Patents by Inventor Cheng-Cheng Kuo
Cheng-Cheng Kuo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240288489Abstract: The present disclosure provides a wafer. The wafer includes a die, a scribe line adjacent to the die, and a test circuit adjacent to the scribe line. The test circuit includes a first switch configured to simultaneously couple a first DUT of a first set of DUTs arranged in a first column and a second DUT of a second set of DUTs arranged in a second column to a signal supply node. The test circuit includes a second switch configured to simultaneously couple the first DUT and the second DUT to a signal receive node. The second switch has a node directly coupled to the first DUT, the second DUT, and the first switch. There is no switch connected between the first DUT and the second DUT.Type: ApplicationFiled: May 6, 2024Publication date: August 29, 2024Inventors: CHIA-WEI HUANG, WEI-JHIH WANG, CHENG-CHENG KUO, YUAN-YAO CHANG
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Patent number: 12007431Abstract: The present disclosure provides a wafer. The wafer includes a die, a scribe line adjacent to the die, and a test circuit adjacent to the scribe line. The test circuit includes a first switch, a second switch, and a third switch. The first switch has a first node coupled to a first device-under-test and a second node coupled to a first signal supply node. The second switch has a first node coupled to the second DUT and a second node coupled to the first signal supply node. The third switch has a first node directly coupled to the first DUT and the second DUT. The third switch has a second node coupled to a second signal supply node. The third switch selectively couples both of the first DUT and the second DUT to the second signal supply node.Type: GrantFiled: August 27, 2021Date of Patent: June 11, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Chia-Wei Huang, Wei-Jhih Wang, Cheng-Cheng Kuo, Yuan-Yao Chang
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Patent number: 11990531Abstract: A tunneling field-effect transistor (TFET) device is disclosed. A protrusion structure is disposed over the substrate and protrudes out of the plane of substrate. Isolation features are formed on the substrate. A drain region is disposed over the substrate adjacent to the protrusion structure and extends to a bottom portion of the protrusion structure as a raised drain region. A drain contact is disposed over the drain region and overlap with the isolation feature.Type: GrantFiled: May 17, 2021Date of Patent: May 21, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Harry-Hay-Lay Chuang, Cheng-Cheng Kuo, Ming Zhu
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Publication number: 20230066905Abstract: The present disclosure provides a wafer. The wafer includes a die, a scribe line adjacent to the die, and a test circuit adjacent to the scribe line. The test circuit includes a first switch, a second switch, and a third switch. The first switch has a first node coupled to a first device-under-test and a second node coupled to a first signal supply node. The second switch has a first node coupled to the second DUT and a second node coupled to the first signal supply node. The third switch has a first node directly coupled to the first DUT and the second DUT. The third switch has a second node coupled to a second signal supply node. The third switch selectively couples both of the first DUT and the second DUT to the second signal supply node.Type: ApplicationFiled: August 27, 2021Publication date: March 2, 2023Inventors: CHIA-WEI HUANG, WEI-JHIH WANG, CHENG-CHENG KUO, YUAN-YAO CHANG
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Patent number: 11392745Abstract: A method of manufacturing an integrated circuit (IC) includes receiving a layout of the IC having a first region interposed between two second regions. The layout includes a first layer having first features and second and third layer having second and third features in the first region. The second and third features collectively form cut patterns for the first features. The method further includes modifying the second and third features by a mask house tool, resulting in modified second and third features, which collectively form modified cut patterns for the first features. The modifying of the second and third features meets at least one of following conditions: total spacing between adjacent modified second (third) features is greater than total spacing between adjacent second (third) features, and total length of the modified second (third) features is smaller than total length of the second (third) features.Type: GrantFiled: November 30, 2020Date of Patent: July 19, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Yun-Lin Wu, Cheng-Cheng Kuo, Chia-Ping Chiang, Chih-Wei Hsu, Hua-Tai Lin, Kuei-Shun Chen, Yuan-Hsiang Lung, Yan-Tso Tsai
