Patents by Inventor Cheng-Kuang Chen
Cheng-Kuang Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 12062523Abstract: Methods and systems for uniformly cooling a dome within a plasma treatment system are disclosed. The methods and systems utilize a diffuser including a perforated plate and a cone. The perforated plate includes a center portion and multiple arrays of holes with each array being located circumferentially at a different distance from the center. The cone extends away from the center. The diffuser spreads cooling gas more uniformly across the surface of the dome.Type: GrantFiled: February 14, 2022Date of Patent: August 13, 2024Assignee: Taiwan SemiConductor Manufacturing Company, LTD.Inventors: Cheng Kuang Tso, Chou-Feng Lee, Chih-Hsien Hsu, Chung-Hsiu Cheng, Jr-Sheng Chen
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Publication number: 20240248501Abstract: A reference voltage generator circuit includes: a first transistor and a second transistor, wherein the first transistor and the second transistor are coupled with each other and are located on a substrate, wherein the first transistor has a first conduction threshold voltage and a first rated voltage, wherein the second transistor has a second conduction threshold voltage and a second rated voltage, wherein the first rated voltage is higher than the second rated voltage; wherein the reference voltage generator circuit is configured to generate a bandgap reference voltage with temperature compensation according to a difference between the first conduction threshold voltage and the second conduction threshold voltage.Type: ApplicationFiled: October 17, 2023Publication date: July 25, 2024Inventors: Chien-Yu Chen, Li Lin, Cheng-Kuang Lin, Yue-Hung Tang, Ting-Wei Liao, Shao-Hung Lu
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Patent number: 11980920Abstract: Embodiments of the present disclosure relate to apparatus and methods for cleaning an exhaust path of a semiconductor process tool. One embodiment provides an exhaust pipe section and a pipe cleaning assembly connected between a semiconductor process tool and a factory exhaust. The pipe cleaning assembly includes a residue remover disposed in the exhaust pipe section. The residue remover is operable to move in the exhaust pipe section to dislodge accumulated materials from an inner surface of the exhaust pipe section.Type: GrantFiled: March 25, 2021Date of Patent: May 14, 2024Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Wei Chang Cheng, Cheng-Kuang Chen, Chi-Hung Liao
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Patent number: 11922754Abstract: An automatic dispensing device for use in storing and selectively dispensing electronic transmission devices, for example tire pressure monitoring system (TPMS) tire sensors. The dispensing device assists a user in determining the proper transmission device to be dispensed and programs or configures the transmission device in the dispenser prior to dispensing the programmed or configured transmission device to the user. When used for TPMS tire sensors, the dispenser determines the type of TPMS sensor to be programmed, programs the sensor with the proper communication protocol, and dispenses the programmed or configured sensor to the user for installation in the vehicle wheel and tire.Type: GrantFiled: March 1, 2021Date of Patent: March 5, 2024Assignee: ATEQInventors: Ermald Muca, Cheng-Kuang Chen, Grant Barnes
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Publication number: 20220283496Abstract: The present disclosure provides a photomask, including a plurality of pattern areas, each of the pattern areas is defined by a respective boundary, a first pattern area including a first mask feature, and a training area adjacent to a boundary of the pattern area, the training area comprising a first training feature, wherein the first training feature is comparable to the first mask feature.Type: ApplicationFiled: March 3, 2021Publication date: September 8, 2022Inventors: CHIEN-HUNG LAI, HAO-MING CHANG, HSUAN-WEN WANG, CHING-TING YANG, CHENG-KUANG CHEN, CHIEN-CHAO HUANG
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Publication number: 20210279995Abstract: An automatic dispensing device for use in storing and selectively dispensing electronic transmission devices, for example tire pressure monitoring system (TPMS) tire sensors. The dispensing device assists a user in determining the proper transmission device to be dispensed and programs or configures the transmission device in the dispenser prior to dispensing the programmed or configured transmission device to the user. When used for TPMS tire sensors, the dispenser determines the type of TPMS sensor to be programmed, programs the sensor with the proper communication protocol, and dispenses the programmed or configured sensor to the user for installation in the vehicle wheel and tire.Type: ApplicationFiled: March 1, 2021Publication date: September 9, 2021Inventors: Ermald Muca, Cheng-Kuang Chen, Grant Barnes
