Patents by Inventor Cheuk-Ming Lee
Cheuk-Ming Lee has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20210149308Abstract: The present disclosure generally relates to a method and apparatus for loading, processing, and unloading substrates. A processing system comprises a load/unload system coupled to a photolithography system. The load/unload system comprises a first set of tracks having a first height and a first width, and a second set of tracks having a second height and a second width different than the first height and first width. An unprocessed substrate is transferred from a lift pin loader to a chuck along the first set of tracks on a first tray while a processed substrate is transferred from the chuck to the lift pin loader along the second set of tracks on a second tray. While a first tray remains with a substrate on the chuck during processing, the load/unload system is configured to unload a processed substrate and load an unprocessed substrate on a second tray.Type: ApplicationFiled: January 25, 2021Publication date: May 20, 2021Inventors: Benjamin M. JOHNSTON, Preston FUNG, Sean SCREWS, Cheuk Ming LEE, Jae Myung YOO
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Patent number: 11009801Abstract: Embodiments described herein provide a system, a software application, and methods of a lithography process that provide at least one of the ability to decrease the stabilization time and write an exposure pattern into a photoresist on a substrate compensating for the change in the total pitch over a stabilization time. One embodiment of the system includes a slab, a stage disposed over the slab, a pair of supports disposed on the slab, a processing apparatus, and a chiller system. The pair of supports support a pair of tracks and the stage is configured to move along the pair of tracks. The processing apparatus has an apparatus support coupled to the slab and a processing unit supported by the apparatus support. The processing unit has a plurality of image projection systems. The chiller system has at least one fluid channel disposed in each track of the pair of tracks.Type: GrantFiled: September 28, 2020Date of Patent: May 18, 2021Assignee: APPLIED MATERIALS, INC.Inventors: Benjamin M. Johnston, David Michael Corriveau, Cheuk Ming Lee, Jae Myung Yoo, WeiMin Tao, Antoine P. Manens
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Patent number: 10901328Abstract: The present disclosure generally relates to a method and apparatus for loading, processing, and unloading substrates. A processing system comprises a load/unload system coupled to a photolithography system. The load/unload system comprises a first set of tracks having a first height and a first width, and a second set of tracks having a second height and a second width different than the first height and first width. An unprocessed substrate is transferred from a lift pin loader to a chuck along the first set of tracks on a first tray while a processed substrate is transferred from the chuck to the lift pin loader along the second set of tracks on a second tray. While a first tray remains with a substrate on the chuck during processing, the load/unload system is configured to unload a processed substrate and load an unprocessed substrate on a second tray.Type: GrantFiled: September 28, 2018Date of Patent: January 26, 2021Assignee: APPLIED MATERIALS, INC.Inventors: Benjamin M. Johnston, Preston Fung, Sean Screws, Cheuk Ming Lee, Jae Myung Yoo
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Publication number: 20210011390Abstract: Embodiments described herein provide a system, a software application, and methods of a lithography process that provide at least one of the ability to decrease the stabilization time and write an exposure pattern into a photoresist on a substrate compensating for the change in the total pitch over a stabilization time. One embodiment of the system includes a slab, a stage disposed over the slab, a pair of supports disposed on the slab, a processing apparatus, and a chiller system. The pair of supports support a pair of tracks and the stage is configured to move along the pair of tracks. The processing apparatus has an apparatus support coupled to the slab and a processing unit supported by the apparatus support. The processing unit has a plurality of image projection systems. The chiller system has at least one fluid channel disposed in each track of the pair of tracks.Type: ApplicationFiled: September 28, 2020Publication date: January 14, 2021Inventors: Benjamin M. JOHNSTON, David Michael CORRIVEAU, Cheuk Ming LEE, Jae Myung YOO, WeiMin TAO, Antoine P. MANENS
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Patent number: 10788762Abstract: Embodiments described herein provide a system, a software application, and methods of a lithography process that provide at least one of the ability to decrease the stabilization time and write an exposure pattern into a photoresist on a substrate compensating for the change in the total pitch over a stabilization time. One embodiment of the system includes a slab, a stage disposed over the slab, a pair of supports disposed on the slab, a processing apparatus, and a chiller system. The pair of supports support a pair of tracks and the stage is configured to move along the pair of tracks. The processing apparatus has an apparatus support coupled to the slab and a processing unit supported by the apparatus support. The processing unit has a plurality of image projection systems. The chiller system has at least one fluid channel disposed in each track of the pair of tracks.Type: GrantFiled: February 25, 2019Date of Patent: September 29, 2020Assignee: APPLIED MATERIALS, INC.Inventors: Benjamin M. Johnston, David Michael Corriveau, Cheuk Ming Lee, Jae Myung Yoo, WeiMin Tao, Antoine P. Manens
