Patents by Inventor Chet E. Carter
Chet E. Carter has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20260075829Abstract: Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatuses includes: first memory cells and an associated first control gate located on a first level of the apparatus; second memory cells and an associated second control gate located on a second level of the apparatus; a level of dielectric material between the first and second control gates; the second control gate including a conductive material, and a first dielectric liner and a second dielectric liner adjacent respective sides of the conductive material; the second dielectric liner including an opening adjacent a portion of the conductive material; the first dielectric liner extending continuously at the portion of the conductive material; and a conductive contact extending through the first control gate, the level of dielectric material, and the opening of the second dielectric liner and contacting the conductive material of the second control gate.Type: ApplicationFiled: November 18, 2025Publication date: March 12, 2026Inventors: Giovanni Mazzone, Emillio Camerlenghi, Sidhartha Gupta, Paolo Tessariol, Davide Resnati, Chet E. Carter, Tyler List, Giovanni Maria Paolucci
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Publication number: 20260032913Abstract: Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatuses includes: first memory cells and an associated first control gate located on a first level of the apparatus; second memory cells and an associated second control gate located on a second level of the apparatus; a level of dielectric material between the first and second control gates; the second control gate including a conductive material, and a first dielectric liner and a second dielectric liner adjacent respective sides of the conductive material; the second dielectric liner including an opening adjacent a portion of the conductive material; the first dielectric liner extending continuously at the portion of the conductive material; and a conductive contact extending through the first control gate, the level of dielectric material, and the opening of the second dielectric liner and contacting the conductive material of the second control gate.Type: ApplicationFiled: July 29, 2025Publication date: January 29, 2026Inventors: Giovanni Mazzone, Emilio Camerlenghi, Sidhartha Gupta, Paolo Tessariol, Davide Resnati, Chet E. Carter, Tyler List, Giovanni Maria Paolucci
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Publication number: 20250393214Abstract: Some embodiments include a method of forming an assembly (e.g., a memory array). A first opening is formed through a stack of alternating first and second levels. The first levels contain silicon nitride, and the second levels contain silicon dioxide. Some of the silicon dioxide of the second levels is replaced with memory cell structures. The memory cell structures include charge-storage regions adjacent charge-blocking regions. Tunneling material is formed within the first opening, and channel material is formed adjacent the tunneling material. A second opening is formed through the stack. The second opening extends through remaining portions of the silicon dioxide, and through the silicon nitride. The remaining portions of the silicon dioxide are removed to form cavities. Conductive regions are formed within the cavities. The silicon nitride is removed to form voids between the conductive regions. Some embodiments include memory arrays.Type: ApplicationFiled: August 20, 2025Publication date: December 25, 2025Applicant: Micron Technology, Inc.Inventors: Changhan Kim, Chet E. Carter, Cole Smith, Collin Howder, Richard J. Hill, Jie Li
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Patent number: 12408341Abstract: Some embodiments include a method of forming an assembly (e.g., a memory array). A first opening is formed through a stack of alternating first and second levels. The first levels contain silicon nitride, and the second levels contain silicon dioxide. Some of the silicon dioxide of the second levels is replaced with memory cell structures. The memory cell structures include charge-storage regions adjacent charge-blocking regions. Tunneling material is formed within the first opening, and channel material is formed adjacent the tunneling material. A second opening is formed through the stack. The second opening extends through remaining portions of the silicon dioxide, and through the silicon nitride. The remaining portions of the silicon dioxide are removed to form cavities. Conductive regions are formed within the cavities. The silicon nitride is removed to form voids between the conductive regions. Some embodiments include memory arrays.Type: GrantFiled: March 10, 2022Date of Patent: September 2, 2025Assignee: Micron Technology, Inc.Inventors: Changhan Kim, Chet E. Carter, Cole Smith, Collin Howder, Richard J. Hill, Jie Li
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Patent number: 12363895Abstract: Some embodiments include an integrated assembly with a semiconductor channel material having a boundary region where a more-heavily-doped region interfaces with a less-heavily-doped region. The more-heavily-doped region and the less-heavily-doped region have the same majority carriers. The integrated assembly includes a gating structure adjacent the semiconductor channel material and having a gating region and an interconnecting region of a common and continuous material. The gating region has a length extending along a segment of the more-heavily-doped region, a segment of the less-heavily-doped region, and the boundary region. The interconnecting region extends laterally outward from the gating region on a side opposite the semiconductor channel region, and is narrower than the length of the gating region. Some embodiments include methods of forming integrated assemblies.Type: GrantFiled: May 28, 2024Date of Patent: July 15, 2025Assignee: Micron Technology, Inc.Inventors: Justin B. Dorhout, Kunal R. Parekh, Martin C. Roberts, Mohd Kamran Akhtar, Chet E. Carter, David Daycock
