Abstract: A die sorter tool may include a first conveyor, and a first lane to receive, from one or more load ports and via the first conveyor, a carrier with a set of dies. The die sorter tool may include a die flip module to receive the carrier from the first lane, manipulate one or more dies of the set of dies by changing orientations of the one or more dies, and return the one or more dies to the carrier after manipulating the one or more dies and without changing positions of the one or more dies within the carrier. The die sorter tool may include a second conveyor, and a second lane to receive, via the second conveyor, the carrier from the die flip module, and provide, via the first conveyor, the carrier to the one or more load ports.

Abstract: A multiple die container load port may include a housing with an opening, and an elevator to accommodate a plurality of different sized die containers. The multiple die container load port may include a stage supported by the housing and moveable within the opening of the housing by the elevator. The stage may include one or more positioning mechanisms to facilitate positioning of the plurality of different sized die containers on the stage, and may include different portions movable by the elevator to accommodate the plurality of different sized die containers. The multiple die container load port may include a position sensor to identify one of the plurality of different sized die containers positioned on the stage.

Abstract: The present disclosure describes a method for forming metallization layers that include a ruthenium metal liner and a cobalt metal fill. The method includes depositing a first dielectric on a substrate having a gate structure and source/drain (S/D) structures, forming an opening in the first dielectric to expose the S/D structures, and depositing a ruthenium metal on bottom and sidewall surfaces of the opening. The method further includes depositing a cobalt metal on the ruthenium metal to fill the opening, reflowing the cobalt metal, and planarizing the cobalt and ruthenium metals to form S/D conductive structures with a top surface coplanar with a top surface of the first dielectric.

Abstract: A multiple die container load port may include a housing with an opening, and an elevator to accommodate a plurality of different sized die containers. The multiple die container load port may include a stage supported by the housing and moveable within the opening of the housing by the elevator. The stage may include one or more positioning mechanisms to facilitate positioning of the plurality of different sized die containers on the stage, and may include different portions movable by the elevator to accommodate the plurality of different sized die containers. The multiple die container load port may include a position sensor to identify one of the plurality of different sized die containers positioned on the stage.

Abstract: A die sorter tool may include a first conveyor, and a first lane to receive, from one or more load ports and via the first conveyor, a carrier with a set of dies. The die sorter tool may include a die flip module to receive the carrier from the first lane, manipulate one or more dies of the set of dies by changing orientations of the one or more dies, and return the one or more dies to the carrier after manipulating the one or more dies and without changing positions of the one or more dies within the carrier. The die sorter tool may include a second conveyor, and a second lane to receive, via the second conveyor, the carrier from the die flip module, and provide, via the first conveyor, the carrier to the one or more load ports.

Abstract: Compound eyes of insects are great optical system for imaging and sensing by the nature creator, which is an unsurpassed challenge due to its precision and small size. Here, we use meta-lens consisting of GaN nano-antenna to open the fascinating doorway to full-color achromatic light field imaging and sensing. A 60×60 multi-channels meta-lens array is used for effectively capturing multi-dimensional optical information including image and depth. Based on this, the multi-dimensional light field imaging and sensing of a moving object is capable to be experimentally implemented. Our system presents a diffraction-limit resolution of 1.95 micrometer via observing the standard resolution test chart under white light illumination. This is the first mimic optical light field imaging and sensing system of insect compound eye, which has potential applications in micro robotic vision, non-men vehicle sensing, virtual and augmented reality, etc.

Abstract: Compound eyes of insects are great optical system for imaging and sensing by the nature creator, which is an unsurpassed challenge due to its precision and small size. Here, we use meta-lens consisting of GaN nano-antenna to open the fascinating doorway to full-color achromatic light field imaging and sensing. A 60×60 multi-channels meta-lens array is used for effectively capturing multi-dimensional optical information including image and depth. Based on this, the multi-dimensional light field imaging and sensing of a moving object is capable to be experimentally implemented. Our system presents a diffraction-limit resolution of 1.95 micrometer via observing the standard resolution test chart under white light illumination. This is the first mimic optical light field imaging and sensing system of insect compound eye, which has potential applications in micro robotic vision, non-men vehicle sensing, virtual and augmented reality, etc.