Patents by Inventor Cher Liang Randall Cha

Cher Liang Randall Cha has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6764914
    Abstract: A process for forming a high dielectric constant, (High K), layer, for a metal-oxide-metal, capacitor structure, featuring localized oxidation of an underlying metal layer, performed at a temperature higher than the temperature experienced by surrounding structures, has been developed. A first iteration of this process features the use of a laser ablation procedure, performed to a local region of an underlying metal layer, in an oxidizing ambient. The laser ablation procedure creates the desired, high temperature, only at the laser spot, allowing a high K layer to be created at this temperature, while the surrounding structures on a semiconductor substrate, not directly exposed to the laser ablation procedure remain at lower temperatures.
    Type: Grant
    Filed: November 7, 2002
    Date of Patent: July 20, 2004
    Assignee: Chartered Semiconductor Manufacturing Ltd.
    Inventors: Alex See, Cher Liang Randall Cha, Shyue Fong Quek, Ting Cheong Ang, Wye Boon Loh, Sang Yee Loong, Jun Song, Chua Chee Tee
  • Publication number: 20030138188
    Abstract: Disclosed is a method for forming a first optical device and a vertical stand-off on adjacent regions of a substrate. The method comprises the steps of: depositing subsequent layers of optical materials on the substrate and defining features of the optical device by masking and etching regions of at least one layer; defining the transverse extent of the stand-off by protectively masking a separate region of the or each layer that is etched; modifying the relative thickness of an upper section of the stand-off and the first optical device so that a second optical device subsequently supported by the stand-off is in close optical alignment with the first optical device; and etching a trench through one or more layers of material between the vertical stand-off and the first optical device.
    Type: Application
    Filed: November 26, 2002
    Publication date: July 24, 2003
    Inventors: Hwi Siong Lim, Cher Liang Randall Cha, Yee Loy Lam, Kian Hin Victor Teo
  • Publication number: 20030139056
    Abstract: A method for fabricating features of different depth in a semiconductor substrate by differential etching. Each of the features is first defined by a temporary mask and a metal layer is deposited and processed to provide a negative image of the original mask, the metal layer then acting as a protective layer during etching of the semiconductor substrate to fabricate the desired feature. The technique also allows the possibility that portions of two features of different depth may connect by opening into one another.
    Type: Application
    Filed: November 27, 2002
    Publication date: July 24, 2003
    Inventors: Yee Loy Lam, Kian Hin Victor Teo, Hiroshi Nakamura, Cher Liang Randall Cha
  • Publication number: 20030107114
    Abstract: In the present invention, an assembly comprises one or more semiconductor optoelectronic devices sandwiched between two substrates with thermal circuitry so to provide a route by which heat can be transported from both the n-side and p-side of the semiconductor device to a cooling element. The arrangement proposed is robust, benefiting from the stability and flexibility of component integration provide by simultaneous n and p-side down configuration. The arrangement also allows a large thermal gradient to be achieved with respect to the active region of an optoelectronic device from both the n-side and p-side, resulting in fast and efficient heat spreading.
    Type: Application
    Filed: October 8, 2002
    Publication date: June 12, 2003
    Inventors: Yee Loy Lam, Kian Hin Victor Teo, Cher Liang Randall Cha, Theng Theng Goh
  • Publication number: 20030104673
    Abstract: A process for forming a high dielectric constant, (High K), layer, for a metal-oxide-metal, capacitor structure, featuring localized oxidation of an underlying metal layer, performed at a temperature higher than the temperature experienced by surrounding structures, has been developed. A first iteration of this process features the use of a laser ablation procedure, performed to a local region of an underlying metal layer, in an oxidizing ambient. The laser ablation procedure creates the desired, high temperature, only at the laser spot, allowing a high K layer to be created at this temperature, while the surrounding structures on a semiconductor substrate, not directly exposed to the laser ablation procedure remain at lower temperatures.
    Type: Application
    Filed: November 7, 2002
    Publication date: June 5, 2003
    Applicant: CHARTERED SEMICONDUCTOR MANUFACTURING LTD.
    Inventors: Alex See, Cher Liang Randall Cha, Shyue Fong Quek, Ting Cheong Ang, Wye Boon Loh, Sang Yee Loong, Jun Song, Chua Chee Tee
  • Patent number: 6518133
    Abstract: A method of manufacturing a transistor with a small self aligned gate and self aligned elevated source/drain regions. A first insulating layer is formed over a substrate. A first opening is formed in the first insulating layer to expose the substrate. We form a gate dielectric layer over the substrate in the first opening. Next, first spacers are formed on the sidewalls of the first insulating layer. A gate layer is formed over the first insulating layer, the first spacers, and the gate dielectric layer. We planarize the gate layer to form a gate electrode. The first spacers are removed to form LDD openings. Next, we form lightly doped source/drain regions in the substrate in the LDD openings. Subsequently, second spacers are formed on the sidewalls of the first insulating layer and on the sidewalls of the gate electrode to form S/D openings. Source/drain regions are formed in the substrate in the S/D openings. Next, we form a conductive layer over the substrate at least partially filling the S/D openings.
    Type: Grant
    Filed: April 24, 2002
    Date of Patent: February 11, 2003
    Assignee: Chartered Semiconductor Manufacturing LTD
    Inventors: Alex See, Yeow Kheng Lim, Cher Liang Randall Cha
  • Patent number: 6492242
    Abstract: A process for forming a high dielectric constant, (High K), layer, for a metal-oxide-metal, capacitor structure, featuring localized oxidation of an underlying metal layer, performed at a temperature higher than the temperature experienced by surrounding structures, has been developed. A first iteration of this process features the use of a laser ablation procedure, performed to a local region of an underlying metal layer, in an oxidizing ambient. The laser ablation procedure creates the desired, high temperature, only at the laser spot, allowing a high K layer to be created at this temperature, while the surrounding structures on a semiconductor substrate, not directly exposed to the laser ablation procedure remain at lower temperatures.
    Type: Grant
    Filed: July 3, 2000
    Date of Patent: December 10, 2002
    Assignee: Chartered Semiconductor Manufacturing Ltd.
    Inventors: Alex See, Cher Liang Randall Cha, Shyuz Fong Quek, Ting Cheong Ang, Wye Boon Loh, Sang Yee Loong, Jun Song, Chua Chee Tee
  • Patent number: 6064201
    Abstract: Small metallic patches embedded in a mainly non-metallic surface may be detected and mapped by placing a wire coil at the free end of a cantilever, with a fine tip made of a ferro-magnetic material located at its center. An alternating current is passed through the coil so that when it is near a metallic patch eddy currents are induced in the patch. These produce a small magnetic moment in the patch which pulls the tip towards the surface. This movement of the tip is detected by observing a light beam that is reflected off the surface of the cantilever. By plotting the output of a photodetector, sensistive to small changes in the reflected beam's position, as a function of the tip's location over the surface, a map of the metallic patches is produced.
    Type: Grant
    Filed: July 13, 1998
    Date of Patent: May 16, 2000
    Assignees: Chartered Semiconductor Manufacturing Ltd., National University of Singapore
    Inventors: Cher Liang Randall Cha, Hao Gong, Eng Fong Chor, Lap Chan