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Publication number: 20250142820Abstract: Some embodiments include an integrated assembly with a semiconductor channel material having a boundary region where a more-heavily-doped region interfaces with a less-heavily-doped region. The more-heavily-doped region and the less-heavily-doped region have the same majority carriers. The integrated assembly includes a gating structure adjacent the semiconductor channel material and having a gating region and an interconnecting region of a common and continuous material. The gating region has a length extending along a segment of the more-heavily-doped region, a segment of the less-heavily-doped region, and the boundary region. The interconnecting region extends laterally outward from the gating region on a side opposite the semiconductor channel region, and is narrower than the length of the gating region. Some embodiments include methods of forming integrated assemblies.Type: ApplicationFiled: January 3, 2025Publication date: May 1, 2025Applicant: Micron Technology, Inc.Inventors: Justin B. Dorhout, Kunal R. Parekh, Martin C. Roberts, Mohd Kamran Akhtar, Chet E. Carter, David Daycock
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Publication number: 20250113487Abstract: Integrated circuitry comprising a memory array comprises strings of memory cells comprising laterally-spaced memory blocks individually comprising a first vertical stack comprising alternating insulative tiers and conductive tiers above a conductor tier. Strings of memory cells comprise channel-material strings that extend through the insulative tiers and the conductive tiers. The channel-material strings directly electrically couple with conductor material of the conductor tier. The conductive tiers individually comprise a horizontally-elongated conductive line. A second vertical stack is aside the first vertical stack. The second vertical stack comprises an upper portion and a lower portion. The upper portion comprises vertically-alternating first insulating tiers and second insulating tiers that are of different insulative compositions relative one another.Type: ApplicationFiled: December 12, 2024Publication date: April 3, 2025Applicant: Micron Technology, Inc.Inventors: Collin Howder, M. Jared Barclay, Bhavesh Bhartia, Chet E. Carter, John D. Hopkins, Andrew Li, Haoyu Li, Alyssa N. Scarbrough, Grady S. Waldo
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Publication number: 20250063734Abstract: A microelectronic device may include a source structure and a stack structure. The stack structure may include a vertically alternating sequence of insulative structures and conductive structures. Filled slits may extend through the stack structure and into the source structure, the slits dividing the stack structure into multiple blocks. Memory cell pillars may extend through the stack structure and into the source structure, the memory cell pillars and the filled slits terminated at substantially the same depth within the source structure as one another.Type: ApplicationFiled: November 4, 2024Publication date: February 20, 2025Inventors: Collin Howder, Justin D. Shepherdson, Chet E. Carter
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Publication number: 20250063733Abstract: A microelectronic device comprises a first set of tiers, each tier of the first set of tiers comprising alternating levels of a conductive material and an insulative material and having a first tier pitch, a second set of tiers adjacent to the first set of tiers, each tier of the second set of tiers comprising alternating levels of the conductive material and the insulative material and having a second tier pitch less than the first tier pitch, a third set of tiers adjacent to the second set of tiers, each tier of the third set of tiers comprising alternating levels of the conductive material and the insulative material and having a third tier pitch less than the second tier pitch, and a string of memory cells extending through the first set of tiers, the second set of tiers, and the third set of tiers. Related microelectronic devices, electronic systems, and methods are also described.Type: ApplicationFiled: October 31, 2024Publication date: February 20, 2025Inventors: Yifen Liu, Tecla Ghilardi, George Matamis, Justin D. Shepherdson, Nancy M. Lomeli, Chet E. Carter, Erik R. Byers
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Patent number: 12200929Abstract: Integrated circuitry comprising a memory array comprises strings of memory cells comprising laterally-spaced memory blocks individually comprising a first vertical stack comprising alternating insulative tiers and conductive tiers above a conductor tier. Strings of memory cells comprise channel-material strings that extend through the insulative tiers and the conductive tiers. The channel-material strings directly electrically couple with conductor material of the conductor tier. The conductive tiers individually comprise a horizontally-elongated conductive line. A second vertical stack is aside the first vertical stack. The second vertical stack comprises an upper portion and a lower portion. The upper portion comprises vertically-alternating first insulating tiers and second insulating tiers that are of different insulative compositions relative one another.Type: GrantFiled: August 23, 2021Date of Patent: January 14, 2025Assignee: Micron Technology, Inc.Inventors: Collin Howder, M. Jared Barclay, Bhavesh Bhartia, Chet E. Carter, John D. Hopkins, Andrew Li, Haoyu Li, Alyssa N. Scarbrough, Grady S. Waldo
