Patents by Inventor Chen Yu-Chen

Chen Yu-Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11942363
    Abstract: A method includes etching a semiconductor substrate to form a trench, with the semiconductor substrate having a sidewall facing the trench, and depositing a first semiconductor layer extending into the trench. The first semiconductor layer includes a first bottom portion at a bottom of the trench, and a first sidewall portion on the sidewall of the semiconductor substrate. The first sidewall portion is removed to reveal the sidewall of the semiconductor substrate. The method further includes depositing a second semiconductor layer extending into the trench, with the second semiconductor layer having a second bottom portion over the first bottom portion, and a second sidewall portion contacting the sidewall of the semiconductor substrate. The second sidewall portion is removed to reveal the sidewall of the semiconductor substrate.
    Type: Grant
    Filed: August 9, 2022
    Date of Patent: March 26, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Shih-Yao Lin, Kuei-Yu Kao, Chen-Ping Chen, Chih-Han Lin
  • Patent number: 11923440
    Abstract: A method of fabricating a semiconductor device is disclosed. The method includes forming semiconductor fins on a substrate. A first dummy gate is formed over the semiconductor fins. A recess is formed in the first dummy gate, and the recess is disposed between the semiconductor fins. A dummy fin material is formed in the recess. A portion of the dummy fin material is removed to expose an upper surface of the first dummy gate and to form a dummy fin. A second dummy gate is formed on the exposed upper surface of the first dummy gate.
    Type: Grant
    Filed: July 26, 2022
    Date of Patent: March 5, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Shih-Yao Lin, Chen-Ping Chen, Kuei-Yu Kao, Hsiao Wen Lee, Chih-Han Lin
  • Patent number: 11876054
    Abstract: An overlay mark includes a first feature extending in an X-direction, wherein the first feature is a first distance from a substrate. The overlay mark further includes a second feature extending in a Y-direction perpendicular to the X-direction, wherein the second feature is a second distance from the substrate, and the second distance is different from the first distance, wherein at least one of the first feature or the second feature comprises a conductive material. The overlay mark further includes a third feature extending in the X-direction and the Y-direction, wherein the third feature is a third distance from the substrate, and the third distance is different from the first distance and the second distance. The first distance, the second distance and the third distance from the substrate are along a Z-direction perpendicular to both the X-direction and the Y-direction.
    Type: Grant
    Filed: May 18, 2021
    Date of Patent: January 16, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chen-Yu Chen, Ming-Feng Shieh, Ching-Yu Chang
  • Publication number: 20230332087
    Abstract: Examples of the present disclosure generally relate to systems, methods, and devices for performing electrochemical control and monitoring of bacterial gene expression to a precisely assigned level, and may be used, for example, for controlling the production of a protein of interest.
    Type: Application
    Filed: April 14, 2023
    Publication date: October 19, 2023
    Applicant: University of Maryland, College Park
    Inventors: John Robertson Rzasa, Sally Wang, Chen-Yu Chen, Chen-Yu Tsao, William E. Bentley
  • Publication number: 20230049938
    Abstract: A semiconductor structure includes a fin extending from a substrate and oriented lengthwise in a first direction, where the fin includes a stack of semiconductor layers, an isolation feature disposed over the substrate and oriented lengthwise in a second direction perpendicular to the first direction, where the isolation feature is disposed adjacent to the fin, and a metal gate structure having a top portion disposed over the stack of semiconductor layers and a bottom portion interleaved with the stack of semiconductor layers. Furthermore, a sidewall of the bottom portion of the metal gate structure is defined by a sidewall of the isolation feature, and the top portion of the metal gate structure laterally extends over a top surface of the isolation feature.
    Type: Application
    Filed: August 12, 2021
    Publication date: February 16, 2023
    Inventors: Yu-Fan Peng, Yuan-Ching Peng, Yu-Bey Wu, Yu-Shan Lu, Hung Yu Lai, Chen-Yu Chen, Wen-Yun Wang, Tang Ming Lee
  • Publication number: 20220239067
    Abstract: Some embodiments relate to a method for forming a vertical cavity surface emitting laser (VCSEL) structure. The method includes forming an optically active layer over a lower reflective layer and forming an upper reflector over the optically active layer. A first spacer is formed along sidewalls of the upper reflector. An oxidation process is performed with the first spacer in place to oxidize a peripheral region of the optically active layer. A first etch process is performed on the lower reflective layer and the oxidized peripheral region, thereby forming a lower reflector and an optically active region.