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Publication number: 20210205861Abstract: Embodiments of the present disclosure relate to apparatus and methods for cleaning an exhaust path of a semiconductor process tool. One embodiment provides an exhaust pipe section and a pipe cleaning assembly connected between a semiconductor process tool and a factory exhaust. The pipe cleaning assembly includes a residue remover disposed in the exhaust pipe section. The residue remover is operable to move in the exhaust pipe section to dislodge accumulated materials from an inner surface of the exhaust pipe section.Type: ApplicationFiled: March 25, 2021Publication date: July 8, 2021Inventors: Wei Chang CHENG, Cheng-Kuang CHEN, Chi-Hung LIAO
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Patent number: 10987706Abstract: Embodiments of the present disclosure relate to apparatus and methods for cleaning an exhaust path of a semiconductor process tool. One embodiment provides an exhaust pipe section and a pipe cleaning assembly connected between a semiconductor process tool and a factory exhaust. The pipe cleaning assembly includes a residue remover disposed in the exhaust pipe section. The residue remover is operable to move in the exhaust pipe section to dislodge accumulated materials from an inner surface of the exhaust pipe section.Type: GrantFiled: February 27, 2020Date of Patent: April 27, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO. , LTD.Inventors: Wei Chang Cheng, Cheng-Kuang Chen, Chi-Hung Liao
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Publication number: 20200197987Abstract: Embodiments of the present disclosure relate to apparatus and methods for cleaning an exhaust path of a semiconductor process tool. One embodiment provides an exhaust pipe section and a pipe cleaning assembly connected between a semiconductor process tool and a factory exhaust. The pipe cleaning assembly includes a residue remover disposed in the exhaust pipe section. The residue remover is operable to move in the exhaust pipe section to dislodge accumulated materials from an inner surface of the exhaust pipe section.Type: ApplicationFiled: February 27, 2020Publication date: June 25, 2020Inventors: Wei Chang CHENG, Cheng-Kuang CHEN, Chi-Hung LIAO
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Patent number: 10618085Abstract: Embodiments of the present disclosure relate to apparatus and methods for cleaning an exhaust path of a semiconductor process tool. One embodiment provides an exhaust pipe section and a pipe cleaning assembly connected between a semiconductor process tool and a factory exhaust. The pipe cleaning assembly includes a residue remover disposed in the exhaust pipe section. The residue remover is operable to move in the exhaust pipe section to dislodge accumulated materials from an inner surface of the exhaust pipe section.Type: GrantFiled: May 31, 2017Date of Patent: April 14, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Wei Chang Cheng, Cheng-Kuang Chen, Chi-Hung Liao
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Publication number: 20180345334Abstract: Embodiments of the present disclosure relate to apparatus and methods for cleaning an exhaust path of a semiconductor process tool. One embodiment provides an exhaust pipe section and a pipe cleaning assembly connected between a semiconductor process tool and a factory exhaust. The pipe cleaning assembly includes a residue remover disposed in the exhaust pipe section. The residue remover is operable to move in the exhaust pipe section to dislodge accumulated materials from an inner surface of the exhaust pipe section.Type: ApplicationFiled: May 31, 2017Publication date: December 6, 2018Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Wei Chang Cheng, Cheng-Kuang Chen, Chi-Hung Liao
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Patent number: 9482784Abstract: The present invention is related to an imaging metamaterial, comprising at least one resonant unit with a controllable split structure that comprises at least one gap and at least one segment, wherein the segment is connected by a node or separated by the gap. The present invention also provides a method for preparing an imaging metamaterial. The present invention further provides an imaging apparatus.Type: GrantFiled: December 12, 2012Date of Patent: November 1, 2016Assignee: NATIONAL TSING HUA UNIVERSITYInventors: Ta-Jen Yen, Cheng-Kuang Chen, Yueh-Chun Lai
