Patents by Inventor Cheng-Qun Gui

Cheng-Qun Gui has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus
    Publication number: 20020109825
    Abstract: A lithographic projection apparatus is provided with an optical system built into the wafer table for producing an image of a wafer mark that is provided on the back side of the wafer. The image is located at the plane of the front side of the wafer and can be viewed by an alignment system from the front side of the wafer.
    Type: Application
    Filed: January 14, 2002
    Publication date: August 15, 2002
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Cheng-Qun Gui, Henricus Wilhelmus Maria Van Buel, Maurits Van Der Schaar, Arie Jeffrey Den Boef