    Type: Application
    Filed: April 12, 2022
    Publication date: July 28, 2022
    Inventors: Chen Yu Chen, Ming Chyi Liu, Jhih-Bin Chen
  • Patent number: 11366340
    Abstract: A liquid crystal cell, a method of driving a liquid crystal cell, and a liquid-crystal-based spectacle lens are provided. The liquid crystal cell includes: a ring-like electrode layer, a liquid crystal layer, and an opposite electrode layer. The second ring-like electrode region is concentric with the first ring-like electrode region and surrounds the first ring-like electrode region; the first ring-like electrode region is configured to drive corresponding liquid crystal molecules in the liquid crystal layer, so as to form a first Fresnel zone plate region in the liquid crystal cell; the second ring-like electrode region is configured to drive corresponding liquid crystal molecules in the liquid crystal layer, so as to form a second Fresnel zone plate region of the liquid crystal cell; an order of the second Fresnel zone plate region is smaller than an order of the first Fresnel zone plate region.
    Type: Grant
    Filed: November 19, 2018
    Date of Patent: June 21, 2022
    Assignee: BOE TECHNOLOGY GROUP CO., LTD.
    Inventors: Zhongxiao Li, Xiaochuan Chen, Wenqing Zhao, Weili Zhao, Haiyan Wang, Chen Yu Chen
  • Patent number: 11327336
    Abstract: A panel with a virtual curved display surface and a display device are provided. The virtual curved display panel includes a display panel and a grating. The grating is disposed at a light-exiting side of the display panel, and includes a plurality of light-transmitting regions and a plurality of light-shielding regions spaced apart from each other. Respective widths of the plurality of light-shielding regions of the grating are gradually decreased as respective distances from the plurality of light-shielding regions to a symmetry axis of the display panel are increased, and respective widths of the plurality of light-transmitting regions are gradually increased as respective distances from the plurality of light-transmitting regions to the symmetry axis of the display panel are increased.
    Type: Grant
    Filed: March 2, 2018
    Date of Patent: May 10, 2022
    Assignee: BOE TECHNOLOGY GROUP CO., LTD.
    Inventors: Jian Gao, Xiaochuan Chen, Yafeng Yang, Wei Wang, Chen Yu Chen
  • Patent number: 11309685
    Abstract: Some embodiments relate to a vertical cavity surface emitting laser (VCSEL) device including a VCSEL structure overlying a substrate. The VCSEL structure includes a first reflector, a second reflector, and an optically active region disposed between the first and second reflectors. A first spacer laterally encloses the second reflector. The first spacer comprises a first plurality of protrusions disposed along a sidewall of the second reflector.
    Type: Grant
    Filed: October 14, 2020
    Date of Patent: April 19, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chen Yu Chen, Ming Chyi Liu, Jhih-Bin Chen
  • Publication number: 20210405394
    Abstract: A liquid crystal cell, a method of driving a liquid crystal cell, and a liquid-crystal-based spectacle lens are provided. The liquid crystal cell includes: a ring-like electrode layer, a liquid crystal layer, and an opposite electrode layer. The second ring-like electrode region is concentric with the first ring-like electrode region and surrounds the first ring-like electrode region; the first ring-like electrode region is configured to drive corresponding liquid crystal molecules in the liquid crystal layer, so as to form a first Fresnel zone plate region in the liquid crystal cell; the second ring-like electrode region is configured to drive corresponding liquid crystal molecules in the liquid crystal layer, so as to form a second Fresnel zone plate region of the liquid crystal cell; an order of the second Fresnel zone plate region is smaller than an order of the first Fresnel zone plate region.
    Type: Application
    Filed: November 19, 2018
    Publication date: December 30, 2021
    Inventors: Zhongxiao LI, Xiaochuan CHEN, Wenqing ZHAO, Weili ZHAO, Haiyan WANG, Chen Yu CHEN
  • Publication number: 20210364814
    Abstract: An integrated imaging display device, including: a display component, and a micro-lens array and a low-pass filter disposed on a light-emitting side of the display component. The display component includes a plurality of display units; and the micro-lens array includes a plurality of micro-lenses corresponding to the plurality of display units.
    Type: Application
    Filed: May 9, 2019
    Publication date: November 25, 2021
    Inventors: Baoqiang WEI, Xiaochuan CHEN, Wenqing ZHAO, Chen Yu CHEN, Xiaochen NIU
  • Patent number: 11164844
    Abstract: In some embodiments, the present disclosure relates to a method of forming a package assembly. A wet etch stop layer is formed over a frontside of a semiconductor substrate. A sacrificial semiconductor layer is formed over the wet etch stop layer, and a dry etch stop layer is formed over the sacrificial semiconductor layer. A stack of semiconductor device layers may be formed over the dry etch stop layer. A bonding process is performed to bond the stack of semiconductor device layers to a frontside of an integrated circuit die, wherein the frontside of the semiconductor substrate faces the frontside of the integrated circuit die. A wet etching process is performed to remove the semiconductor substrate, and a dry etching process is performed to remove the wet etch stop layer and the sacrificial semiconductor layer.
    Type: Grant
    Filed: September 12, 2019
    Date of Patent: November 2, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chen Yu Chen, Ming Chyi Liu, Eugene Chen
  • Patent number: 11119349
    Abstract: Embodiments of the present disclosure provide a display device. The display device includes: a display panel including a plurality of sub-pixels, each of the sub-pixels including at least one display unit, each display unit including a first electrode, a second electrode and a liquid crystal layer, the liquid crystal layer being configured to deflect collimated light rays incident onto the display panel by controlling electric signals applied to the first electrode and the second electrode; and an optical member configured to convert collimated light rays emitted from the liquid crystal layer into divergent light rays.
