Abstract: Embodiments of the present disclosure generally relate to methods for enhancing carbon hardmask to have improved etching selectivity and profile control. In some embodiments, a method of treating a carbon hardmask layer is provided and includes positioning a workpiece within a process region of a processing chamber, where the workpiece has a carbon hardmask layer disposed on or over an underlying layer, and treating the carbon hardmask layer by exposing the workpiece to a sequential infiltration synthesis (SIS) process to produce an aluminum oxide carbon hybrid hardmask which is denser than the carbon hardmask layer. The SIS process includes exposing and infiltrating the carbon hardmask layer with an aluminum precursor, purging to remove gaseous remnants, exposing and infiltrating the carbon hardmask layer to an oxidizing agent to produce an aluminum oxide coating disposed on inner surfaces of the carbon hardmask layer, and purging the process region to remove gaseous remnants.

Abstract: Embodiments of the present disclosure generally relate to methods for enhancing carbon hardmask to have improved etching selectivity and profile control. In some embodiments, a method of treating a carbon hardmask layer is provided and includes positioning a workpiece within a process region of a processing chamber, where the workpiece has a carbon hardmask layer disposed on or over an underlying layer, and treating the carbon hardmask layer by exposing the workpiece to a sequential infiltration synthesis (SIS) process to produce an aluminum oxide carbon hybrid hardmask which is denser than the carbon hardmask layer. The SIS process includes exposing and infiltrating the carbon hardmask layer with an aluminum precursor, purging to remove gaseous remnants, exposing and infiltrating the carbon hardmask layer to an oxidizing agent to produce an aluminum oxide coating disposed on inner surfaces of the carbon hardmask layer, and purging the process region to remove gaseous remnants.

Abstract: Embodiments of the present disclosure generally relate to methods for enhancing carbon hardmask to have improved etching selectivity and profile control. In some embodiments, a method of treating a carbon hardmask layer is provided and includes positioning a workpiece within a process region of a processing chamber, where the workpiece has a carbon hardmask layer disposed on or over an underlying layer, and treating the carbon hardmask layer by exposing the workpiece to a sequential infiltration synthesis (SIS) process to produce an aluminum oxide carbon hybrid hardmask which is denser than the carbon hardmask layer. The SIS process includes exposing and infiltrating the carbon hardmask layer with an aluminum precursor, purging to remove gaseous remnants, exposing and infiltrating the carbon hardmask layer to an oxidizing agent to produce an aluminum oxide coating disposed on inner surfaces of the carbon hardmask layer, and purging the process region to remove gaseous remnants.

Abstract: Exemplary methods of semiconductor processing may include forming a layer of silicon-containing material on a semiconductor substrate. The methods may include performing a post-formation treatment on the layer of silicon-containing material to yield a treated layer of silicon-containing material. The methods may include contacting the treated layer of silicon-containing material with an adhesion agent. The methods may include forming a layer of a resist material on the treated layer of silicon-containing material.

Abstract: The present disclosure provides a thin film including a first thermoplastic polyolefin (TPO) elastomer which is anhydride-grafted. The present disclosure further provides a method for manufacturing the thin film, a laminated material and a method for adhesion.

Abstract: A calibration method for machine tools comprises: providing a workpiece on a machine tool; rotating the workpiece around a first rotation axis parallel to a main shaft of the machine tool and processing the workpiece by a first machining mode; measuring a first dimensional error of a shape of the workpiece along directions of first and second linear axes perpendicular to the first rotation axis; calculating a positional error of the first rotation axis according to the first dimensional error; rotating the workpiece around a second rotation axis perpendicular to the main shaft and processing the workpiece by a different second machining mode; measuring a second dimensional error of the shape of the workpiece along a direction of a third linear axis perpendicular to the second rotation axis; calculating a positional error of the second rotation axis according to the second dimensional error.

Abstract: A thermal compensation system for machine tools includes a thermal compensation-monitoring device and a cloud processing device. The thermal compensation-monitoring device receives a plurality of temperature signals of a workpiece and corresponding processing tolerance data to build or update a thermal compensation database. The cloud processing device provides a thermal compensation model, and applies the model with the characterized temperature signals and the tolerance data to generate a compensation value so as to decide whether or not to modify the model or to run a compensation is necessary.

Abstract: A monitoring method and a monitoring system for a machine tool to machine a workpiece are provided. The monitoring method includes the following steps. First, a vibration signal of a spindle of the machine tool is detected. Next, a vibration feature value of the vibration signal is obtained. Whether the vibration feature value exceeds a threshold condition is determined, wherein the threshold condition is determined by a training model based on a predetermined surface quality of the workpiece. When the vibration feature value exceeds the threshold condition, a machining parameter of the machine tool is adjusted.