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Patent number: 12185545Abstract: A method used in forming a memory array comprises forming a substrate comprising a conductor tier comprising an upper conductor material and a lower conductor material, and a stack comprising vertically-alternating first tiers and second tiers above the conductor tier. Horizontally-elongated trenches are formed through the stack to the upper conductor material and the lower conductor material. At least one of the upper and lower conductor materials have an exposed catalytic surface in the trenches. Metal material is electrolessly deposited onto the catalytic surface to cover the upper conductor material and the lower conductor material within the trenches. Channel-material strings of memory cells are formed and extend through the second tiers and the first tiers. Other embodiments, including structure independent of method, are disclosed.Type: GrantFiled: June 22, 2023Date of Patent: December 31, 2024Inventors: Collin Howder, Chet E. Carter
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Patent number: 12160993Abstract: A microelectronic device comprises a first set of tiers, each tier of the first set of tiers comprising alternating levels of a conductive material and an insulative material and having a first tier pitch, a second set of tiers adjacent to the first set of tiers, each tier of the second set of tiers comprising alternating levels of the conductive material and the insulative material and having a second tier pitch less than the first tier pitch, a third set of tiers adjacent to the second set of tiers, each tier of the third set of tiers comprising alternating levels of the conductive material and the insulative material and having a third tier pitch less than the second tier pitch, and a string of memory cells extending through the first set of tiers, the second set of tiers, and the third set of tiers. Related microelectronic devices, electronic systems, and methods are also described.Type: GrantFiled: September 1, 2023Date of Patent: December 3, 2024Inventors: Yifen Liu, Tecla Ghilardi, George Matamis, Justin D. Shepherdson, Nancy M. Lomeli, Chet E. Carter, Erik R. Byers
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Patent number: 12137564Abstract: A microelectronic device may include a source structure and a stack structure. The stack structure may include a vertically alternating sequence of insulative structures and conductive structures. Filled slits may extend through the stack structure and into the source structure, the slits dividing the stack structure into multiple blocks. Memory cell pillars may extend through the stack structure and into the source structure, the memory cell pillars and the filled slits terminated at substantially the same depth within the source structure as one another.Type: GrantFiled: July 26, 2023Date of Patent: November 5, 2024Assignee: Micron Technology, Inc.Inventors: Collin Howder, Justin D. Shepherdson, Chet E. Carter
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Publication number: 20240315018Abstract: Some embodiments include an integrated assembly with a semiconductor channel material having a boundary region where a more-heavily-doped region interfaces with a less-heavily-doped region. The more-heavily-doped region and the less-heavily-doped region have the same majority carriers. The integrated assembly includes a gating structure adjacent the semiconductor channel material and having a gating region and an interconnecting region of a common and continuous material. The gating region has a length extending along a segment of the more-heavily-doped region, a segment of the less-heavily-doped region, and the boundary region. The interconnecting region extends laterally outward from the gating region on a side opposite the semiconductor channel region, and is narrower than the length of the gating region. Some embodiments include methods of forming integrated assemblies.Type: ApplicationFiled: May 28, 2024Publication date: September 19, 2024Applicant: Micron Technology, Inc.Inventors: Justin B. Dorhout, Kunal R. Parekh, Martin C. Roberts, Mohd Kamran Akhtar, Chet E. Carter, David Daycock
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Patent number: 12040253Abstract: A memory array comprising strings of memory cells comprises laterally-spaced memory blocks individually comprising a vertical stack comprising alternating insulative tiers and conductive tiers above a conductor tier. Strings of memory cells comprise channel-material strings that extend through the insulative tiers and the conductive tiers. The channel-material strings directly electrically couple with conductor material of the conductor tier by conducting material that is in a lowest of the conductive tiers and that is directly against multiple of the channel-material strings. A through-array-via (TAV) region comprises TAVs that individually extend through the lowest conductive tier and into the conductor tier. Individual of the TAVs in the lowest conductive tier comprise a conductive core having an annulus circumferentially there-about. The annulus has dopant therein at a total dopant concentration of 0.01 to 30 atomic percent.Type: GrantFiled: October 22, 2021Date of Patent: July 16, 2024Assignee: Micron Technology, Inc.Inventors: Alyssa N. Scarbrough, John D. Hopkins, Chet E. Carter, Justin D. Shepherdson, Collin Howder, Joshua Wolanyk
