Patents by Inventor Cheng-Lung Hung

Cheng-Lung Hung has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20110272766
    Abstract: A semiconductor device includes a semiconductor substrate and a transistor formed in the substrate, the transistor having a gate stack that has an interfacial layer formed on the substrate, a high-k dielectric layer formed over the interfacial layer, a metal layer formed over the high-dielectric layer, a capping layer formed between the interfacial layer and high-k dielectric layer; and a doped layer formed on the metal layer, the doped layer including at least F.
    Type: Application
    Filed: July 20, 2011
    Publication date: November 10, 2011
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Cheng-Lung Hung, Yong-Tian Hou, Keh-Chiang Ku, Chien-Hao Huang
  • Patent number: 7994051
    Abstract: The present disclosure provides a method of fabricating a semiconductor device. The method includes forming a high-k dielectric layer over a semiconductor substrate, forming a capping layer over the high-k dielectric layer, forming a metal layer over the capping layer, forming a semiconductor layer over the metal layer, performing an implantation process on the semiconductor layer, the implantation process using a species including F, and forming a gate structure from the plurality of layers including the high-k dielectric layer, capping layer, metal layer, and semiconductor layer.
    Type: Grant
    Filed: October 17, 2008
    Date of Patent: August 9, 2011
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Cheng-Lung Hung, Yong-Tian Hou, Keh-Chiang Ku, Chien-Hao Huang
  • Patent number: 7989321
    Abstract: A method is provided that allows for maintaining a desired equivalent oxide thickness (EOT) by reducing the thickness of an interfacial layer in a gate structure. An interfacial layer is formed on a substrate, a gate dielectric layer such as, a high-k gate dielectric, is formed on the interfacial layer. A gettering layer is formed on the substrate overlying the interfacial layer. The gettering layer may function to getter oxygen from the interfacial layer such that the interfacial layer thickness is decreased and/or restricted from growth.
    Type: Grant
    Filed: October 23, 2008
    Date of Patent: August 2, 2011
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chien-Hao Chen, Yong-Tian Hou, Peng-Fu Hsu, Kuo-Tai Huang, Donald Y. Chao, Cheng-Lung Hung
  • Patent number: 7736968
    Abstract: A method for forming a semiconductor structure includes providing a semiconductor substrate; forming a gate dielectric layer over the semiconductor substrate; forming a gate electrode layer over the gate dielectric layer; doping carbon and nitrogen into the gate electrode layer; and, after the step of doping carbon and nitrogen, patterning the gate dielectric layer and the gate electrode layer to form a gate dielectric and a gate electrode, respectively.
    Type: Grant
    Filed: October 27, 2008
    Date of Patent: June 15, 2010
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Keh-Chiang Ku, Cheng-Lung Hung, Li-Ting Wang, Chien-Hao Chen, Chien-Hao Huang, Wenli Lin, Yu-Chang Lin
  • Publication number: 20100105185
    Abstract: A method for forming a semiconductor structure includes providing a semiconductor substrate; forming a gate dielectric layer over the semiconductor substrate; forming a gate electrode layer over the gate dielectric layer; doping carbon and nitrogen into the gate electrode layer; and, after the step of doping carbon and nitrogen, patterning the gate dielectric layer and the gate electrode layer to form a gate dielectric and a gate electrode, respectively.
    Type: Application
    Filed: October 27, 2008
    Publication date: April 29, 2010
    Inventors: Keh-Chiang Ku, Cheng-Lung Hung, Li-Ting Wang, Chien-Hao Chen, Chien-Hao Huang, Wenli Lin, Yu-Chang Lin
  • Publication number: 20100096705
    Abstract: The present disclosure provides a method of fabricating a semiconductor device. The method includes forming a high-k dielectric layer over a semiconductor substrate, forming a capping layer over the high-k dielectric layer, forming a metal layer over the capping layer, forming a semiconductor layer over the metal layer, performing an implantation process on the semiconductor layer, the implantation process using a species including F, and forming a gate structure from the plurality of layers including the high-k dielectric layer, capping layer, metal layer, and semiconductor layer.
    Type: Application
    Filed: October 17, 2008
    Publication date: April 22, 2010
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Cheng-Lung Hung, Yong-Tian Hou, Keh-Chiang Ku, Chien-Hao Huang
  • Publication number: 20100044806
    Abstract: A method of forming a gate structure is provided. The method includes providing a metal layer in the gate structure, the metal layer includes an oxygen-gettering composition. The metal layer getters oxygen from the interface layer, which may decrease the thickness of the interface layer. The gettered oxygen converts the metal layer to a metal oxide, which may act as a gate dielectric for the gate structure. A multi-layer metal gate structure is also provided including a oxygen-gettering metal layer, an oxygen-containing metal layer, and a polysilicon interface metal layer overlying a high-k gate dielectric.
