Patents by Inventor Cheng Chi

Cheng Chi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220302026
    Abstract: A semiconductor device includes a first gate structure extending along a first lateral direction. The semiconductor device includes a first interconnect structure, disposed above the first gate structure, that extends along a second lateral direction perpendicular to the first lateral direction. The first interconnect structure includes a first portion and a second portion electrically isolated from each other by a first dielectric structure. The semiconductor device includes a second interconnect structure, disposed between the first gate structure and the first interconnect structure, that electrically couples the first gate structure to the first portion of the first interconnect structure. The second interconnect structure includes a recessed portion that is substantially aligned with the first gate structure and the dielectric structure along a vertical direction.
    Type: Application
    Filed: June 8, 2022
    Publication date: September 22, 2022
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Guo-Huei Wu, Hui-Zhong Zhuang, Chih-Liang Chen, Cheng-Chi Chuang, Shang-Wen Chang, Yi-Hsun Chiu
  • Publication number: 20220302027
    Abstract: A semiconductor device includes a first gate structure extending along a first lateral direction. The semiconductor device includes a first interconnect structure, disposed above the first gate structure, that extends along a second lateral direction perpendicular to the first lateral direction. The first interconnect structure includes a first portion and a second portion electrically isolated from each other by a first dielectric structure. The semiconductor device includes a second interconnect structure, disposed between the first gate structure and the first interconnect structure, that electrically couples the first gate structure to the first portion of the first interconnect structure. The second interconnect structure includes a recessed portion that is substantially aligned with the first gate structure and the dielectric structure along a vertical direction.
    Type: Application
    Filed: June 9, 2022
    Publication date: September 22, 2022
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Guo-Huei Wu, Hui-Zhong Zhuang, Chih-Liang Chen, Cheng-Chi Chuang, Shang-Wen Chang, Yi-Hsun Chiu
  • Patent number: 11450751
    Abstract: An IC structure includes a source epitaxial structure, a drain epitaxial structure, a first silicide region, a second silicide region, a source contact, a backside via rail, a drain contact, and a front-side interconnection structure. The first silicide region is on a front-side surface and a first sidewall of the source epitaxial structure. The second silicide region is on a front-side surface of the drain epitaxial structure. The source contact is in contact with the first silicide region and has a protrusion extending past a backside surface of the source epitaxial structure. The backside via rail is in contact with the protrusion of the source contact. The drain contact is in contact with the second silicide region. The front-side interconnection structure is on a front-side surface of the source contact and a front-side surface of the drain contact.
    Type: Grant
    Filed: January 24, 2021
    Date of Patent: September 20, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Huan-Chieh Su, Li-Zhen Yu, Chun-Yuan Chen, Cheng-Chi Chuang, Shang-Wen Chang, Yi-Hsun Chiu, Pei-Yu Wang, Ching-Wei Tsai, Chih-Hao Wang
  • Publication number: 20220294199
    Abstract: Enclosure assemblies with integrating flashing for protecting an accessory on a rooftop. The enclosure assemblies can include a base configured to protect the rooftop from water intrusion and a cover configured to be joined to the raised portion of the base. The base can include a bottom wall and a raised portion extending from the bottom wall. The base can include an uphill portion configured to be positioned beneath at least one full course of roof shingle on the rooftop, without having to cut the roof shingle. The raised portion can be disposed off-center relative to the central transverse axis of the bottom wall, leaving the uphill portion of the bottom wall uncovered.
    Type: Application
    Filed: May 31, 2022
    Publication date: September 15, 2022
    Inventors: Alex Cheng-Chi Yang, Byron James Madden, Ryan Mac McClister
  • Publication number: 20220293521
    Abstract: Semiconductor devices and methods of forming the same are provided. In one embodiment, a semiconductor device includes an active region including a channel region and a source/drain region and extending along a first direction, and a source/drain contact structure over the source/drain region. The source/drain contact structure includes a base portion extending lengthwise along a second direction perpendicular to the first direction, and a via portion over the base portion. The via portion tapers away from the base portion.
