Patents by Inventor Chester X. Chien

Chester X. Chien has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for determining a critical dimension at a plane of interest from a measurement taken at a test plane
    Patent number: 8881377
    Abstract: A method for determining a critical dimension of a structure along a plane of interest from a measurement along a test plane that is not necessarily located at the plane of interest. The method involves slicing a structure along a test plane and measuring a marker feature in this test plane. A determination of a critical dimension of a feature at the plane of interest is then determined based on the measurement of the marker feature measurement at the test plane. This testing methodology can be useful, for example in the measurement of a critical dimension of a write pole at an air bearing surface plane form a measurement of a test feature at a plane that is not necessarily located at the air bearing surface plane.
    Type: Grant
    Filed: December 21, 2010
    Date of Patent: November 11, 2014
    Assignee: HGST Netherlands B.V.
    Inventor: Chester X. Chien
  • METHOD FOR DETERMINING A CRITICAL DIMENSION AT A PLANE OF INTEREST FROM A MEASUREMENT TAKEN AT A TEST PLANE
    Publication number: 20120151752
    Abstract: A method for determining a critical dimension of a structure along a plane of interest from a measurement along a test plane that is not necessarily located at the plane of interest. The method involves slicing a structure along a test plane and measuring a marker feature in this test plane. A determination of a critical dimension of a feature at the plane of interest is then determined based on the measurement of the marker feature measurement at the test plane. This testing methodology can be useful, for example in the measurement of a critical dimension of a write pole at an air bearing surface plane form a measurement of a test feature at a plane that is not necessarily located at the air bearing surface plane.
    Type: Application
    Filed: December 21, 2010
    Publication date: June 21, 2012
    Applicant: Hitachi Global Storage Technologies Netherlands B.V.
    Inventor: Chester X. Chien