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Publication number: 20210296471Abstract: A tunneling field-effect transistor (TFET) device is disclosed. A protrusion structure is disposed over the substrate and protrudes out of the plane of substrate. Isolation features are formed on the substrate. A drain region is disposed over the substrate adjacent to the protrusion structure and extends to a bottom portion of the protrusion structure as a raised drain region. A drain contact is disposed over the drain region and overlap with the isolation feature.Type: ApplicationFiled: May 17, 2021Publication date: September 23, 2021Inventors: Harry-Hay-Lay Chuang, Cheng-Cheng Kuo, Ming Zhu
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Patent number: 11011621Abstract: A tunneling field-effect transistor (TFET) device is disclosed. A protrusion structure is disposed over the substrate and protrudes out of the plane of substrate. Isolation features are formed on the substrate. A drain region is disposed over the substrate adjacent to the protrusion structure and extends to a bottom portion of the protrusion structure as a raised drain region. A drain contact is disposed over the drain region and overlap with the isolation feature.Type: GrantFiled: September 23, 2019Date of Patent: May 18, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Harry-Hak-Lay Chuang, Cheng-Cheng Kuo, Ming Zhu
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Publication number: 20210089697Abstract: A method of manufacturing an integrated circuit (IC) includes receiving a layout of the IC having a first region interposed between two second regions. The layout includes a first layer having first features and second and third layer having second and third features in the first region. The second and third features collectively form cut patterns for the first features. The method further includes modifying the second and third features by a mask house tool, resulting in modified second and third features, which collectively form modified cut patterns for the first features. The modifying of the second and third features meets at least one of following conditions: total spacing between adjacent modified second (third) features is greater than total spacing between adjacent second (third) features, and total length of the modified second (third) features is smaller than total length of the second (third) features.Type: ApplicationFiled: November 30, 2020Publication date: March 25, 2021Inventors: Yun-Lin Wu, Cheng-Cheng Kuo, Chia-Ping Chiang, Chih-Wei Hsu, Hua-Tai Lin, Kuei-Shun Chen, Yuan-Hsiang Lung, Yan-Tso Tsai
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Patent number: 10853552Abstract: A method of manufacturing an integrated circuit (IC) includes receiving a layout of the IC having a first region interposed between two second regions. The layout includes a first layer having first features and second and third layer having second and third features in the first region. The second and third features collectively form cut patterns for the first features. The method further includes modifying the second and third features by a mask house tool, resulting in modified second and third features, which collectively form modified cut patterns for the first features. The modifying of the second and third features meets at least one of following conditions: total spacing between adjacent modified second (third) features is greater than total spacing between adjacent second (third) features, and total length of the modified second (third) features is smaller than total length of the second (third) features.Type: GrantFiled: May 6, 2019Date of Patent: December 1, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Yun-Lin Wu, Cheng-Cheng Kuo, Chia-Ping Chiang, Chih-Wei Hsu, Hua-Tai Lin, Kuei-Shun Chen, Yuan-Hsiang Lung, Yan-Tso Tsai
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Publication number: 20200020788Abstract: A tunneling field-effect transistor (TFET) device is disclosed. A protrusion structure is disposed over the substrate and protrudes out of the plane of substrate. Isolation features are formed on the substrate. A drain region is disposed over the substrate adjacent to the protrusion structure and extends to a bottom portion of the protrusion structure as a raised drain region. A drain contact is disposed over the drain region and overlap with the isolation feature.Type: ApplicationFiled: September 23, 2019Publication date: January 16, 2020Inventors: Harry-Hak-Lay Chuang, Cheng-Cheng Kuo, Ming Zhu
