Abstract: An electrocardiogram detector including a pad, an electrical connection unit, a plurality of retaining members, and a plurality of electrode pieces is disclosed. The pad has a first face, a second face, and a plurality of through-holes. The electrical connection unit has an electrical connection port and a plurality of conducting lines electrically connected to the electrical connection port. The plurality of conducting lines is arranged on the first face of the pad. The plurality of retaining members is fixed to the first face of the pad and electrically connected to the plurality of conducting lines. The plurality of electrode pieces is electrically connected to the plurality of retaining members. The plurality of electrode pieces is fixed by the plurality of retaining members. In this arrangement, convenient operation of the electrocardiogram detector is improved.

Abstract: A breakdown precautionary system of a semiconductor equipment includes a semiconductor equipment with a coil heater, at least a voltage/current detector, and an alarm system. The voltage/current detector detects the voltage and current of the coil heater at the same time. An alarm system will send an alarm signal and initiate an interlock safety measure of the semiconductor equipment when the detected current of the coil heater is 0 ampere.

Abstract: A method for reducing particle count inside a furnace for processing semiconductor devices is provided. The method includes performing a gas blowing step to feed a gas into the furnace and performing a continuous gas pumping step simultaneous with performing the gas blowing step for extracting the gas from the furnace while a constant pressure is maintained inside the furnace.

Abstract: The present invention provides an injector robot for replacing a gas injector in a running furnace, which is still running and without any cooling and reheating action. According to the present invention, the injector robot is arranged and mounted upon a boat elevator, which is originally used to transport a boat with wafers into the furnace. The replacement of the gas injector could be executed precisely and safely by the assistant means and will not affect the predetermined procedure of the furnace.