    Type: Application
    Filed: November 4, 2008
    Publication date: February 25, 2010
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yong-Tian Hou, Chien-Hao Chen, Donald Y. Chao, Cheng-Lung Hung
  • Publication number: 20100048010
    Abstract: A method is provided that allows for maintaining a desired equivalent oxide thickness (EOT) by reducing the thickness of an interfacial layer in a gate structure. An interfacial layer is formed on a substrate, a gate dielectric layer such as, a high-k gate dielectric, is formed on the interfacial layer. A gettering layer is formed on the substrate overlying the interfacial layer. The gettering layer may function to getter oxygen from the interfacial layer such that the interfacial layer thickness is decreased and/or restricted from growth.
    Type: Application
    Filed: October 23, 2008
    Publication date: February 25, 2010
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chien-Hao Chen, Yong-Tian Hou, Peng-Fu Hsu, Kuo-Tai Huang, Donald Y. Chao, Cheng-Lung Hung
  • Publication number: 20090315125
    Abstract: A semiconductor device is disclosed that includes: a substrate; a first dielectric layer formed over the substrate and formed of a first high-k material, the first high-k material selected from the group consisting of HfO2, HfSiO, HfSiON, HfTaO, HfTiO, HfTiTaO, HfAlON, and HfZrO; a second dielectric layer formed over the first dielectric layer and formed of a second high-k material, the second high-k material being different than the first high-k material and selected from the group consisting of HfO2, HfSiO, HfSiON, HfTaO, HfTiO, HfTiTaO, HfAlON, and HfZrO; and a metal gate formed over the second dielectric layer. The first dielectric layer includes ions selected from the group consisting of N, O, and Si.
    Type: Application
    Filed: April 20, 2009
    Publication date: December 24, 2009
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Fong-Yu YEN, Cheng-Lung HUNG, Peng-Fu HSU, Vencent S. CHANG, Yong-Tian HOU, Jin YING, Hun-Jan TAO
  • Patent number: 7531399
    Abstract: A semiconductor device is disclosed that includes: a substrate; a first high-k dielectric layer; a second high-k dielectric layer formed of a different high-k material; and a metal gate. In another form, a method of forming a semiconductor device is disclosed that includes: providing a substrate; forming a first high-k dielectric layer above the substrate; forming a second dielectric layer of a different high-k material above the first dielectric layer; and forming a gate structure above the second dielectric layer. In yet another form, a method of forming a semiconductor device is disclosed that includes: providing a substrate; forming an interfacial layer above the substrate; forming a first high-k dielectric layer above the interfacial layer; performing a nitridation technique; performing an anneal; forming a second high-k dielectric layer of a different high-k material above the first dielectric layer; and forming a metal gate structure above the second dielectric layer.
    Type: Grant
    Filed: September 15, 2006
    Date of Patent: May 12, 2009
    Assignee: Taiwan Semiconductor Manufacturing Company
    Inventors: Fong-Yu Yen, Cheng-Lung Hung, Peng-Fu Hsu, Vencent S. Chang, Yong-Tian Hou, Jin Ying, Hun-Jan Tao
  • Publication number: 20080070395
    Abstract: A semiconductor device is disclosed that includes: a substrate; a first high-k dielectric layer; a second high-k dielectric layer formed of a different high-k material; and a metal gate. In another form, a method of forming a semiconductor device is disclosed that includes: providing a substrate; forming a first high-k dielectric layer above the substrate; forming a second dielectric layer of a different high-k material above the first dielectric layer; and forming a gate structure above the second dielectric layer. In yet another form, a method of forming a semiconductor device is disclosed that includes: providing a substrate; forming an interfacial layer above the substrate; forming a first high-k dielectric layer above the interfacial layer; performing a nitridation technique; performing an anneal; forming a second high-k dielectric layer of a different high-k material above the first dielectric layer; and forming a metal gate structure above the second dielectric layer.
