Patents by Inventor Chenming Hu
Chenming Hu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Patent number: 12660521Abstract: The present disclosure in various embodiments provides a method. In some embodiments of the present disclosure, the method includes forming a transition metal dichalcogenide layer on a substrate; and performing an ion bombardment process on the transition metal dichalcogenide layer, performing an annealing process on the transition metal dichalcogenide layer.Type: GrantFiled: March 30, 2023Date of Patent: June 16, 2026Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., NATIONAL YANG MING CHIAO TUNG UNIVERSITYInventors: Chun-Liang Lin, Chenming Hu, Wan-Hsin Chen, Naoya Kawakami
-
Patent number: 12626746Abstract: A method includes forming a first transistor, a second transistor, a third transistor, and a fourth transistor over a substrate, wherein at least the second and third transistors include ferroelectric materials; forming an interlayer dielectric (ILD) layer over the first to fourth transistors; forming a first metal line over the ILD layer to interconnect drains of the second and third transistors and a gate of the fourth transistor; forming a second metal line over the ILD layer to interconnect a drain of the first transistor and gates of the second and third transistors; forming a write word line over the ILD layer and electrically connected to a gate of the first transistor but electrically isolated from the fourth transistor; forming a word line over the ILD layer and electrically connected to a source of the first transistor; and forming a bit line electrically connected to the fourth transistor.Type: GrantFiled: July 26, 2022Date of Patent: May 12, 2026Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., NATIONAL YANG MING CHIAO TUNG UNIVERSITYInventors: Wei-Xiang You, Pin Su, Kai-Shin Li, Chenming Hu
-
Patent number: 12588431Abstract: A method includes following steps. A single-crystalline two-dimensional (2D) semiconductor layer is formed over a substrate. A single-crystalline 2D material layer is epitaxially grown on the single-crystalline 2D semiconductor layer. The single-crystalline 2D material layer is lattice-matched with the single-crystalline 2D semiconductor layer. A semiconductor device is over the single-crystalline 2D semiconductor layer.Type: GrantFiled: April 27, 2023Date of Patent: March 24, 2026Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., NATIONAL YANG MING CHIAO TUNG UNIVERSITYInventors: Shu-Jui Chang, Shin-Yuan Wang, Yu-Che Huang, Chao-Hsin Chien, Chenming Hu
-
Publication number: 20250372508Abstract: A method for fabricating an integrated circuit structure is provided. The method include forming a semiconductor device over a semiconductor substrate, wherein the semiconductor device comprises a gate structure and first and second source/drain regions respectively on opposite sides of the gate structure; forming a frontside interconnect structure over a frontside of the semiconductor device, wherein the frontside interconnect structure comprise a frontside metal line and a frontside dielectric layer, and the frontside metal line is electrically connected to the first source/drain region of the semiconductor device; depositing a high-k dielectric layer over a backside of the semiconductor device, wherein a dielectric constant of the high-k dielectric layer is greater than about 3.9; etching an opening in the high-k dielectric layer to expose a backside of the second source/drain region; and forming a backside metal feature in the opening in the high-k dielectric layer.Type: ApplicationFiled: June 4, 2024Publication date: December 4, 2025Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., National Yang Ming Chiao Tung UniversityInventors: Chin-Yu LIU, Hsin-Cheng LIN, He-Wen SHEN, Chee-Wee LIU, Chenming HU
-
