Patents by Inventor Chenfei HU

Chenfei HU has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20260177377
    Abstract: Embodiments described herein relate to a method that includes emitting a beam from a laser into a first end of a channel within a workpiece, and detecting an intensity of the beam with a camera at a second end of the channel. In an embodiment, the first end of the channel and the second end of the channel are on the same surface of the workpiece, and the channel is curved.
    Type: Application
    Filed: December 20, 2024
    Publication date: June 25, 2026
    Inventors: CHENFEI HU, MICHAEL CHO, CHIEN-MIN LIAO, TOM CHO, HARI PONNEKANTI
  • Publication number: 20260035777
    Abstract: Embodiments described herein relate to substrate holder systems. An apparatus includes a base structure of a substrate holder, a passivation layer formed on a surface of the base structure, and a diamond-like carbon (DLC) coating formed on the passivation layer. The substrate holder is to receive a substrate. The passivation layer provides corrosion resistance for the substrate holder with respect to at least one process chemistry. The DLC coating provides wear resistance for the substrate holder.
    Type: Application
    Filed: August 2, 2024
    Publication date: February 5, 2026
    Inventors: Hari K. Ponnekanti, Chenfei Hu, Chao Liu, Chien-Min Liao, Michael Kutney, Thomas K. Cho, Marc David Shull, Christopher Laurent Beaudry
  • Patent number: 12467136
    Abstract: A method includes receiving, by a processing device, first data from an optical sensor of a processing chamber. The method further includes processing the first data to obtain second data. The second data includes an indication of a condition of a coating on an interior surface of the processing chamber. The method further includes generating an indication of performance of a processing operation of the processing chamber in view of the second data. The method further includes causing performance of a corrective action in view of the indication of performance of the processing chamber.
    Type: Grant
    Filed: March 16, 2022
    Date of Patent: November 11, 2025
    Assignee: Applied Materials, Inc.
    Inventors: Jeffrey Yat Shan Au, Sidharth Bhatia, Zhaozhao Zhu, Nicholas Ryan Pica, Varoujan Chakarian, Chenfei Hu
  • Publication number: 20250336711
    Abstract: Embodiments described herein relate to substrate holder systems. An apparatus includes a substrate holder having a surface to receive a substrate. The surface has a texture that causes an optical beam incident on the surface to scatter in at least one direction away from an optical detector to be located above the substrate holder.
    Type: Application
    Filed: April 30, 2024
    Publication date: October 30, 2025
    Inventors: Chenfei Hu, Chao Liu, Chien-Min Liao, Marc David Shull, Michael Kutney, Thomas K. Cho, Christopher Laurent Beaudry
  • Publication number: 20250334445
    Abstract: An apparatus includes a substrate holder having a surface to receive a substrate. The surface has a texture that causes an optical beam incident on the surface to scatter in at least one direction away from an optical detector to be located above the substrate holder.
    Type: Application
    Filed: April 30, 2024
    Publication date: October 30, 2025
    Inventors: Chenfei Hu, Chao Liu, Chien-Min Liao, Marc David Shull, Michael Kutney
  • Patent number: 12129296
    Abstract: Provided are an anti-human claudin 18.2 monoclonal antibody and application thereof. The antibody has three heavy chain CDRs and three light chain CDRs, one of the three heavy chain CDRs and three light chain CDRs is as follows: a heavy chain CDR1 is SEQ ID NO: 1, a heavy chain CDR2 is SEQ ID NO: 2, a heavy chain CDR3 is SEQ ID NO: 3, a light chain CDR1 is SEQ ID NO: 4, a light chain CDR2 is SEQ ID NO: 5, and a light chain CDR3 is SEQ ID NO: 6.
    Type: Grant
    Filed: August 21, 2019
    Date of Patent: October 29, 2024
    Assignee: REYOUNG (SUZHOU) BIOLOGY SCIENCE & TECHNOLOGY CO., LTD
    Inventors: Yanyan Wu, Wenjun Cui, Chenfei Hu
  • Publication number: 20230295799
    Abstract: A method includes receiving, by a processing device, first data from an optical sensor of a processing chamber. The method further includes processing the first data to obtain second data. The second data includes an indication of a condition of a coating on an interior surface of the processing chamber. The method further includes generating an indication of performance of a processing operation of the processing chamber in view of the second data. The method further includes causing performance of a corrective action in view of the indication of performance of the processing chamber.
    Type: Application
    Filed: March 16, 2022
    Publication date: September 21, 2023
    Inventors: Jeffrey Yat Shan Au, Sidharth Bhatia, Zhaozhao Zhu, Nicholas Ryan Pica, Varoujan Chakarian, Chenfei Hu
  • Publication number: 20220383986
    Abstract: Methods, apparatus, and storage medium for determining a condition of a biostructure by a neural network based on quantitative imaging data (QID) corresponding to an image of the biostructure. The method includes obtaining specific quantitative imaging data (QID) corresponding to an image of a biostructure; determining a context spectrum selection from context spectrum including a range of selectable values by: applying the specific QID to an input layer of a context-spectrum neural network, wherein the context-spectrum neural network is trained, according to a combination of focal loss and dice loss, based on previous QID and constructed context spectrum data associated with the previous QID; mapping the context spectrum selection to the image to generate a context spectrum mask for the image; and determining a condition of the biostructure based on the context spectrum mask.
    Type: Application
    Filed: May 27, 2022
    Publication date: December 1, 2022
    Inventors: Gabriel Popescu, Mark A. Anastasio, Chenfei Hu, Shenghua He, Yuchen He
  • Publication number: 20210261658
    Abstract: Provided are an anti-human claudin 18.2 monoclonal antibody and application thereof. The antibody has three heavy chain complementarity-determining regions (heavy chain CDR1, heavy chain CDR2, and heavy chain CDR3) and three light chain complementarity-determining regions (light chain CDR1, light chain CDR2, and light chain CDR3).
    Type: Application
    Filed: August 21, 2019
    Publication date: August 26, 2021
    Inventors: Yanyan WU, Wenjun CUI, Chenfei HU