    Type: Application
    Filed: February 28, 2022
    Publication date: September 15, 2022
    Inventors: Lin-Yu Huang, Li-Zhen Yu, Chia-Hao Chang, Cheng-Chi Chuang, Kuan-Lun Cheng, Chih-Hao Wang
  • Publication number: 20220293853
    Abstract: A device includes an electronic component, and the electronic component includes a first pad, a second pad, and a strip connecting the first pad and the second pad. The device further includes a first electrode in contact with the first pad and a second electrode in contact with the second pad. The electronic component is made of a phase change material. At least one of the first electrode and the second electrode is coated with a material that is configured to increase a difference in workfunction between the first electrode and the second electrode.
    Type: Application
    Filed: March 11, 2021
    Publication date: September 15, 2022
    Inventors: Praneet Adusumilli, Takashi Ando, REINALDO VEGA, Cheng Chi
  • Patent number: 11444018
    Abstract: A semiconductor device includes a first gate structure extending along a first lateral direction. The semiconductor device includes a first interconnect structure, disposed above the first gate structure, that extends along a second lateral direction perpendicular to the first lateral direction. The first interconnect structure includes a first portion and a second portion electrically isolated from each other by a first dielectric structure. The semiconductor device includes a second interconnect structure, disposed between the first gate structure and the first interconnect structure, that electrically couples the first gate structure to the first portion of the first interconnect structure. The second interconnect structure includes a recessed portion that is substantially aligned with the first gate structure and the dielectric structure along a vertical direction.
    Type: Grant
    Filed: February 27, 2020
    Date of Patent: September 13, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Guo-Huei Wu, Hui-Zhong Zhuang, Chih-Liang Chen, Cheng-Chi Chuang, Shang-Wen Chang, Yi-Hsun Chiu
  • Patent number: 11443987
    Abstract: A method includes providing a structure having transistors, an isolation structure over the transistors, metal plugs through the isolation structure and connecting to the transistors, and a trench with the isolation structure and the metal plugs as sidewalls. The method further includes forming a dielectric liner on the sidewalls of the trench and over the isolation structure and the metal plugs. The dielectric liner is thicker at an opening portion of the trench than at another portion of the trench so that an air gap is formed inside the trench and the air gap is surrounded by the dielectric liner. The method further includes depositing a sacrificial layer over the dielectric liner and over the air gap and performing CMP to remove the sacrificial layer and to recess the dielectric liner until the isolation structure and the metal plugs are exposed. The air gap remains inside the trench.
    Type: Grant
    Filed: May 29, 2020
    Date of Patent: September 13, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chun-Yuan Chen, Huan-Chieh Su, Cheng-Chi Chuang, Yu-Ming Lin, Chih-Hao Wang
  • Publication number: 20220285206
    Abstract: In some embodiments, the present disclosure relates to an integrated chip that includes a substrate, a first contact layer, and a gate electrode. The first contact layer overlies the substrate and the gate electrode overlies the substrate and is laterally spaced from the first contact layer. A first spacer structure surrounds outermost sidewalls of the first contact layer and separates the gate electrode from the first contact layer. A first hard mask structure is arranged over the first contact layer and is between portions of the first spacer structure. A first contact via extends through the first hard mask structure and contacts the first contact layer. A first liner layer is arranged directly between the first hard mask structure and the first spacer structure.
    Type: Application
    Filed: May 24, 2022
    Publication date: September 8, 2022
    Inventors: Li-Zhen Yu, Cheng-Chi Chuang, Chih-Hao Wang, Yu-Ming Lin, Lin-Yu Huang
  • Publication number: 20220285494
    Abstract: A semiconductor structure includes a source/drain (S/D) feature; one or more channel semiconductor layers connected to the S/D feature; a gate structure engaging the one or more channel semiconductor layers; a first silicide feature at a frontside of the S/D feature; a second silicide feature at a backside of the S/D feature; and a dielectric liner layer at the backside of the S/D feature, below the second silicide feature, and spaced away from the second silicide feature by a first gap.
