Abstract: A method for generating modified contours and/or generating metrology gauges based on the modified contours. A method of generating metrology gauges for measuring a physical characteristic of a structure on a substrate includes obtaining (i) measured data associated with the physical characteristic of the structure printed on the substrate, and (ii) at least portion of a simulated contour of the structure, the at least a portion of the simulated contour being associated with the measured data; modifying, based on the measured data, the at least a portion of the simulated contour of the structure; and generating the metrology gauges on or adjacent to the modified at least a portion of the simulated contour, the metrology gauges being placed to measure the physical characteristic of the simulated contour of the structure.

Abstract: A method for training a patterning process model, the patterning process model configured to predict a pattern that will be formed by a patterning process. The method involves obtaining an image data associated with a desired pattern, a measured pattern of the substrate, a first model including a first set of parameters, and a machine learning model including a second set of parameters; and iteratively determining values of the first set of parameters and the second set of parameters to train the patterning process model. An iteration involves executing, using the image data, the first model and the machine learning model to cooperatively predict a printed pattern of the substrate; and modifying the values of the first set of parameters and the second set of parameters such that a difference between the measured pattern and the predicted pattern is reduced.

Abstract: A divided pulse nonlinear optical source may be generated by combining nonlinear wave generation techniques with pulse division that can divide a parent pulse into N divided pulses, each divided pulse separate temporally. The N divided pulses can be passed into a nonlinear optical medium to generate an output. The output can include at least one output pulse for each divided pulse. The center wavelengths of each output pulse can be tuned so that each may have a center wavelength that is the same as, or differs from, each other output pulse. In some embodiments, the output pulses may be combined to generate the output. The output can be power scalable and wavelength tunable.

Abstract: A biocompatible and biodegradable polymeric step-index optical fiber includes a core and a cladding around the core. The core is made from a core material fabricated by bonding a citric acid and at least a first monomer using a synthesis process. The cladding is made from a cladding material fabricated by bonding the citric acid and at least a second monomer using the synthesis process. The core has a refractive index higher than that of the cladding, while a difference between an initial modulus of the core and the cladding is preferably less than 30% and a difference between the biodegradation rates of the core and cladding is preferably less than 30% after about 4 weeks. Optical properties of the core and cladding are tunable by adjusting monomer ratios, choices of monomers or cross-linking degrees.

Abstract: A divided pulse nonlinear optical source may be generated by combining nonlinear wave generation techniques with pulse division that can divide a parent pulse into N divided pulses, each divided pulse separate temporally. The N divided pulses can be passed into a nonlinear optical medium to generate an output. The output can include at least one output pulse for each divided pulse. The center wavelengths of each output pulse can be tuned so that each may have a center wavelength that is the same as, or differs from, each other output pulse. In some embodiments, the output pulses may be combined to generate the output. The output can be power scalable and wavelength tunable.

Abstract: A biocompatible and biodegradable polymeric step-index optical fiber includes a core and a cladding around the core. The core is made from a core material fabricated by bonding a citric acid and at least a first monomer using a synthesis process. The cladding is made from a cladding material fabricated by bonding the citric acid and at least a second monomer using the synthesis process. The core has a refractive index higher than that of the cladding, while a difference between an initial modulus of the core and the cladding is preferably less than 30% and a difference between the biodegradation rates of the core and cladding is preferably less than 30% after about 4 weeks. Optical properties of the core and cladding are tunable by adjusting monomer ratios, choices of monomers or cross-linking degrees.