Abstract: The present invention relates to an RNAi compound and an expression plasmid for inhibiting expression of Thrombospondin-1, which comprises a target sequence selected from Thrombospondin-1 gene. The present invention also related to a pharmaceutical composition comprising the RNAi compound and applications thereof. The RNAi compound can reduce the expression of Thrombospondin-1 to activate immune responses. In addition, the present invention also disclosed that an RNAi compound targeted to Thrombospondin-1 gene can delay tumor progression.

Abstract: A portable electronic device includes a casing, a key, a loudspeaker, a soft insulating material, and an actuating unit. The key is disposed at the casing. The loudspeaker is embedded into the casing flatly. The soft insulating material covers the casing and the loudspeaker. The actuating unit is coupled to the key and the loudspeaker, and it actuates the loudspeaker to protrude from the casing in response to an actuation of the key.

Abstract: The present invention relates to an RNAi compound and an expression plasmid for inhibiting expression of Thrombospondin-1, which comprises a target sequence selected from Thrombospondin-1 gene. The present invention also related to a pharmaceutical composition comprising the RNAi compound and applications thereof. The RNAi compound can reduce the expression of Thrombospondin-1 to activate immune responses. In addition, the present invention also disclosed that an RNAi compound targeted to Thrombospondin-1 gene can delay tumor progression.

Abstract: A disposable tea set includes a teapot and a teacup. The teapot is folded from a first sheet, and the first sheet includes a pot bottom portion, a plurality of pot wall portions, a plurality of folding portions, and a pot lid portion. The pot wall portions surround and are connected with the pot bottom portion, and the pot wall portions and the pot bottom portion form seamless connections. The folding portions are connected with the pot wall portions which are adjacent to each other, respectively, and they are folded to make the pot wall portions to form a pot body. One of the folding portions extends to outside of the pot body to form a spout. The pot lid portion is connected with one of the pot wall portions. The teacup is folded from a second sheet and is accommodated in the teapot.

Abstract: A flip electronic device includes a cover, a display module, a casing, a circuit board, and an electrical connection element. The casing is pivotally connected with the cover. The cover has a light-transparent portion. The display module is disposed at the cover. The circuit board is disposed in the casing. The electrical connection element is electrically connected with the display module and the circuit board. At least one portion of the electrical connection element is viewable through the light-transparent portion.

Abstract: An electronic apparatus with a power indication function is connected to an adapter. The electronic apparatus includes a host, a power jack, a rechargeable battery, a power indication element and a controller. The power jack is disposed on the host for connecting with the adapter. The rechargeable battery is disposed in the host and is electrically connected to the power jack. The power indication element has a switch disposed adjacent to the power jack and a power indicator disposed in the host. The controller is electrically connected to the rechargeable battery, the switch and the power indicator. When the switch turns on, the controller detects the remained power in the rechargeable battery and the remained power is indicated by the power indicator.

Abstract: A button assembly is applied to a portable electronic device having a casing. The casing has an opening. The button assembly includes a button and a circuit board. The button is disposed at the opening and has a button body and a cloth-material layer. The cloth-material layer covers at least one portion of the button body and is exposed to a surface of the casing. The circuit board is disposed in the casing. The circuit board has a switch corresponding to the button body. A portable electronic device having the button assembly is also disclosed.

Abstract: A casing includes a main body and a covering layer. The main body has a first transparent area and a second transparent area disposed as mirror images. Light passes through the first transparent area and the second transparent area. The covering layer covers the second transparent area and has a transmittance gradient. A method for manufacturing the casing and an electronic device having the casing are also disclosed.

Abstract: A portable electronic device includes a casing, a key, a loudspeaker, a soft insulating material, and an actuating unit. The key is disposed at the casing. The loudspeaker is embedded into the casing flatly. The soft insulating material covers the casing and the loudspeaker. The actuating unit is coupled to the key and the loudspeaker, and it actuates the loudspeaker to protrude from the casing in response to an actuation of the key.

Abstract: A portable electronic device includes a casing, a covering layer, and a key. The casing has an opening. The covering layer covers at least one portion of the casing and covers the opening. The key is disposed at the opening and at least one portion of the key is embedded into the opening of the casing to allow one portion of the covering layer to be sandwiched between the key and the casing.

Abstract: The present invention discloses a DNA vaccine and the method of preparation preparing the same, which employs DNA recombination technique to co-incorporate a fragment of tumor-associated gene and a fragment of cytokine gene into a vector. The administration of such DNA vaccine can enhance the immune response of the host through the co-expression of tumor-associated protein and cytokine, and thereby achieve the therapeutic effect of inhibiting or retarding tumor growth.

Abstract: The present invention discloses a DNA vaccine and its method of preparation, which employs DNA recombination technique to co-incorporate a fragment of tumor-associated gene and a fragment of cytokine gene into a vector. The administration of such DNA vaccine may enhance the immune response of the host through the co-expression of tumor-associated antigen and cytokine, and thereby achieve the therapeutic effect of inhibiting or retarding tumor growth.