Abstract: In a method of manufacturing a semiconductor device, a fin structure having a channel region protruding from an isolation insulating layer disposed over a semiconductor substrate is formed, a cleaning operation is performed, and an epitaxial semiconductor layer is formed over the channel region. The cleaning operation and the forming the epitaxial semiconductor layer are performed in a same chamber without breaking vacuum.

Abstract: Methods of cutting gate structures and fins, and structures formed thereby, are described. In an embodiment, a substrate includes first and second fins and an isolation region. The first and second fins extend longitudinally parallel, with the isolation region disposed therebetween. A gate structure includes a conformal gate dielectric over the first fin and a gate electrode over the conformal gate dielectric. A first insulating fill structure abuts the gate structure and extends vertically from a level of an upper surface of the gate structure to at least a surface of the isolation region. No portion of the conformal gate dielectric extends vertically between the first insulating fill structure and the gate electrode. A second insulating fill structure abuts the first insulating fill structure and an end sidewall of the second fin. The first insulating fill structure is disposed laterally between the gate structure and the second insulating fill structure.

Abstract: Provided are a driving method of a touch display panel, a driving circuit and a touch display device. The driving method includes: obtaining a touch position of an active stylus; determining a first region on the touch display panel based on the touch position of the active stylus; and transmitting an uplink (UL) signal to touch sensing electrodes in the first region and transmitting an anti-interference signal to the touch sensing electrodes in at least a part of the region except for the first region on the touch display panel during an UL transmission period, wherein the UL signal transmitted to the touch sensing electrodes in the first region during the UL transmission period is for transmission to the active stylus.

Abstract: Provided are a driving method of a touch display panel, a driving circuit and a touch display device. The driving method includes: obtaining a touch position of an active stylus; determining a first region on the touch display panel based on the touch position of the active stylus; and transmitting an uplink (UL) signal to touch sensing electrodes in the first region and transmitting an anti-interference signal to the touch sensing electrodes in at least a part of the region except for the first region on the touch display panel during an UL transmission period, wherein the UL signal transmitted to the touch sensing electrodes in the first region during the UL transmission period is for transmission to the active stylus.