality of minima in the respective thickness trace are identified. A sequence of layer thickness values over time is calculated based on the plurality of minima from the respective traces in the sequence of thickness traces. Conductive vias extend through the semiconductor wafer of the substrate to electrically connect the backside conductive layer to a front-side conductive layer.

Abstract: A chemical mechanical polishing apparatus includes a platen to support a polishing pad, a carrier head to hold a substrate such that a layer on the substrate contacts the polishing pad, an actuator that controls a radial position of the carrier head over the platen, an eddy current monitoring system, and a controller. The eddy current monitoring system includes a first plurality of eddy current sensors supported by the platen and arranged in a first ring at a first distance from an axis of rotation of the platen and a second plurality of eddy current sensors supported by the platen and arranged in a second ring at a larger second distance from the axis of rotation of the platen. The controller is configured to control the actuator such that the second plurality of sensors sweep only across an edge portion of the substrate held by the carrier head.

Abstract: A method for producing a polyester polyol is provided, which includes: feeding a first antioxidant and a raw material reactant that includes a polyacid and a polyol into a reactor; subjecting the polyacid and the polyol to an esterification reaction to form an oligomer; and performing a prepolymerization reaction on the oligomer to obtain a prepolymerization reactant. During the prepolymerization reaction, the method includes sampling and monitoring an acid value of the prepolymerization reactant. When the acid value of the prepolymerization reactant reaches a first acid value, an esterification reaction catalyst is added to the prepolymerization reactant for carrying out a polycondensation reaction and generating a polycondensation reactant that contains the polyester polyol. During the polycondensation reaction, the method includes sampling and monitoring an acid value of the polycondensation reactant.

Abstract: A polishing control technique includes storing data representing a sequence of background traces generated by a sequence of scans of a sensor of an in-situ monitoring system across a substrate, and polishing a layer on a substrate. The layer is monitored during the polishing with the in-situ monitoring system, including repeatedly sweeping the sensor of the in-situ monitoring system across substrate such that each sweep provides a measured trace. For each measured trace, a respective background trace that has an equivalent position in the sequence of background traces is subtracted from the measured trace to generate a modified trace, and a sequence of estimated thickness values is generated based on the modified traces. A polishing endpoint is detected or a polishing parameter is modified based on the sequence of estimated thickness values.

Abstract: A technique for acquiring reference traces includes measuring an angular orientation of a calibration substrate, rotating a carrier head and a platen to respective predetermined angular positions, and bringing the calibration substrate into contact with a polishing pad on the platen. The platen and the carrier head are rotated with the calibration substrate in contact with the polishing pad. The calibration substrate is monitored by sweeping a sensor of an in-situ monitoring system across the calibration substrate to generate a sequence of reference traces with each respective reference trace of the sequence of reference traces corresponding to a respective sweep of a sequence of sweeps by the sensor, and with each reference trace including a series of signal values. The sequence of reference traces is stored and each reference trace is labelled to distinguish an order of the reference traces within the sequence.

Abstract: A laminated packaging material, an outer-layer adhesive, and a method for manufacturing the same are provided. The outer-layer adhesive is a polyurethane adhesive formed by a reaction between a polyol material and an isocyanate material. The polyol material is an eco-friendly polyester polyol derived from at least one of a recycled polyester material and a biomass raw material. The eco-friendly polyester polyol has a weight-average molecular weight of between 25,000 and 75,000, a number-average molecular weight of between 18,000 and 55,000, and a glass transition temperature of between ?30° C. and 60° C. The isocyanate material includes a first isocyanate component that is an adduct formed by adding toluene diisocyanate (TDI) to a polyol having a functionality of between 2 and 4, and a second isocyanate component that is formed by adding isocyanate to a polyol having a long carbon chain and a functionality of between 2 and 4.

Abstract: A thermoplastic polyurethane resin and method for producing the same are provided. The method includes a reacting process implemented by reacting a diphenylmethane diisocyanate, a polyether polyol, and a chain extender to form a prepolymer and a measuring and terminating process implemented by measuring a current melting index of the prepolymer and adding a chain terminator when the current melting index reaches a predetermined melting index to form a thermoplastic polyurethane resin having a melting index. The predetermined melting index is within a range from 7 g/min to 10 g/min, and the melting index is within a range from 2 g/min to 10 g/min. A ratio between a weight average molecular weight and a number average molecular weight of the thermoplastic polyurethane resin is between 1.5 and 1.75.

