Patents by Inventor Chi-Ching Liu

Chi-Ching Liu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 12336443
    Abstract: A resistive random access memory is provided. The resistive random access memory includes a conductive line structure and a memory unit. The conductive line structure is disposed in an array area and a periphery circuit area. The memory unit is disposed on the conductive line structure in the array area. The memory unit includes a lower electrode, a resistive switching layer, and an upper electrode. The lower electrode is disposed on the conductive line structure. The resistive switching layer is disposed on the lower electrode. The upper electrode is disposed on the resistive switching layer. The upper surface of the conductive line structure is in direct contact with the lower electrode.
    Type: Grant
    Filed: January 7, 2022
    Date of Patent: June 17, 2025
    Assignee: WINBOND ELECTRONICS CORP.
    Inventors: Chi-Ching Liu, Chih-Chao Huang, Shih-Ning Tsai
  • Publication number: 20250072295
    Abstract: A method of fabricating a semiconductor device includes the following steps. A plurality of doped regions are formed in a substrate. A first dielectric layer is formed on the substrate. A plurality of first contacts and second contacts are formed in the first dielectric layer to be connected to the plurality of doped regions. A memory element is formed on the first dielectric layer. The memory element is electrically connected to the second contact. A second dielectric layer is formed on the first dielectric layer. The second dielectric layer surrounds the memory element. A conductive line is formed in the second dielectric layer. A top surface of the conductive line is at a same level as a top surface of the memory element, and the conductive line is electrically connected to the plurality of first contacts.
    Type: Application
    Filed: November 13, 2024
    Publication date: February 27, 2025
    Applicant: Winbond Electronics Corp.
    Inventors: Wen-Chia Ou, Chih-Chao Huang, Min-Chih Wei, Yu-Ting Chen, Chi-Ching Liu
  • Publication number: 20250072008
    Abstract: Provided is a semiconductor device including: a substrate, a plurality of isolation structures, a plurality of channel layers, and a gate structure. The substrate includes a plurality of fins thereon. The plurality of isolation structures are respectively disposed between the plurality of fins. A top surface of the plurality of isolation structures is higher than a top surface of the plurality of fins to form a plurality of openings. The plurality of channel layers are respectively disposed in the plurality of openings. Each channel layer is in contact with a corresponding fin and extends to cover a lower sidewall of a corresponding isolation structure, thereby forming a U-shaped structure. The gate structure is filled in the plurality of openings and extends to cover the top surface of the plurality of isolation structures.
    Type: Application
    Filed: November 7, 2024
    Publication date: February 27, 2025
    Applicant: Winbond Electronics Corp.
    Inventors: Chi-Ching Liu, Chih-Chao Huang, Ming-Che Lin, Frederick Chen, Han-Huei Hsu
  • Patent number: 12193337
    Abstract: A method of fabricating a semiconductor device includes the following steps. A plurality of doped regions are formed in a substrate. A first dielectric layer is formed on the substrate. A plurality of first contacts and second contacts are formed in the first dielectric layer to be connected to the plurality of doped regions. A memory element is formed on the first dielectric layer. The memory element is electrically connected to the second contact. A second dielectric layer is formed on the first dielectric layer. The second dielectric layer surrounds the memory element. A conductive line is formed in the second dielectric layer. A top surface of the conductive line is at a same level as a top surface of the memory element, and the conductive line is electrically connected to the plurality of first contacts.
    Type: Grant
    Filed: August 12, 2020
    Date of Patent: January 7, 2025
    Assignee: Winbond Electronics Corp.
    Inventors: Wen-Chia Ou, Chih-Chao Huang, Min-Chih Wei, Yu-Ting Chen, Chi-Ching Liu
  • Patent number: 12185553
    Abstract: Provided is a semiconductor device including: a substrate, a plurality of isolation structures, a plurality of channel layers, and a gate structure. The substrate includes a plurality of fins thereon. The plurality of isolation structures are respectively disposed between the plurality of fins. A top surface of the plurality of isolation structures is higher than a top surface of the plurality of fins to form a plurality of openings. The plurality of channel layers are respectively disposed in the plurality of openings. Each channel layer is in contact with a corresponding fin and extends to cover a lower sidewall of a corresponding isolation structure, thereby forming a U-shaped structure. The gate structure is filled in the plurality of openings and extends to cover the top surface of the plurality of isolation structures.
    Type: Grant
    Filed: April 7, 2022
    Date of Patent: December 31, 2024
    Assignee: Winbond Electronics Corp.
    Inventors: Chi-Ching Liu, Chih-Chao Huang, Ming-Che Lin, Frederick Chen, Han-Huei Hsu
  • Publication number: 20240304681
    Abstract: The method of forming the semiconductor device includes the following steps. An isolation structure is formed between a plurality of active areas. Semiconductor structures are formed over the active areas, and a portion of each semiconductor structure is embedded in the isolation structure. Sacrificial structures are formed on the semiconductor structures. An ion implantation process is performed to form implanted regions between the portions of the semiconductor structures embedded in the isolation structure. The sacrificial structures are removed to form patterned semiconductor structures. A dielectric structure is formed on the patterned semiconductor structure. A control structure is formed on the dielectric structure.
