Abstract: Microfabricated, gas-filled radiation detector assemblies, methods of making and using same and interface circuit for use therewith are provided. The assembly includes a micromachined radiation detector including a set of spaced-apart electrodes and an ionization gas between the electrodes. A housing has a chamber for housing the detector including the gas. The housing of the assembly also includes a window which allows passage of charged particles therethrough to ionize the gas to create electrons which, in turn, create an electron cascade in the gas between the electrodes when the set of electrodes is biased.

Abstract: Plasma etching or deposition is performed over substrates using spatially localized micro-plasmas operating in parallel with each other. A plasma generating electrode is positioned closely adjacent to an exposed surface of the substrate, as on the surface of a dielectric layer applied to the substrate. A selected pressure of the gas in the region of the electrode and the substrate is established, and a voltage is applied between the plasma generating electrode and the substrate or a second electrode to ignite a plasma in the region between the plasma generating electrode and the substrate for a selected period of time. This plasma is limited to the region of the plasma generating electrode adjacent to the exposed surface so that the substrate is plasma treated in a desired pattern.

Abstract: Glow discharge apparatus having liquid electrodes includes a substrate with a top surface on which cathode and anode electrodes are formed. The cathode electrode may be formed with a cathode terminal port formed to hold a liquid which is spaced from the anode electrode by an inter-electrode surface of the substrate. Electrical conductors are connected to the anode and cathode electrodes to allow a voltage to be applied between them, resulting in a glow discharge in the gap over the inter-electrode surface that causes sputtering of the liquid in the cathode terminal port into the glow discharge. Excitation by the glow discharge of the sputtered or evaporated liquid allows spectroscopic analysis of the constituents of the liquid in the electrode.

Abstract: Glow discharge apparatus having liquid electrodes includes a substrate with a top surface on which cathode and anode electrodes are formed. The cathode electrode may be formed with a cathode terminal port formed to hold a liquid which is spaced from the anode electrode by an inter-electrode surface of the substrate. Electrical conductors are connected to the anode and cathode electrodes to allow a voltage to be applied between them, resulting in a glow discharge in the gap over the inter-electrode surface that causes sputtering of the liquid in the cathode terminal port into the glow discharge. Excitation by the glow discharge of the sputtered or evaporated liquid allows spectroscopic analysis of the constituents of the liquid in the electrode.