Patents by Inventor Cheng-Chiech Huang

Cheng-Chiech Huang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for preventing the cluster defect of HSG
    Patent number: 6271086
    Abstract: A method for preventing the cluster defect of HSG is disclosed. Where the cluster defect means that when wafer with HSGs are cleaned just when HSGs are formed, there are a plurality of clusters appear on HSGs. In comparison with conventional fabrication that wafer and HSGs are directly cleaned just when these HSGs are formed. The idea behind the invention is that when HSGs are formed, a heat treatment is applied to change surface states of HSGs before wafer and HSGs are cleaned. Owing to the fact that these surface states of HSGs are improved by the heat treatment, no cluster will be formed during following clean process. Thus, the formation of cluster is obviously protected and then quality of any application of HSGs is improved by the invention.
    Type: Grant
    Filed: June 30, 1999
    Date of Patent: August 7, 2001
    Assignee: United Microelectronics Corp.
    Inventors: Kuo-Chi Lin, Da-Wen Hsia, Cheng-Chiech Huang