Patents by Inventor Chi-Chen Luo

Chi-Chen Luo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Gas conduit for a load lock chamber
    Patent number: 6997217
    Abstract: A gas conduit for a load lock chamber. The gas conduit connects to a gas source to introduce gas from the gas source into the load lock chamber of semiconductor equipment. The structure includes a filter mounted on the top surface of the load lock chamber, a pressure limitative device to maintain a preset pressure of gas source, and a gas inlet device including an inlet end connected to the pressure limitative device and an outlet end connected to the filter, wherein the gas inlet device introduces gas from the gas source into the load lock chamber with its maximum flow rate when breaching the vacuum therein.
    Type: Grant
    Filed: November 7, 2002
    Date of Patent: February 14, 2006
    Assignee: Macronix International Co., Ltd.
    Inventors: Shih-Hao Shih, Wei-Chen Chen, Chi-Chen Luo, Hsin-Cheng Liu, Andy Lin