Abstract: A method of forming contact hole is disclosed, including the steps of: providing a semiconductor substrate having a first dielectric layer, a second dielectric layer and a third dielectric layer formed thereon in this order; forming a first contact hole through the third dielectric layer, the second dielectric layer and the first dielectric layer by using an etching process to expose the semiconductor substrate; removing the third dielectric layer; forming a fourth dielectric layer over the second dielectric layer, the fourth dielectric layer filling the first contact hole; forming a second contact hole through the fourth dielectric layer, the second dielectric layer and the first dielectric layer to expose the semiconductor substrate; and removing the fourth dielectric layer. The method is capable of improving the stability of the contact-hole formation process.