Patents by Inventor Chen Yu Yang

Chen Yu Yang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Double acting cold trap
    Patent number: 6814812
    Abstract: A double acting cold trap equipped with a set of exhaust gas condensing fins and a set of exhaust gas condensing plates is disclosed. The invention also discloses a double acting cold trap that incorporates a deflecting plate to direct the exhaust gases over the condensing fins and plates in a serial fashion. This increases the efficiency of the collection of unwanted particles.
    Type: Grant
    Filed: January 9, 2003
    Date of Patent: November 9, 2004
    Assignee: Chartered Semiconductor Manufacturing Ltd.
    Inventors: Wei Hua Tong, Chen Yu Yang, Zhang Jian, Qian Wu Quan
  • Double acting cold trap
    Publication number: 20030226366
    Abstract: A double acting cold trap equipped with a set of exhaust gas condensing fins and a set of exhaust gas condensing plates is disclosed. The invention also discloses a double acting cold trap that incorporates a deflecting plate to direct the exhaust gases over the condensing fins and plates in a serial fashion. This increases the efficiency of the collection of unwanted particles.
    Type: Application
    Filed: January 9, 2003
    Publication date: December 11, 2003
    Applicant: CHARTERED SEMICONDUCTOR MANUFACTURING LTD.
    Inventors: Wei Hua Tong, Chen Yu Yang, Zhang Jian, Qian Wu Quan
  • Double acting cold trap
    Patent number: 6528420
    Abstract: A double acting cold trap equipped with a set of exhaust gas condensing fins and a set of exhaust gas condensing plates is disclosed. The invention also discloses a double acting cold trap that incorporates a deflecting plate to direct the exhaust gases over the condensing fins and plates in a serial fashion. This increases the efficiency of the collection of unwanted particles.
    Type: Grant
    Filed: January 18, 2002
    Date of Patent: March 4, 2003
    Assignee: Chartered Semiconductor Manufacturing Ltd.
    Inventors: Wei Hua Tong, Chen Yu Yang, Jian Zhang, Qian Wu Quan