Abstract: An anti-yellowing and highly weather-resistant thermoplastic polyurethane cured product and a method for manufacturing the same are provided. The thermoplastic polyurethane cured product includes a thermoplastic polyurethane, a UV absorber, and a light stabilizer combination. The thermoplastic polyurethane is formed from a reaction composition. The reaction composition includes an isocyanate component, a polyol component, and a glycol chain extender component. The polyol component is selected from the group consisting of polyether polyols, polyester polyols, and polycaprolactone polyols. The light stabilizer combination is a combination of a phosphorus light stabilizer, a hindered amine light stabilizer, and a hindered phenol light stabilizer.

Abstract: A system may include a gimbal defining a plurality of pockets, where each pocket may include a first portion and a second portion that extends between the first portion and a base of the pocket. The second portion may have a greater diameter than the first portion. The system may include a plurality of conditioning disks, where each conditioning disk is seated within the first portion of a respective pocket. The system may include a plurality of gaskets, where each gasket is seated within the second portion of a respective pocket. The system may include a plurality o-rings, each o-ring disposed between a peripheral edge of one of the plurality of conditioning disks and a lateral wall of one of the plurality of pockets. The system may include a plurality of shoulder screws for coupling the gimbal with one of the plurality of gaskets and a conditioning disk.

Abstract: Exemplary carrier heads for a chemical mechanical polishing apparatus may include a carrier body. The carrier heads may include a flexible membrane coupled with the carrier body. The flexible membrane may include a substrate-receiving surface that faces away from the carrier body. The substrate-receiving surface may include a plurality of gripping elements that protrude away from the substrate-receiving surface. Each of the plurality of gripping elements may have a maximum lateral dimension that is no greater than 2 mm.

Abstract: A chemical mechanical polishing apparatus includes a platen to hold a polishing pad, a carrier to hold a substrate against a polishing surface of the polishing pad during a polishing process, a polishing liquid dispenser having a polishing liquid port positioned over the platen to deliver polishing liquid onto the polishing pad, a temperature control system including coolant liquid fluid reservoirs for containing coolant fluids, a thermal controller configured to control the temperature of the coolant fluid within the coolant fluid reservoirs, and a first dispenser having openings in fluid connection with the coolant fluid reservoirs, the openings positioned configured to spray an aerosolized coolant liquid directly onto the polishing pad, and a second dispenser having a coolant port in fluid connection with the coolant fluid reservoirs, the coolant port positioned over the platen and configured to flow a stream of coolant liquid directly onto the polishing pad.

Abstract: An embossed PVC tape has a first surface and a second surface that are opposite to each other. The embossed PVC tape has an embossed texture formed on the first surface. The embossed texture includes a plurality of repeating patterns, and each of the repeating patterns includes a bottom portion arranged on the first surface and a side portion recessed in the first surface. The side portion has a tapered shape, and an end of the side portion away from the first surface is defined as an end point. On the first surface, a quantity of the end point formed per 3,000 square microns is one or more. A maximum static friction coefficient between the first surface and the second surface is within a range from 0.72 to 0.78.

Abstract: A thermoplastic polyurethane resin used for preparing a car wrap film is formed from a reaction mixture through a polymerization reaction. The reaction mixture includes: an isocyanate material, a polyol material, and a chain extender. The isocyanate material does not have any benzene ring in its chemical structure. The isocyanate material is selected from the group consisting of 4,4?-diisocyanato dicyclohexylmethane (H12MDI), hexamethylene diisocyanate (HDI), and isophorone diisocyanate (IPDI). The polyol material is selected from the group consisting of polycaprolactone polyol and polyether polyol. The chain extender is a glycol chain extender.

Abstract: A method and apparatus for dispensing polishing fluids and onto a polishing pad within a chemical mechanical polishing (CMP) system are disclosed herein. In particular, embodiments herein relate to a CMP system with a first fluid delivery arm and a second fluid delivery arm disposed over the polishing pad to dispense fluid, such as a polishing fluid or water, and/or provide a vacuum pressure. The second fluid delivery arm is configured to dispense a fluid or vacuum pressure onto the polishing pad to effect the polishing rate at the edge of the substrate.