Publication number: 20250366176Abstract: An IC structure includes a first transistor, a dielectric layer, a plurality of semiconductor pillars, a plurality of semiconductor plugs, a semiconductor structure, and a second transistor. The first transistor is formed on a substrate. The dielectric layer is above the first transistor. The semiconductor pillars extend from the substrate into the dielectric layer. The semiconductor plugs extend from a top surface of the dielectric layer into the dielectric layer to the plurality of semiconductor pillars. The semiconductor structure is disposed over the top surface of the dielectric layer. The second transistor is formed on the semiconductor structure.Type: ApplicationFiled: August 8, 2025Publication date: November 27, 2025Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., National Yang Ming Chiao Tung UniversityInventors: Chenming HU, Kuan-Neng CHEN, Po-Tsang HUANG, Hao-Tung CHUNG, Bo-Jheng SHIH, Yu-Ming PAN
-
Patent number: 12435060Abstract: Provided are an acylamino bridged heterocyclic compound of formula (I) or a pharmaceutically acceptable salt, an isomer, a solvate, a crystal, or a prodrug thereof, and a pharmaceutical composition comprising the compound, and an application of the compound or composition in drug preparation. The compound and the pharmaceutically acceptable salt, the isomer, the solvate, the crystal, or the prodrug thereof and the like can be used for treatment or prevention of autoimmune diseases, tumors, and neurodegenerative diseases related to receptor-interacting protein kinase-1 (RIPK1).Type: GrantFiled: January 17, 2020Date of Patent: October 7, 2025Assignee: BEIJING SCITECH-MQ PHARMACEUTICALS LIMITEDInventors: Qiang Zhang, Yansheng Liu, Xingfu Li, Shaohua Zhang, Chenming Hu
-
Publication number: 20250267904Abstract: A device comprises a plurality of 2D semiconductor nanostructures, a gate structure, a source region, and a drain region. The plurality of 2D semiconductor nanostructures extend in a first direction above a substrate and arranged in a second direction substantially perpendicular to the first direction. The gate structure surrounds each of the plurality of 2D semiconductor nanostructures. The source region and the drain region are respectively on opposite sides of the gate structure.Type: ApplicationFiled: April 25, 2025Publication date: August 21, 2025Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., NATIONAL YANG MING CHIAO TUNG UNIVERSITYInventors: Chen Han CHOU, Shu-Jui CHANG, Yen-Teng HO, Chia Hsing WU, Kai-Yu PENG, Cheng Hung SHEN, Chenming HU
-
Publication number: 20250056782Abstract: A method includes forming a first pull-up transistor and a first pass-gate transistor over a substrate at a first level height, the first pull-up and first pass-gate transistors being of a dual port static random access memory (SRAM) cell; forming a first pull-down transistor and a second pass-gate transistor of the dual port SRAM cell over the substrate at a second level height; forming a second pull-down transistor and a third pass-gate transistor of the dual port SRAM cell over the substrate at a third level height; forming a second pull-up transistor and a fourth pass-gate transistor of the dual port SRAM cell over the substrate at a fourth level height.Type: ApplicationFiled: August 10, 2023Publication date: February 13, 2025Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., National Yang Ming Chiao Tung UniversityInventors: Tao CHOU, Hsin-Cheng LIN, Ching-Wang YAO, Li-Kai WANG, Chee-Wee LIU, Chenming HU
-
Patent number: 12211789Abstract: A method includes following steps. First transistors are formed over a substrate. An interconnect structure is formed over the plurality of first transistors. A dielectric layer is formed over the interconnect structure. 2D semiconductor seeds are formed over the dielectric layer. The 2D semiconductor seeds are annealed. An epitaxy process is performed to laterally grow a plurality of 2D semiconductor films respectively from the plurality of 2D semiconductor seeds. Second transistors are formed on the plurality of 2D semiconductor films.Type: GrantFiled: July 31, 2023Date of Patent: January 28, 2025Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., NATIONAL YANG MING CHIAO TUNG UNIVERSITYInventors: Chenming Hu, Shu-Jui Chang, Chen-Han Chou, Yen-Teng Ho, Chia-Hsing Wu, Kai-Yu Peng, Cheng-Hung Shen
-