    Type: Application
    Filed: May 23, 2022
    Publication date: September 8, 2022
    Inventors: Lin-Yu Huang, Li-Zhen Yu, Chia-Hao Chang, Cheng-Chi Chuang, Kuan-Lun Cheng, Chih-Hao Wang
  • Patent number: 11437279
    Abstract: During a front side process of a wafer, a hard mask layer is formed under a metal portion of a semiconductor device, and an epitaxial layer is deposited to form epitaxial portions of the semiconductor device. In a back side process of the wafer to cut the epitaxial layer, the metal portion is covered and protected by the hard mask layer from damages during etching of the epitaxial layer.
    Type: Grant
    Filed: February 25, 2021
    Date of Patent: September 6, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chun-Yuan Chen, Li-Zhen Yu, Huan-Chieh Su, Lo-Heng Chang, Cheng-Chi Chuang, Chih-Hao Wang
  • Publication number: 20220278264
    Abstract: One or more devices, systems, apparatuses, methods of manufacture and/or methods of use to facilitate thermal sensing in a field related to thermal radiation are envisioned. In one embodiment, an ionic thermoelectric thermal radiation sensor, comprises a substrate, an ionic thermoelectric sensing unit arranged on the substrate and comprising ionically conductive and electrically insulating material, wherein the ionic thermoelectric sensing unit is a voltage-producing unit having first and second surfaces spaced apart from and disposed opposite to one other, wherein the ionic thermoelectric sensing unit produces voltage via thermal diffusion of ions or via the Soret effect under a temperature difference between the first and second surfaces, a thermal radiation absorber that generates heat when exposed to thermal radiation, and one or more electrical connectors that connect the first and second surface.
    Type: Application
    Filed: February 18, 2022
    Publication date: September 1, 2022
    Inventors: Baoling HUANG, Cheng CHI, Gongze Liu
  • Publication number: 20220278213
    Abstract: Methods of forming backside vias connected to source/drain regions of long-channel semiconductor devices and short-channel semiconductor devices and semiconductor devices formed by the same are disclosed.
    Type: Application
    Filed: May 13, 2022
    Publication date: September 1, 2022
    Inventors: Li-Zhen Yu, Huan-Chieh Su, Lin-Yu Huang, Cheng-Chi Chuang, Chih-Hao Wang
  • Patent number: 11430954
    Abstract: A mushroom-type Phase-Change Memory (PCM) device includes a substrate, a lower interconnect disposed in the substrate, a first dielectric layer disposed on the substrate, a bottom electrode disposed in the first dielectric layer and extending above an upper surface of the first dielectric layer, a type drift-mitigation liner encircling an upper portion of the bottom electrode extending above the upper surface of the first dielectric layer, a PCM element disposed on the liner and an upper surface of the bottom electrode, a top electrode disposed on the PCM element, and a second dielectric layer disposed on an exposed portion of the first dielectric layer and the top electrode, wherein the second dielectric layer is disposed on sidewalls of the liner, the PCM element, and the top electrode.
    Type: Grant
    Filed: November 30, 2020
    Date of Patent: August 30, 2022
    Assignee: International Business Machines Corporation
    Inventors: Praneet Adusumilli, Anirban Chandra, Takashi Ando, Cheng Chi, Reinaldo Vega
  • Patent number: 11430789
    Abstract: A method includes forming a fin structure over a substrate, wherein the fin structure includes a base layer, an isolating layer over the base layer, and a stack of channel layers and first sacrificial layers alternately stacked over the isolating layer. The method further includes forming an isolation structure adjacent to sidewalls of the fin structure, wherein a top surface of the isolation structure is above a bottom surface of the isolating layer and below a top surface of the isolating layer. The method further includes depositing a second sacrificial layer over the isolation structure and over the sidewalls of the fin structure; etching the second sacrificial layer and the fin structure to form two source/drain trenches, wherein the source/drain trenches expose the base layer; partially removing the first and the second sacrificial layers through the source/drain trenches to form gaps; and depositing a dielectric spacer in the gaps.