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Patent number: 10490654Abstract: Tunneling field-effect transistors (TFETs) and associated methods of fabrication are disclosed herein. An exemplary TFET includes a protrusion that extends vertically from a substrate. A drain region is in a bottommost portion of the protrusion. A source region is in a topmost portion of the protrusion. A gate stack that wraps a middle portion of the protrusion. The gate stack further wraps around a portion of the source region and a portion of the drain region. Spacers are along a portion of the topmost portion of the protrusion. The TFET further includes a drain contact coupled to the drain region, a gate contact coupled to the gate stack, and a source contact coupled to the source region. The source contact has a width that is greater than a width of the source region. The source contact is disposed on the source region and a portion of the spacers.Type: GrantFiled: December 20, 2018Date of Patent: November 26, 2019Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Harry-Hak-Lay Chuang, Cheng-Cheng Kuo, Chi-Wen Liu, Ming Zhu
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Patent number: 10424652Abstract: A tunneling field-effect transistor (TFET) device is disclosed. A protrusion structure is disposed over the substrate and protrudes out of the plane of substrate. Isolation features are formed on the substrate. A drain region is disposed over the substrate adjacent to the protrusion structure and extends to a bottom portion of the protrusion structure as a raised drain region. A drain contact is disposed over the drain region and overlap with the isolation feature.Type: GrantFiled: October 30, 2017Date of Patent: September 24, 2019Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Harry-Hak-Lay Chuang, Cheng-Cheng Kuo, Ming Zhu
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Publication number: 20190258770Abstract: A method of manufacturing an integrated circuit (IC) includes receiving a layout of the IC having a first region interposed between two second regions. The layout includes a first layer having first features and second and third layer having second and third features in the first region. The second and third features collectively form cut patterns for the first features. The method further includes modifying the second and third features by a mask house tool, resulting in modified second and third features, which collectively form modified cut patterns for the first features. The modifying of the second and third features meets at least one of following conditions: total spacing between adjacent modified second (third) features is greater than total spacing between adjacent second (third) features, and total length of the modified second (third) features is smaller than total length of the second (third) features.Type: ApplicationFiled: May 6, 2019Publication date: August 22, 2019Inventors: Yun-Lin Wu, Cheng-Cheng Kuo, Chia-Ping Chiang, Chih-Wei Hsu, Hua-Tai Lin, Kuei-Shun Chen, Yuan-Hsiang Lung, Yan-Tso Tsai
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Patent number: 10282504Abstract: A method of manufacturing an integrated circuit (IC) includes receiving a layout of the IC having a first region interposed between two second regions. The layout includes a first layer having first features and second and third layer having second and third features in the first region. The second and third features collectively form cut patterns for the first features. The method further includes modifying the second and third features by a mask house tool, resulting in modified second and third features, which collectively form modified cut patterns for the first features. The modifying of the second and third features meets at least one of following conditions: total spacing between adjacent modified second (third) features is greater than total spacing between adjacent second (third) features, and total length of the modified second (third) features is smaller than total length of the second (third) features.Type: GrantFiled: January 20, 2017Date of Patent: May 7, 2019Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Yun-Lin Wu, Cheng-Cheng Kuo, Chia-Ping Chiang, Chih-Wei Hsu, Hua-Tai Lin, Kuei-Shun Chen, Yuan-Hsiang Lung, Yan-Tso Tsai
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Publication number: 20190123184Abstract: Tunneling field-effect transistors (TFETs) and associated methods of fabrication are disclosed herein. An exemplary TFET includes a protrusion that extends vertically from a substrate. A drain region is in a bottommost portion of the protrusion. A source region is in a topmost portion of the protrusion. A gate stack that wraps a middle portion of the protrusion. The gate stack further wraps around a portion of the source region and a portion of the drain region. Spacers are along a portion of the topmost portion of the protrusion. The TFET further includes a drain contact coupled to the drain region, a gate contact coupled to the gate stack, and a source contact coupled to the source region. The source contact has a width that is greater than a width of the source region. The source contact is disposed on the source region and a portion of the spacers.Type: ApplicationFiled: December 20, 2018Publication date: April 25, 2019Inventors: Harry-Hak-Lay Chuang, Cheng-Cheng Kuo, Chi-Wen Liu, Ming Zhu