Abstract: A laminated packaging material, an outer-layer adhesive, and a method for manufacturing the same are provided. The outer-layer adhesive is a polyurethane adhesive formed by a reaction between a polyol material and an isocyanate material. The polyol material is an eco-friendly polyester polyol derived from at least one of a recycled polyester material and a biomass raw material. The eco-friendly polyester polyol has a weight-average molecular weight of between 25,000 and 75,000, a number-average molecular weight of between 18,000 and 55,000, and a glass transition temperature of between ?30° C. and 60° C. The isocyanate material includes a first isocyanate component that is an adduct formed by adding toluene diisocyanate (TDI) to a polyol having a functionality of between 2 and 4, and a second isocyanate component that is formed by adding isocyanate to a polyol having a long carbon chain and a functionality of between 2 and 4.

Abstract: A polyethylene terephthalate (PET) copolyester and a manufacturing method thereof are provided, including the following steps. A dispersion slurry including a talcum powder is formulated. Terephthalic acid and ethylene glycol are mixed, and the dispersion slurry and a side group ester compound are introduced to perform a transesterification reaction and form bis-2-hydroxylethyl terephthalate. Afterwards, a prepolymerization reaction and a polycondensation reaction are carried out to form a polyethylene terephthalate copolyester.

Abstract: A polyethylene terephthalate (PET) copolyester and a manufacturing method thereof are provided. The manufacturing method includes the following steps. A dispersion slurry including a talcum powder is formulated, wherein the talcum powder has an average particle size of 1 ?m to 50 ?m and an average specific surface area of 7 m2/g to 20 m2/g. Next, a terephthalic acid and an ethylene glycol are mixed, and the dispersion slurry and a crystallization accelerator are introduced, so as to carry out a transesterification reaction and therefore form a bis-2-hydroxylethyl terephthalate (BHET). Afterwards, a prepolymerization reaction and a polycondensation reaction are carried out to form a polyethylene terephthalate (PET) copolyester.

Abstract: A method for producing a polyester polyol is provided, which includes: feeding a first antioxidant and a raw material reactant that includes a polyacid and a polyol into a reactor; subjecting the polyacid and the polyol to an esterification reaction to form an oligomer; and performing a prepolymerization reaction on the oligomer to obtain a prepolymerization reactant. During the prepolymerization reaction, the method includes sampling and monitoring an acid value of the prepolymerization reactant. When the acid value of the prepolymerization reactant reaches a first acid value, an esterification reaction catalyst is added to the prepolymerization reactant for carrying out a polycondensation reaction and generating a polycondensation reactant that contains the polyester polyol. During the polycondensation reaction, the method includes sampling and monitoring an acid value of the polycondensation reactant.

Abstract: A polyurethane adhesive and a mixture used for manufacturing a plastic athletic track are provided. The polyurethane adhesive includes a urethane pre-polymer which is formed by a reaction between an isocyanate and a polyol. The polyol is selected from the group consisting of polyether polyol and polybutadiene polyol, and a number average molecular weight of the polyol is between 1,000 g/mole and 6,000 g/mole. Based on the total weight of the polyurethane adhesive, a content of the urethane pre-polymer is between 80 wt % and 99.5 wt %, and a viscosity of the polyurethane adhesive is between 1,000 cps and 3,000 cps under an environmental temperature of between 15° C. and 40° C.

Abstract: A thermoplastic polyurethane resin suitable for melt spinning is formed from a reaction mixture via a polymerization reaction. The reaction mixture includes an isocyanate component and a polyol component. The polyol component includes a first polyol that has a first number average molecular weight and a second polyol that has a second number average molecular weight. The first number average molecular weight is between 1,000 g/mol and 1,500 g/mol, and the second number average molecular weight is between 2,500 g/mol and 3,000 g/mol. One resin component formed by the first polyol via the polymerization reaction is defined as a low melting point segment and correspondingly has a first melting point between 170° C. and 185° C. Another resin component formed by the second polyol via the polymerization reaction is defined as a high melting point segment and correspondingly has a second melting point between 195° C. and 210° C.