    Type: Application
    Filed: September 15, 2006
    Publication date: March 20, 2008
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Fong-Yu Yen, Cheng-Lung Hung, Peng-Fu Hsu, Vencent S. Chang, Yong-Tian Hou, Jin Ying, Hun-Jan Tao
  • Publication number: 20080050879
    Abstract: A method of forming a metal-containing gate includes forming a high-k dielectric layer over a substrate. A process using an oxygen-containing solution is provided to process the high-k dielectric layer. A metal-containing layer is formed over the high-k dielectric layer. The high-k dielectric layer and metal-containing layer are patterned, thereby defining a gate structure.
    Type: Application
    Filed: August 23, 2006
    Publication date: February 28, 2008
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Cheng-Lung Hung, Peng-Fu Hsu, Jin Ying, Hun-Jan Tao
  • Patent number: 7332760
    Abstract: A ferroelectric material includes a superlattice structure having lead zirconate layers and barium zirconate layers such that the superlattice structure has remanent polarization exhibiting a linearly positive dependency on a driving voltage.
    Type: Grant
    Filed: June 24, 2005
    Date of Patent: February 19, 2008
    Assignee: National Tsing Hua University
    Inventors: Tai-Bor Wu, Cheng-Lung Hung
  • Patent number: 7307304
    Abstract: A ferroelectric material includes a compound of formula (I): (Pb1?x?zBazAx)(ByZr1?y)O3, ??(I) wherein 0?x?0.1, 0?y?0.020, 0.15?z?0.35, with the proviso that y?0 when x=0, and that x?0, when y=0; and wherein A is a first element having a valence number greater than that of Pb, and B is a second element having a valence number greater than that of Zr. A ferroelectric memory device made from the ferroelectric material is also disclosed.
    Type: Grant
    Filed: June 9, 2005
    Date of Patent: December 11, 2007
    Assignee: National Tsing Hua University
    Inventors: Tai-Bor Wu, Cheng-Lung Hung
  • Publication number: 20070066095
    Abstract: A switch device makes at least a controlled device controllable by a control element. The control element is connected to signal ports mounted on a circuit board of the switch device. There are signal lines connected between the circuit board and the controlled devices. Besides, the signal lines and the circuit board are connected via a removable plug and socket combination.
    Type: Application
    Filed: January 30, 2006
    Publication date: March 22, 2007
    Inventors: Wei-Chen Huang, Cheng-Lung Hung
  • Publication number: 20060267465
    Abstract: A sliding track for a server chassis includes a first member and a second member. The first member and the second member are movable relative to each other through an anchor member, sliding in a guiding slot. The first member has a flange extended respectively from two ends so that when the second member is sliding relative to the first member, two ends of the second member are sliding on the flanges.
    Type: Application
    Filed: November 14, 2005
    Publication date: November 30, 2006
    Inventors: Cheng-Lung Hung, Wei-Chen Huang
  • Publication number: 20050285171
    Abstract: A ferroelectric material includes a compound of formula (I): (Pb1-x-zBazAx) (ByZr1-y)O3??(I) wherein 0?x?0.1, 0?y?0.020, 0.15?z?0.35, with the proviso that y?0 when x=0, and that x?0, when y=0; and wherein A is a first element having a valence number greater than that of Pb, and B is a second element having a valence number greater than that of Zr. A ferroelectric memory device made from the ferroelectric material is also disclosed.
    Type: Application
    Filed: June 9, 2005
    Publication date: December 29, 2005
    Inventors: Tai-Bor Wu, Cheng-Lung Hung
  • Publication number: 20050286290
    Abstract: A ferroelectric material includes a superlattice structure having lead zirconate layers and barium zirconate layers such that the superlattice structure has remanent polarization exhibiting a linearly positive dependency on a driving voltage.
    Type: Application
    Filed: June 24, 2005
    Publication date: December 29, 2005
    Inventors: Tai-Bor Wu, Cheng-Lung Hung
  • Patent number: 6663417
    Abstract: An electrical connector with light emitting device. The electrical connector includes a casing, an insulative housing disposed inside the casing. A light emitting device and a light transmitting element are disposed on top of the insulative housing. The insulative housing includes two slots disposed on top of the insulative housing. A groove is disposed on a distal front end of each of the slots. The light emitting device is fitted into the slot above the insulative housing so that a certain distance is maintained between the light emitting device in the slot and the light transmitting element. The casing covers the outer part of the insulative housing, the light transmitting device, and the light transmitting element wherein at least a front side of the insulative housing and a front side of the transmitting element are exposed.
    Type: Grant
    Filed: September 20, 2002
    Date of Patent: December 16, 2003
    Assignee: Weison Technologies Co., Ltd.
    Inventor: Cheng-Lung Hung