Publication number: 20240395698Abstract: A method includes following steps. A dielectric layer is formed over a substrate. A transition metal-containing layer is deposited on the dielectric layer. The transition metal-containing layer is patterned into a plurality of transition metal-containing pieces. The transition metal-containing pieces are sulfurized or selenized to form a plurality of semiconductor seeds. Semiconductor films are grown from semiconductor seeds. Transistors are formed on the semiconductor films.Type: ApplicationFiled: July 30, 2024Publication date: November 28, 2024Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., NATIONAL YANG MING CHIAO TUNG UNIVERSITYInventors: Chenming HU, Shu-Jui CHANG, Chen-Han CHOU, Yen-Teng HO, Chia-Hsing WU, Kai-Yu PENG, Cheng-Hung SHEN
-
Patent number: 12154828Abstract: A semiconductor device includes a substrate, a 2-D material layer, source/drain contacts, and a gate electrode. The 2-D material layer is over the substrate, the 2-D material layer includes source/drain regions and a channel region between the source/drain regions, in which the 2-D material layer is made of a transition metal dichalcogenide (TMD). The source/drain contacts are in contact with source/drain regions of the 2-D material layer, in which a binding energy of transition metal atoms at the channel region of the 2-D material layer is different from a binding energy of the transition metal atoms at the source/drain regions of the 2-D material layer. The gate electrode is over the substrate.Type: GrantFiled: January 13, 2022Date of Patent: November 26, 2024Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., NATIONAL YANG MING CHIAO TUNG UNIVERSITYInventors: Chiung-Yuan Lin, Tsung-Fu Yang, Weicheng Chu, Ching Liang Chang, Chen Han Chou, Chia-Ho Yang, Tsung-Kai Lin, Tsung-Han Lin, Chih-Hung Chung, Chenming Hu
-
Publication number: 20240363343Abstract: A method includes following steps. A single-crystalline two-dimensional (2D) semiconductor layer is formed over a substrate. A single-crystalline 2D material layer is epitaxially grown on the single-crystalline 2D semiconductor layer. The single-crystalline 2D material layer is lattice-matched with the single-crystalline 2D semiconductor layer. A semiconductor device is over the single-crystalline 2D semiconductor layer.Type: ApplicationFiled: April 27, 2023Publication date: October 31, 2024Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., National Yang Ming Chiao Tung UniversityInventors: Shu-Jui CHANG, Shin-Yuan WANG, Yu-Che HUANG, Chao-Hsin CHIEN, Chenming HU
-
Publication number: 20240355816Abstract: An IC structure includes a first transistor, an interconnect structure, a dielectric layer, a polysilicon fin, and a second transistor. The first transistor is over a substrate. The interconnect structure is over the first transistor. The dielectric layer is over the interconnect structure. The polysilicon fin includes a first portion laterally extending over the dielectric layer, and a second portion extending through the dielectric layer to a metal material within the interconnect structure. The second transistor is formed on the first portion of the polysilicon fin.Type: ApplicationFiled: July 2, 2024Publication date: October 24, 2024Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., NATIONAL YANG MING CHIAO TUNG UNIVERSITYInventors: Chenming HU, Po-Tsang HUANG
-
Publication number: 20240347340Abstract: An epitaxial structure includes a substrate and a dielectric layer. The dielectric layer is on the substrate. The substrate comprises a single crystal metal or a single crystal 2D material. The dielectric layer is in physical contact with the substrate. The dielectric layer comprises a non-perovskite structure with defined grain orientation with ferroelectric (FE) phase or antiferroelectric (AFE) phase.Type: ApplicationFiled: April 12, 2023Publication date: October 17, 2024Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., NATIONAL YANG MING CHIAO TUNG UNIVERSITYInventors: Shu-Jui CHANG, Shin-Yuan WANG, Yu-Che HUANG, Chao-Hsin CHIEN, Chenming HU
-
Publication number: 20240332013Abstract: The present disclosure in various embodiments provides a method. In some embodiments of the present disclosure, the method includes forming a transition metal dichalcogenide layer on a substrate; and performing an ion bombardment process on the transition metal dichalcogenide layer, performing an annealing process on the transition metal dichalcogenide layer.Type: ApplicationFiled: March 30, 2023Publication date: October 3, 2024Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., National Yang Ming Chiao Tung UniversityInventors: Chun-Liang LIN, Chenming HU, Wan-Hsin CHEN, Naoya KAWAKAMI