    Type: Grant
    Filed: November 25, 2020
    Date of Patent: August 30, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chun-Yuan Chen, Huan-Chieh Su, Cheng-Chi Chuang, Chih-Hao Wang
  • Publication number: 20220271139
    Abstract: A semiconductor device includes nanostructures vertically arranged and spaced apart from one another along a first direction. The semiconductor device also includes a dielectric fin structure of a dielectric material of uniform composition and an isolation structure on opposite sides of the nanostructures. Moreover, the semiconductor device also includes a gate structure wrapping around the nanostructures. The gate structure extends between the nanostructure and the dielectric fin structure, and extends between the nanostructures and the isolation structure. Furthermore, the nanostructures are spaced apart from the dielectric fin structure along a second direction perpendicular to the first direction by a first distance, and from the isolation structure along the second direction by a second distance, where the first distance is greater than the second distance. Additionally, the gate structure interfaces with the dielectric fin structure on a surface extending perpendicular to the first direction.
    Type: Application
    Filed: September 1, 2021
    Publication date: August 25, 2022
    Inventors: Huan-Chieh Su, Chun-Yuan Chen, Li-Zhen Yu, Lo-Heng Chang, Cheng-Chi Chuang, Kuan-Lun Cheng, Chih-Hao Wang
  • Publication number: 20220270971
    Abstract: Embodiments of the present disclosure provide semiconductor device structures. In one embodiment, the semiconductor device structure includes a gate dielectric layer, a gate electrode layer in contact with the gate dielectric layer, a first self-aligned contact (SAC) layer disposed over the gate electrode layer, an isolation layer disposed between the gate electrode layer and the first SAC layer, and a first sidewall spacer in contact with the gate dielectric layer, the isolation layer, and the first SAC layer.
    Type: Application
    Filed: February 25, 2021
    Publication date: August 25, 2022
    Inventors: Sheng-Tsung WANG, Lin-Yu HUANG, Cheng-Chi Chuang, CHIH-HAO WANG
  • Publication number: 20220271138
    Abstract: Semiconductor structures and methods of forming the same are provided. A semiconductor according to one embodiment includes first nanostructures, a first gate structure wrapping around each of the first nanostructures and disposed over an isolation structure, and a backside gate contact disposed below the first nanostructures and adjacent to the isolation structure. A bottom surface of the first gate structure is in direct contact with the backside gate contact.
    Type: Application
    Filed: April 13, 2021
    Publication date: August 25, 2022
    Inventors: Huan-Chieh Su, Chun-Yuan Chen, Li-Zhen Yu, Lin-Yu Huang, Lo-Heng Chang, Cheng-Chi Chuang, Chih-Hao Wang
  • Publication number: 20220270929
    Abstract: During a front side process of a wafer, a hard mask layer is formed under a metal portion of a semiconductor device, and an epitaxial layer is deposited to form epitaxial portions of the semiconductor device. In a back side process of the wafer to cut the epitaxial layer, the metal portion is covered and protected by the hard mask layer from damages during etching of the epitaxial layer.
    Type: Application
    Filed: February 25, 2021
    Publication date: August 25, 2022
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chun-Yuan CHEN, Li-Zhen YU, Huan-Chieh SU, Lo-Heng CHANG, Cheng-Chi CHUANG, Chih-Hao WANG
  • Patent number: 11424362
    Abstract: A negative capacitance field effect transistor (NCFET) device is provided. The NCFET device includes a substrate, and a transistor stack structure formed on the substrate. The nanosheet stack structure includes a PFET region and an NFET region, the PFET region including a pWF metal layer stack and the NFET region including a nWF metal layer stack. The NCFET device also includes a dielectric interfacial layer formed on the transistor stack structure, the dielectric interfacial layer including metal induced oxygen vacancies, and the dielectric interfacial layer formed on a portion of the transistor stack structure. The NCFET device also includes a top electrode formed on the dielectric interfacial layer.
    Type: Grant
    Filed: December 11, 2020
    Date of Patent: August 23, 2022
    Assignee: International Business Machines Corporation
    Inventors: Takashi Ando, Reinaldo Vega, Cheng Chi, Praneet Adusumilli