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Patent number: 12029032Abstract: Some embodiments include an integrated assembly with a semiconductor channel material having a boundary region where a more-heavily-doped region interfaces with a less-heavily-doped region. The more-heavily-doped region and the less-heavily-doped region have the same majority carriers. The integrated assembly includes a gating structure adjacent the semiconductor channel material and having a gating region and an interconnecting region of a common and continuous material. The gating region has a length extending along a segment of the more-heavily-doped region, a segment of the less-heavily-doped region, and the boundary region. The interconnecting region extends laterally outward from the gating region on a side opposite the semiconductor channel region, and is narrower than the length of the gating region. Some embodiments include methods of forming integrated assemblies.Type: GrantFiled: March 6, 2023Date of Patent: July 2, 2024Assignee: Micron Technology, Inc.Inventors: Justin B. Dorhout, Kunal R. Parekh, Martin C. Roberts, Mohd Kamran Akhtar, Chet E. Carter, David Daycock
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Publication number: 20240164092Abstract: A method used in forming a memory array comprising strings of memory cells comprises forming a stack comprising vertically-alternating first tiers and second tiers above a substrate. Horizontally-elongated trenches are formed into the stack to form laterally-spaced memory-block regions. Catalytic material is formed in a bottom region of individual of the trenches. Metal material is electrolessly deposited onto a catalytic surface of the catalytic material to individually fill at least a majority of remaining volume of the individual trenches. Channel-material strings are formed and extend through the first tiers and the second tiers. Other embodiments, including structure independent of method, are disclosed.Type: ApplicationFiled: December 20, 2023Publication date: May 16, 2024Inventors: Collin Howder, Chet E. Carter
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Patent number: 11937429Abstract: Some embodiments include an integrated structure having vertically-stacked conductive levels alternating with dielectric levels. A layer over the conductive levels includes silicon, nitrogen, and one or more of carbon, oxygen, boron and phosphorus. In some embodiments the vertically-stacked conductive levels are wordline levels within a NAND memory array. Some embodiments include an integrated structure having vertically-stacked conductive levels alternating with dielectric levels. Vertically-stacked NAND memory cells are along the conductive levels within a memory array region. A staircase region is proximate the memory array region. The staircase region has electrical contacts in one-to-one correspondence with the conductive levels. A layer is over the memory array region and over the staircase region. The layer includes silicon, nitrogen, and one or more of carbon, oxygen, boron and phosphorus.Type: GrantFiled: December 20, 2021Date of Patent: March 19, 2024Assignee: Micron Technology, Inc.Inventors: Justin B. Dorhout, Fei Wang, Chet E. Carter, Ian Laboriante, John D. Hopkins, Kunal Shrotri, Ryan Meyer, Vinayak Shamanna, Kunal R. Parekh, Martin C. Roberts, Matthew Park
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Patent number: 11871566Abstract: A method used in forming a memory array comprising strings of memory cells comprises forming a stack comprising vertically-alternating first tiers and second tiers above a substrate. Horizontally-elongated trenches are formed into the stack to form laterally-spaced memory-block regions. Catalytic material is formed in a bottom region of individual of the trenches. Metal material is electrolessly deposited onto a catalytic surface of the catalytic material to individually fill at least a majority of remaining volume of the individual trenches. Channel-material strings are formed and extend through the first tiers and the second tiers. Other embodiments, including structure independent of method, are disclosed.Type: GrantFiled: February 1, 2022Date of Patent: January 9, 2024Inventors: Collin Howder, Chet E. Carter
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Publication number: 20230413563Abstract: A microelectronic device comprises a first set of tiers, each tier of the first set of tiers comprising alternating levels of a conductive material and an insulative material and having a first tier pitch, a second set of tiers adjacent to the first set of tiers, each tier of the second set of tiers comprising alternating levels of the conductive material and the insulative material and having a second tier pitch less than the first tier pitch, a third set of tiers adjacent to the second set of tiers, each tier of the third set of tiers comprising alternating levels of the conductive material and the insulative material and having a third tier pitch less than the second tier pitch, and a string of memory cells extending through the first set of tiers, the second set of tiers, and the third set of tiers. Related microelectronic devices, electronic systems, and methods are also described.Type: ApplicationFiled: September 1, 2023Publication date: December 21, 2023Inventors: Yifen Liu, Tecla Ghilardi, George Matamis, Justin D. Shepherdson, Nancy M. Lomeli, Chet E. Carter, Erik R. Byers