Abstract: Methods and systems for axial-scanning a sample. The method may include generating a scanning beam along a transverse scanning direction across the sample; acquiring radial positions of the generated scanning beam along the transverse scanning direction; and determining, based on the radial positions of the generated scanning beam and desired focal lengths, a phase mask so that the scanning beam at different radial positions along the scanning direction is focused to different axial positions of the sample along an optical axis transverse to the scanning direction.

Abstract: Methods and systems for axial-scanning a sample. The method may include generating a scanning beam along a transverse scanning direction across the sample; acquiring radial positions of the generated scanning beam along the transverse scanning direction; and determining, based on the radial positions of the generated scanning beam and desired focal lengths, a phase mask so that the scanning beam at different radial positions along the scanning direction is focused to different axial positions of the sample along an optical axis transverse to the scanning direction.

Abstract: The present invention discloses methods and systems for fabricating a 3D metal structure. The method may comprises: forming one or more layers successively on a substrate, each of the layers comprising a structural material or a sacrificial material; laser machining, by a pulsed laser, each of the formed layers based on a photomask corresponding to the structure to be fabricated; and removing redundant materials from the formed layers to release the fabricated three-dimensional metal structure. The system and method for fabricating a 3D metal structure provided in the present application can fabricate a metal structure at nanometer level resolution with high throughout.