Abstract: A method for acquiring program parameters of a component in a graphical user interface of a piece of equipment and an operating method for a piece of equipment are provided. The method for acquiring program parameters of a component includes: detecting a selection of a component in a graphical user interface window, obtaining a first data set for searching the selected component, presenting the first data along with corresponding indications on a window frame to obtain an approved second data set, and storing the approved data set to a resource file. The method for operating a piece of equipment includes: reading a resource file, searching a window handle of a component described in the file in a graphical user interface window, performing a data read operation or a user operation by using the window handle and a corresponding parameter template in response to a request message.

Abstract: A SECS communication device and a SECS communication method thereof are presented. The SECS communication device includes a SECS-II message communication part, a translation part, and an information storage device access part, and further includes at least one set of data structure files and a message format file for defining a message content and a message format of a SECS-II message. The translation part decodes the SECS-II message into data in various information storage formats of an information storage device according to the data structure file and the message format file, and encodes the data in various information storage formats of the information storage device into the SECS-II message, so as to enable message exchange between an EAP and the information storage device through the SECS communication device. By applying the SECS communication method, cost of program development is reduced, and meanwhile, high system stability and industrial efficiency are achieved.

Abstract: A real-time fault detection and classification (FDC) system, which is in use with a semiconductor fabrication process having a first sub-fabrication process and a second sub-fabrication process, includes a computer integrated manufacturing (CIM) host adopting a SEMI equipment communication standard (SECS), a semiconductor tool for executing the first sub-fabrication process and generating first status data in conformity with the SECS, a non-semiconductor tool for executing the second sub-fabrication process and generating second status data in conformity with a predetermined connectivity standard different from the SECS, and a tool simulator connecting the tool simulator with the semiconductor tool and the non-semiconductor tool for receiving the first and second status data and transforming the second status data into third status data in conformity with the SECS such that the CIM host can classify the first and third status data according to a predetermined classification technique and get a control over eq

Abstract: A real-time fault detection and classification (FDC) system, which is in use with a semiconductor fabrication process having a first sub-fabrication process and a second sub-fabrication process, includes a computer integrated manufacturing (CIM) host adopting a SEMI equipment communication standard (SECS), a semiconductor tool for executing the first sub-fabrication process and generating first status data in conformity with the SECS, a non-semiconductor tool for executing the second sub-fabrication process and generating second status data in conformity with a predetermined connectivity standard different from the SECS, and a tool simulator connecting the tool simulator with the semiconductor tool and the non-semiconductor tool for receiving the first and second status data and transforming the second status data into third status data in conformity with the SECS such that the CIM host can classify the first and third status data according to a predetermined classification technique and get a control over eq