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Publication number: 20160041093Abstract: A metamaterial is suitable for receiving a detecting wave. The detecting wave interacts with the metamaterial. The metamaterial includes a substrate and at least one unit cell placed on the substrate. The size of the unit cell is at least less than ? of the wavelength of the detecting wave. A biological and chemical detecting system using the metamaterial is also disclosed.Type: ApplicationFiled: January 21, 2015Publication date: February 11, 2016Inventors: Ta-Jen YEN, Cheng-Kuang CHEN, Chu-En LIN, Hui-Wen CHENG
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Publication number: 20140131559Abstract: The present invention is related to an imaging metamaterial, comprising at least one resonant unit with a controllable split structure that comprises at least one gap and at least one segment, wherein the segment is connected by a node or separated by the gap. The present invention also provides a method for preparing an imaging metamaterial. The present invention further provides an imaging apparatus.Type: ApplicationFiled: December 12, 2012Publication date: May 15, 2014Applicant: NATIONAL TSING HUA UNIVERSITYInventors: Ta-Jen Yen, Cheng-Kuang Chen, Yueh-Chun Lai
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Patent number: 8149181Abstract: A dielectric resonator for a negative refractivity medium, which is coupled to a plurality of substrates, comprises at least one crystal unit, at least one first crystal cube and at least one second crystal cube. The crystal units are arrayed on the substrate. On an identical substrate, each crystal unit has a first spacing with respect to one adjacent crystal unit and a second spacing with respect to another adjacent crystal unit. The first spacing is vertical to the second spacing. Each crystal unit has one first crystal cube and one second crystal cube. A third spacing exists between the first and second crystal cubes. The first and second crystal cubes have a permittivity greater than 20. The present invention adopts the negative refractivity medium to achieve lower dielectric loss. Further, the present invention features isotropy and has low fabrication cost and high industrial utility.Type: GrantFiled: September 2, 2009Date of Patent: April 3, 2012Assignee: National Tsing Hua UniversityInventors: Ta-Jen Yen, Yue-Jun Lai, Cheng-Kuang Chen
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Publication number: 20110050367Abstract: A dielectric resonator for a negative refractivity medium, which is coupled to a plurality of substrates, comprises at least one crystal unit, at least one first crystal cube and at least one second crystal cube. The crystal units are arrayed on the substrate. On an identical substrate, each crystal unit has a first spacing with respect to one adjacent crystal unit and a second spacing with respect to another adjacent crystal unit. The first spacing is vertical to the second spacing. Each crystal unit has one first crystal cube and one second crystal cube. A third spacing exists between the first and second crystal cubes. The first and second crystal cubes have a permittivity greater than 20. The present invention adopts the negative refractivity medium to achieve lower dielectric loss. Further, the present invention features isotropy and has low fabrication cost and high industrial utility.Type: ApplicationFiled: September 2, 2009Publication date: March 3, 2011Inventors: Ta-Jen Yen, Yue-Jun Lai, Cheng-Kuang Chen
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Publication number: 20090160718Abstract: A plane focus antenna includes a plurality of stacking substrates. Each substrate has one side formed a periodic array plane consisting of a plurality of resonant coils and other side laid a metal wire formed in a periodic structure. The magnetic permeability of the stacking double split-ring resonators is negative and the electric permittivity of the metal wire is negative at the same time that can interact with electromagnetic waves to fabricate a negative refractive index material (NRIM) to form the plane focus antenna. By means of the special refractive effect of the NRIM receiving signals can be converged in a very small area to enhance the receiving signals. The plane antenna also does not generate distortion.Type: ApplicationFiled: December 21, 2007Publication date: June 25, 2009Inventors: Ta-Jen YEN, Cheng-Kuang Chen