    Type: Grant
    Filed: August 18, 2017
    Date of Patent: September 14, 2021
    Assignee: BOE TECHNOLOGY GROUP CO., LTD.
    Inventors: Zhongxiao Li, Xue Dong, Xiaochuan Chen, Wenqing Zhao, Haiyan Wang, Chen-Yu Chen, Xiaochen Niu, Jinye Zhu
  • Publication number: 20210272911
    Abstract: An overlay mark includes a first feature extending in an X-direction, wherein the first feature is a first distance from a substrate. The overlay mark further includes a second feature extending in a Y-direction perpendicular to the X-direction, wherein the second feature is a second distance from the substrate, and the second distance is different from the first distance, wherein at least one of the first feature or the second feature comprises a conductive material. The overlay mark further includes a third feature extending in the X-direction and the Y-direction, wherein the third feature is a third distance from the substrate, and the third distance is different from the first distance and the second distance. The first distance, the second distance and the third distance from the substrate are along a Z-direction perpendicular to both the X-direction and the Y-direction.
    Type: Application
    Filed: May 18, 2021
    Publication date: September 2, 2021
    Inventors: Chen-Yu CHEN, Ming-Feng SHIEH, Ching-Yu CHANG
  • Patent number: 11037882
    Abstract: An overlay mark includes a first feature extending in an X-direction, wherein the first feature is a first distance from a substrate. The overlay mark further includes a second feature extending in a Y-direction perpendicular to the X-direction, wherein the second feature is a second distance from the substrate, and the second distance is different from the first distance. The overlay mark further includes a third feature extending in the X-direction and the Y-direction, wherein the third feature is a third distance from the substrate, and the third distance is different from the first distance and the second distance.
    Type: Grant
    Filed: August 21, 2019
    Date of Patent: June 15, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chen-Yu Chen, Ming-Feng Shieh, Ching-Yu Chang
  • Publication number: 20210165267
    Abstract: Embodiments of the present disclosure provide a display device. The display device includes: a display panel including a plurality of sub-pixels, each of the sub-pixels including at least one display unit, each display unit including a first electrode, a second electrode and a liquid crystal layer, the liquid crystal layer being configured to deflect collimated light rays incident onto the display panel by controlling electric signals applied to the first electrode and the second electrode; and an optical member configured to convert collimated light rays emitted from the liquid crystal layer into divergent light rays.
    Type: Application
    Filed: August 18, 2017
    Publication date: June 3, 2021
    Inventors: Zhongxiao Li, Xue Dong, Xiaochuan Chen, Wenqing Zhao, Haiyan Wang, Chen-Yu Chen, Xiaochen Niu, Jinye Zhu
  • Publication number: 20210082866
    Abstract: In some embodiments, the present disclosure relates to a method of forming a package assembly. A wet etch stop layer is formed over a frontside of a semiconductor substrate. A sacrificial semiconductor layer is formed over the wet etch stop layer, and a dry etch stop layer is formed over the sacrificial semiconductor layer. A stack of semiconductor device layers may be formed over the dry etch stop layer. A bonding process is performed to bond the stack of semiconductor device layers to a frontside of an integrated circuit die, wherein the frontside of the semiconductor substrate faces the frontside of the integrated circuit die. A wet etching process is performed to remove the semiconductor substrate, and a dry etching process is performed to remove the wet etch stop layer and the sacrificial semiconductor layer.
    Type: Application
    Filed: September 12, 2019
    Publication date: March 18, 2021
    Inventors: Chen Yu Chen, Ming Chyi Liu, Eugene Chen
  • Publication number: 20210028601
    Abstract: Some embodiments relate to a vertical cavity surface emitting laser (VCSEL) device including a VCSEL structure overlying a substrate. The VCSEL structure includes a first reflector, a second reflector, and an optically active region disposed between the first and second reflectors. A first spacer laterally encloses the second reflector. The first spacer comprises a first plurality of protrusions disposed along a sidewall of the second reflector.
    Type: Application
    Filed: October 14, 2020
    Publication date: January 28, 2021
    Inventors: Chen Yu Chen, Ming Chyi Liu, Jhih-Bin Chen
  • Patent number: D945966
    Type: Grant
    Filed: October 19, 2020
    Date of Patent: March 15, 2022
    Assignee: Blooming International Limited
    Inventors: Shu-Fa Shao, Johnny Chen, Chen-Yu Chen
  • Patent number: D972507
    Type: Grant
    Filed: October 19, 2020
    Date of Patent: December 13, 2022
    Assignee: Blooming International Limited
    Inventors: Shu-Fa Shao, Johnny Chen, Chen-Yu Chen