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Publication number: 20200272063Abstract: Embodiments described herein provide a system, a software application, and methods of a lithography process that provide at least one of the ability to decrease the stabilization time and write an exposure pattern into a photoresist on a substrate compensating for the change in the total pitch over a stabilization time. One embodiment of the system includes a slab, a stage disposed over the slab, a pair of supports disposed on the slab, a processing apparatus, and a chiller system. The pair of supports support a pair of tracks and the stage is configured to move along the pair of tracks. The processing apparatus has an apparatus support coupled to the slab and a processing unit supported by the apparatus support. The processing unit has a plurality of image projection systems. The chiller system has at least one fluid channel disposed in each track of the pair of tracks.Type: ApplicationFiled: February 25, 2019Publication date: August 27, 2020Inventors: Benjamin M. JOHNSTON, David Michael CORRIVEAU, Cheuk Ming LEE, Jae Myung YOO, WeiMin TAO, Antoine P. MANENS
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Publication number: 20200103760Abstract: The present disclosure generally relates to a method and apparatus for loading, processing, and unloading substrates. A processing system comprises a load/unload system coupled to a photolithography system. The load/unload system comprises a first set of tracks having a first height and a first width, and a second set of tracks having a second height and a second width different than the first height and first width. An unprocessed substrate is transferred from a lift pin loader to a chuck along the first set of tracks on a first tray while a processed substrate is transferred from the chuck to the lift pin loader along the second set of tracks on a second tray. While a first tray remains with a substrate on the chuck during processing, the load/unload system is configured to unload a processed substrate and load an unprocessed substrate on a second tray.Type: ApplicationFiled: September 28, 2018Publication date: April 2, 2020Inventors: Benjamin M. JOHNSTON, Preston FUNG, Sean SCREWS, Cheuk Ming LEE, Jae Myung YOO
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Publication number: 20200011652Abstract: Processing systems and methods used in the manufacturing of flat panel displays (FPDs) are provided herein. In one embodiment, a processing system features a motion stage movably disposed on a base surface, one or more X-position interferometers, and a plurality of Y-position interferometers. The X-position interferometers include an X-position mirror fixedly coupled to the motion stage and an X-axis stationary module fixedly coupled a non-moving surface of processing system. Each of the plurality of Y-position interferometers include one of a first or second Y-position mirror fixedly coupled to the motion stage in orthogonal relationship to the one or more X-position mirrors and one of a first or a second Y-axis stationary module fixedly coupled to a non-moving surface of the processing system. Here, each of the Y-axis stationary modules is positioned to direct coherent radiation towards a respective Y-position mirror when the Y-position interferometer thereof is in an active arrangement.Type: ApplicationFiled: July 3, 2018Publication date: January 9, 2020Inventors: Benjamin M. JOHNSTON, Cheuk Ming LEE, Jae Myung YOO, Glen Alan GOMES, David Michael CORRIVEAU, Thang Duc NGUYEN
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Patent number: 4453712Abstract: A toy racing car for use on a slotless car racing track has to continue to be driven in the forward direction when the polarity of the driving current is reversed, the reversal causing a change in the direction of steering of the car so that it can change from one lane to another. Such cars need to have a simple and reliable drive system.Type: GrantFiled: July 21, 1982Date of Patent: June 12, 1984Assignee: The Refined Industry Company LimitedInventor: Cheuk-Ming Lee
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Patent number: 4438590Abstract: This invention relates to a toy car which having a chassis, a motor arranged to drive a set of wheels, a terminal strip arranged to pick up current from a wire embedded in a track, the car additionally being provided with a wiper which is mounted to contact the terminal strip and to contact the motor whereby current passes from the track via the terminal strip and wiper to the motor. The car can be used in both slot racing systems and slotless racing systems.Type: GrantFiled: September 22, 1982Date of Patent: March 27, 1984Assignee: The Refined Industry Company, LimitedInventor: Cheuk-Ming Lee
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Patent number: 4372489Abstract: A track section for use with an electrically actuated toy vehicle and which can be joined end to end with other identical track sections to complete a vehicle track. The section includes at least one vehicle path and at least two electrically-conducting strips from which the vehicle obtains its electrical power. The strips extend from end to end of the section. The end of each strip is in a recess which tapers width-wise in a direction away from the end of the section. The recess is formed by an abutment wall adjacent to the end of the strip and a cam wall inclined to the longitudinal axis of the section. The cam wall is adapted to engage a corresponding cam wall on an adjacent section when the two sections are brought together so as to move the ends of the strips of the two sections into side-by-side engagement between respective abutment walls of the two sections. The section has a snap-fit retainer so that two sections can be releasably coupled together.Type: GrantFiled: August 1, 1980Date of Patent: February 8, 1983Assignee: The Refined Industry Company LimitedInventor: Cheuk-Ming Lee