Patents by Inventor Cheng-Jung Sung

Cheng-Jung Sung has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Melting laser anneal of epitaxy regions
    Patent number: 11532516
    Abstract: A method includes forming a gate stack over a first semiconductor region, removing a second portion of the first semiconductor region on a side of the gate stack to form a recess, growing a second semiconductor region starting from the recess, implanting the second semiconductor region with an impurity, and performing a melting laser anneal on the second semiconductor region. A first portion of the second semiconductor region is molten during the melting laser anneal, and a second and a third portion of the second semiconductor region on opposite sides of the first portion are un-molten.
    Type: Grant
    Filed: April 12, 2021
    Date of Patent: December 20, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company Ltd.
    Inventors: Su-Hao Liu, Wen-Yen Chen, Tz-Shian Chen, Cheng-Jung Sung, Li-Ting Wang, Liang-Yin Chen, Huicheng Chang, Yee-Chia Yeo, Syun-Ming Jang
  • Melting Laser Anneal of Epitaxy Regions
    Publication number: 20210257255
    Abstract: A method includes forming a gate stack over a first semiconductor region, removing a second portion of the first semiconductor region on a side of the gate stack to form a recess, growing a second semiconductor region starting from the recess, implanting the second semiconductor region with an impurity, and performing a melting laser anneal on the second semiconductor region. A first portion of the second semiconductor region is molten during the melting laser anneal, and a second and a third portion of the second semiconductor region on opposite sides of the first portion are un-molten.
    Type: Application
    Filed: April 12, 2021
    Publication date: August 19, 2021
    Inventors: Su-Hao Liu, Wen-Yen Chen, Tz-Shian Chen, Cheng-Jung Sung, Li-Ting Wang, Liang-Yin Chen, Huicheng Chang, Yee-Chia Yeo, Syun-Ming Jang
  • Melting laser anneal of epitaxy regions
    Patent number: 10978344
    Abstract: A method includes forming a gate stack over a first semiconductor region, removing a second portion of the first semiconductor region on a side of the gate stack to form a recess, growing a second semiconductor region starting from the recess, implanting the second semiconductor region with an impurity, and performing a melting laser anneal on the second semiconductor region. A first portion of the second semiconductor region is molten during the melting laser anneal, and a second and a third portion of the second semiconductor region on opposite sides of the first portion are un-molten.
    Type: Grant
    Filed: August 23, 2019
    Date of Patent: April 13, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Su-Hao Liu, Wen-Yen Chen, Tz-Shian Chen, Cheng-Jung Sung, Li-Ting Wang, Liang-Yin Chen, Huicheng Chang, Yee-Chia Yeo, Syun-Ming Jang
  • Melting Laser Anneal Of Epitaxy Regions
    Publication number: 20210057276
    Abstract: A method includes forming a gate stack over a first semiconductor region, removing a second portion of the first semiconductor region on a side of the gate stack to form a recess, growing a second semiconductor region starting from the recess, implanting the second semiconductor region with an impurity, and performing a melting laser anneal on the second semiconductor region. A first portion of the second semiconductor region is molten during the melting laser anneal, and a second and a third portion of the second semiconductor region on opposite sides of the first portion are un-molten.
    Type: Application
    Filed: August 23, 2019
    Publication date: February 25, 2021
    Inventors: Su-Hao Liu, Wen-Yen Chen, Tz-Shian Chen, Cheng-Jung Sung, Li-Ting Wang, Liang-Yin Chen, Huicheng Chang, Yee-Chia Yeo, Syun-Ming Jang
  • Annealing methods for backside illumination image sensor chips
    Patent number: 8628998
    Abstract: A method includes performing a grinding on a backside of a semiconductor substrate. An image sensor is disposed on a front side of the semiconductor substrate. An impurity is doped into a surface layer of the backside of the semiconductor substrate to form a doped layer. A multi-cycle laser anneal is performed on the doped layer.
    Type: Grant
    Filed: May 22, 2012
    Date of Patent: January 14, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Ting Lin, Cheng-Jung Sung, Yu-Sheng Wang, Shiu-Ko JangJian, Wei-Ming You, Chih-Cherng Jeng, Ching-Hwanq Su
  • Annealing Methods for Backside Illumination Image Sensor Chips
    Publication number: 20130171766
    Abstract: A method includes performing a grinding on a backside of a semiconductor substrate. An image sensor is disposed on a front side of the semiconductor substrate. An impurity is doped into a surface layer of the backside of the semiconductor substrate to form a doped layer. A multi-cycle laser anneal is performed on the doped layer.
    Type: Application
    Filed: May 22, 2012
    Publication date: July 4, 2013
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yu-Ting Lin, Cheng-Jung Sung, Yu-Sheng Wang, Shiu-Ko JangJian, Wei-Ming You, Chih-Cherng Jeng, Ching-Hwanq Su