-
Patent number: 12057447Abstract: A method includes following steps. An interconnect structure is formed over a first transistor. A dielectric layer is formed over the interconnect structure. The dielectric layer is etched to form holes in the dielectric layer. An amorphous layer is deposited in the holes of the dielectric layer and on a top surface of the dielectric layer. The amorphous layer is crystallized into a polycrystalline layer. A second transistor is formed on the polycrystalline layer.Type: GrantFiled: July 26, 2022Date of Patent: August 6, 2024Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., NATIONAL YANG MING CHIAO TUNG UNIVERSITYInventors: Chenming Hu, Po-Tsang Huang
-
Publication number: 20230411388Abstract: An IC structure includes a first transistor, a dielectric layer, a plurality of semiconductor pillars, a plurality of semiconductor plugs, a semiconductor structure, and a second transistor. The first transistor is formed on a substrate. The dielectric layer is above the first transistor. The semiconductor pillars extend from the substrate into the dielectric layer. The semiconductor plugs extend from a top surface of the dielectric layer into the dielectric layer to the plurality of semiconductor pillars. The semiconductor structure is disposed over the top surface of the dielectric layer. The second transistor is formed on the semiconductor structure.Type: ApplicationFiled: June 17, 2022Publication date: December 21, 2023Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., National Yang Ming Chiao Tung UniversityInventors: Chenming HU, Kuan-Neng CHEN, Po-Tsang HUANG, Hao-Tung CHUNG, Bo-Jheng SHIH, Yu-Ming PAN
-
Publication number: 20230378056Abstract: A method includes following steps. First transistors are formed over a substrate. An interconnect structure is formed over the plurality of first transistors. A dielectric layer is formed over the interconnect structure. 2D semiconductor seeds are formed over the dielectric layer. The 2D semiconductor seeds are annealed. An epitaxy process is performed to laterally grow a plurality of 2D semiconductor films respectively from the plurality of 2D semiconductor seeds. Second transistors are formed on the plurality of 2D semiconductor films.Type: ApplicationFiled: July 31, 2023Publication date: November 23, 2023Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., NATIONAL YANG MING CHIAO TUNG UNIVERSITYInventors: Chenming HU, Shu-Jui CHANG, Chen-Han CHOU, Yen-Teng HO, Chia-Hsing WU, Kai-Yu PENG, Cheng-Hung SHEN
-
Publication number: 20230327007Abstract: A method includes forming a 2-D material layer over a substrate, wherein the 2-D material layer comprises transition metal atoms and chalcogen atoms; forming a gate structure over the 2-D material layer; supplying chemical molecules to the 2-D material layer, such that atoms of the chemical molecules react with portions of the chalcogen atoms to weaken covalent bonds between the portions of the chalcogen atoms and the transition metal atoms; and forming source/drain contacts over the 2-D material layer, wherein contact metal atoms of the source/drain contacts form metallic bonds with the transition metal atoms of the 2-D material layer.Type: ApplicationFiled: June 13, 2023Publication date: October 12, 2023Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., National Yang Ming Chiao Tung UniversityInventors: Shu-Jui CHANG, Shin-Yuan WANG, Yu-Che HUANG, Chun-Liang LIN, Chao-Hsin CHIEN, Chenming HU
-
Patent number: 11784119Abstract: An IC structure comprises a first transistor formed on a substrate, a first interconnect structure over the first transistor, a dielectric layer over the first interconnect structure, a plurality of 2D semiconductor islands on the dielectric layer, and a plurality of second transistors formed on the plurality of 2D semiconductor islands.Type: GrantFiled: August 23, 2021Date of Patent: October 10, 2023Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., NATIONAL YANG MING CHIAO TUNG UNIVERSITYInventors: Chenming Hu, Shu-Jui Chang, Chen-Han Chou, Yen-Teng Ho, Chia-Hsing Wu, Kai-Yu Peng, Cheng-Hung Shen