Patents by Inventor Cheng-Bang Fan

Cheng-Bang Fan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • WAFER STAGE HAVING AN ENCAPSULATED CENTRAL PEDESTAL PLATE
    Publication number: 20070181420
    Abstract: A wafer stage includes a bottom insulator plate secured on a bottom portion of the processing chamber; a central pedestal plate mounted on the bottom insulator plate; and a removable top insulator cover having a chamber fittingly accommodating the central pedestal plate and the bottom insulator plate, wherein the top insulator cover has a flat top surface on which a wafer is placed.
    Type: Application
    Filed: February 7, 2006
    Publication date: August 9, 2007
    Inventors: Ming-Tung Wang, Sheng-Yuan Chen, Chin-Yung Liu, Peng-Yih Peng, Shang-Kuang Wu, Wen-Kun Lo, Fu-Yi Lai, Cheng-Bang Fan, Jeng-Hung Lue, Chien-Chih Ho