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Patent number: 10164076Abstract: A method for forming a tunneling field-effect transistor (TFET) is disclosed. The method includes etching a semiconductor substrate to form a semiconductor protrusion that protrudes out from a top surface of the semiconductor substrate, forming a drain region in lower portion of the semiconductor protrusion, and patterning a gate stack layer to form a gate stack. The gate stack has a gating surface that directly contacts and wraps around a middle portion of the semiconductor protrusion. The method further includes forming a source region in an upper portion of the semiconductor protrusion and forming a source contact over the source region, the source contact have a first width that is larger than a width of the source region.Type: GrantFiled: December 28, 2016Date of Patent: December 25, 2018Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Harry-Hak-Lay Chuang, Cheng-Cheng Kuo, Chi-Wen Liu, Ming Zhu
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Patent number: 10026656Abstract: A semiconductor die comprises two or more active regions over a substrate. A first set of dummy blocks are over the substrate, in contact with one another, and completely surrounding at least one of the two or more active regions. A second set of dummy blocks are over the substrate and farther from the at least one active region surrounded by the first set of dummy blocks than the dummy blocks of the first set of dummy blocks. Each of the dummy blocks of the first set of dummy blocks has individual surface areas, each of the dummy blocks of the second set of dummy blocks has individual surface areas, and the individual surface areas of each of the dummy blocks of the second set of dummy blocks is larger than the individual surface areas of each of the dummy blocks of the first set of dummy blocks.Type: GrantFiled: September 25, 2014Date of Patent: July 17, 2018Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Harry-Hak-Lay Chuang, Cheng-Cheng Kuo
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Publication number: 20180096090Abstract: A method of manufacturing an integrated circuit (IC) includes receiving a layout of the IC having a first region interposed between two second regions. The layout includes a first layer having first features and second and third layer having second and third features in the first region. The second and third features collectively form cut patterns for the first features. The method further includes modifying the second and third features by a mask house tool, resulting in modified second and third features, which collectively form modified cut patterns for the first features. The modifying of the second and third features meets at least one of following conditions: total spacing between adjacent modified second (third) features is greater than total spacing between adjacent second (third) features, and total length of the modified second (third) features is smaller than total length of the second (third) features.Type: ApplicationFiled: January 20, 2017Publication date: April 5, 2018Inventors: Yun-Lin Wu, Cheng-Cheng Kuo, Chia-Ping Chiang, Chih-Wei Hsu, Hua-Tai Lin, Kuei-Shun Chen, Yuan-Hsiang Lung, Yan-Tso Tsai
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Publication number: 20180069096Abstract: A tunneling field-effect transistor (TFET) device is disclosed. A protrusion structure is disposed over the substrate and protrudes out of the plane of substrate. Isolation features are formed on the substrate. A drain region is disposed over the substrate adjacent to the protrusion structure and extends to a bottom portion of the protrusion structure as a raised drain region. A drain contact is disposed over the drain region and overlap with the isolation feature.Type: ApplicationFiled: October 30, 2017Publication date: March 8, 2018Inventors: Harry-Hak-Lay Chuang, Cheng-Cheng Kuo, Ming Zhu
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Patent number: 9853125Abstract: A tunneling field-effect transistor (TFET) device is disclosed. A frustoconical protrusion structure is disposed over the substrate and protrudes out of the plane of substrate. A drain region is disposed over the substrate adjacent to the frustoconical protrusion structure and extends to a bottom portion of the frustoconical protrusion structure as a raised drain region. A gate stack is disposed over the substrate. The gate stack has a planar portion, which is parallel to the surface of substrate and a gating surface, which wraps around a middle portion of the frustoconical protrusion structure, including overlapping with the raised drain region. An isolation dielectric layer is disposed between the planar portion of the gate stack and the drain region. A source region is disposed as a top portion of the frustoconical protrusion structure, including overlapping with a top portion of the gating surface of the gate stack.Type: GrantFiled: November 10, 2015Date of Patent: December 26, 2017Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Harry-Hak-Lay Chuang, Cheng-Cheng Kuo, Chi-Wen Liu, Ming Zhu