Patents by Inventor Cheng Bin CUI

Cheng Bin CUI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SURFACE TREATMENT METHOD
    Publication number: 20230343610
    Abstract: Disclosed is a substrate treatment apparatus. The apparatus includes a support unit that supports and rotates a substrate and a spray unit equipped with one or more nozzles to spray a dual fluid that is a mixture of a cleaning agent and carbon dioxide onto the substrate.
    Type: Application
    Filed: June 27, 2023
    Publication date: October 26, 2023
    Applicant: SEMES CO., LTD.
    Inventors: Jung Suk GOH, Sun Mi KIM, Ji Su HONG, Kuk Saeng KIM, Cheng Bin CUI, Pil Kyun HEO
  • Surface treatment apparatus and surface treatment method
    Patent number: 11764084
    Abstract: Disclosed is a substrate treatment apparatus. The apparatus includes a support unit that supports and rotates a substrate and a spray unit equipped with one or more nozzles to spray a dual fluid that is a mixture of a cleaning agent and carbon dioxide onto the substrate.
    Type: Grant
    Filed: November 18, 2020
    Date of Patent: September 19, 2023
    Assignee: SEMES CO., LTD.
    Inventors: Jung Suk Goh, Sun Mi Kim, Ji Su Hong, Kuk Saeng Kim, Cheng Bin Cui, Pil Kyun Heo
  • Apparatus for and method of treating substrate
    Patent number: 11715651
    Abstract: A substrate treatment apparatus includes a substrate support unit, a chemical supply unit supplying a chemical solution onto an upper surface of a substrate supported on the substrate support unit, a laser irradiation unit applying a laser pulse to the substrate to heat the substrate, and a controller controlling the laser irradiation unit to emit the laser pulse such that the substrate is repeatedly heated and cooled to maintain a preset temperature.
    Type: Grant
    Filed: October 24, 2020
    Date of Patent: August 1, 2023
    Assignee: SEMES CO., LTD.
    Inventors: Young Dae Chung, Won Geun Kim, Jee Young Lee, Ji Hoon Jeong, Tae Shin Kim, Jung Suk Goh, Cheng Bin Cui, Ye Rim Yeon
  • SURFACE TREATMENT APPARATUS AND SURFACE TREATMENT METHOD
    Publication number: 20210159092
    Abstract: Disclosed is a substrate treatment apparatus. The apparatus includes a support unit that supports and rotates a substrate and a spray unit equipped with one or more nozzles to spray a dual fluid that is a mixture of a cleaning agent and carbon dioxide onto the substrate.
    Type: Application
    Filed: November 18, 2020
    Publication date: May 27, 2021
    Applicant: SEMES CO., LTD.
    Inventors: Jung Suk GOH, Sun Mi KIM, Ji Su HONG, Kuk Saeng KIM, Cheng Bin CUI, Pil Kyun HEO
  • APPARATUS FOR AND METHOD OF TREATING SUBSTRATE
    Publication number: 20210134614
    Abstract: A substrate treatment apparatus includes a substrate support unit, a chemical supply unit supplying a chemical solution onto an upper surface of a substrate supported on the substrate support unit, a laser irradiation unit applying a laser pulse to the substrate to heat the substrate, and a controller controlling the laser irradiation unit to emit the laser pulse such that the substrate is repeatedly heated and cooled to maintain a preset temperature.
    Type: Application
    Filed: October 24, 2020
    Publication date: May 6, 2021
    Applicant: SEMES CO., LTD.
    Inventors: Young Dae CHUNG, Won Geun KIM, Jee Young LEE, Ji Hoon JEONG, Tae Shin KIM, Jung Suk GOH, Cheng Bin CUI, Ye Rim YEON