    Type: Application
    Filed: July 3, 2023
    Publication date: September 12, 2024
    Inventors: Chi-Ching LIU, Chia-Ming LIU, Yao-Ting TSAI, Chang-Tsung PAI
  • Patent number: 12087619
    Abstract: A method for manufacturing a semiconductor device, including the following steps. A plurality of first vias are formed in a first dielectric layer in a memory cell region and a peripheral region. A surface treatment is performed on the plurality of first vias to form a plurality of sacrificial layers. The plurality of sacrificial layers are removed to form a plurality of recesses. A plurality of protective layers are formed in the plurality of recesses. A memory device is formed on the first dielectric layer in the memory cell region. A second dielectric layer is formed on the memory device and on the first dielectric layer. A plurality of second vias is formed in the second dielectric layer in the memory cell region and the peripheral region to electrically connect the memory device in the memory cell region and the first vias in the peripheral region, respectively.
    Type: Grant
    Filed: December 22, 2022
    Date of Patent: September 10, 2024
    Assignee: Winbond Electronics Corp.
    Inventors: Chi-Ching Liu, Yu-Ting Chen, Chang-Tsung Pai, Shun-Li Lan, Yen-De Lee, Chih-Jung Ni
  • Publication number: 20230329009
    Abstract: Provided is a semiconductor device including: a substrate, a plurality of isolation structures, a plurality of channel layers, and a gate structure. The substrate includes a plurality of fins thereon. The plurality of isolation structures are respectively disposed between the plurality of fins. A top surface of the plurality of isolation structures is higher than a top surface of the plurality of fins to form a plurality of openings. The plurality of channel layers are respectively disposed in the plurality of openings. Each channel layer is in contact with a corresponding fin and extends to cover a lower sidewall of a corresponding isolation structure, thereby forming a U-shaped structure. The gate structure is filled in the plurality of openings and extends to cover the top surface of the plurality of isolation structures.
    Type: Application
    Filed: April 7, 2022
    Publication date: October 12, 2023
    Applicant: Winbond Electronics Corp.
    Inventors: Chi-Ching Liu, Chih-Chao Huang, Ming-Che Lin, Frederick Chen, Han-Huei Hsu
  • Patent number: 11758740
    Abstract: A three-dimensional semiconductor device includes multiple semiconductor device layers on a substrate, wherein each layer includes a first stacked structure, a first gate dielectric layer, a first semiconductor layer, a first channel layer, a first source region, a first drain region, and a first resistive random access memory cell. The first stacked structure on the substrate includes a first insulating layer and a first gate conductor layer. The first gate dielectric layer surrounds a sidewall of the first stacked structure. The first semiconductor layer surrounds a sidewall of the first gate dielectric layer. The first channel layer is in the first semiconductor layer. The first source region and the first drain region are on both sides of the first channel layer in the first semiconductor layer. The first resistive random access memory cell is on a first sidewall of the first semiconductor layer and connected to the first drain region.
    Type: Grant
    Filed: April 7, 2021
    Date of Patent: September 12, 2023
    Assignee: Winbond Electronics Corp.
    Inventors: Chang-Tsung Pai, Chiung-Lin Hsu, Yu-Ting Chen, Ming-Che Lin, Chi-Ching Liu
  • Publication number: 20230225228
    Abstract: A resistive random access memory is provided. The resistive random access memory includes a conductive line structure and a memory unit. The conductive line structure is disposed in an array area and a periphery circuit area. The memory unit is disposed on the conductive line structure in the array area. The memory unit includes a lower electrode, a resistive switching layer, and an upper electrode. The lower electrode is disposed on the conductive line structure. The resistive switching layer is disposed on the lower electrode. The upper electrode is disposed on the resistive switching layer. The upper surface of the conductive line structure is in direct contact with the lower electrode.
    Type: Application
    Filed: January 7, 2022
    Publication date: July 13, 2023
    Inventors: Chi-Ching LIU, Chih-Chao HUANG, Shih-Ning TSAI
  • Patent number: 11653583
    Abstract: A resistive random access memory is provided. The resistive random access memory includes a bottom electrode, a metal oxide layer including a plurality of conductive filament regions formed on the bottom electrode, and a plurality of top electrodes formed on the metal oxide layer, corresponding to the respective conductive filament regions. Each of the conductive filament regions has a bottom portion and a top portion. The width of the bottom portion is greater than that of the top portion. The conductive filament regions include oxygen vacancies, and regions other than the conductive filament regions in the metal oxide layer are nitrogen-containing regions.
    Type: Grant
    Filed: July 7, 2020
    Date of Patent: May 16, 2023
    Assignee: WINBOND ELECTRONICS CORP.
    Inventors: Chang-Tsung Pai, Ming-Che Lin, Chi-Ching Liu, He-Hsuan Chao, Chia-Wen Cheng
  • Publication number: 20230129196
    Abstract: A method for manufacturing a semiconductor device, including the following steps. A plurality of first vias are formed in a first dielectric layer in a memory cell region and a peripheral region. A surface treatment is performed on the plurality of first vias to form a plurality of sacrificial layers. The plurality of sacrificial layers are removed to form a plurality of recesses. A plurality of protective layers are formed in the plurality of recesses. A memory device is formed on the first dielectric layer in the memory cell region. A second dielectric layer is formed on the memory device and on the first dielectric layer. A plurality of second vias is formed in the second dielectric layer in the memory cell region and the peripheral region to electrically connect the memory device in the memory cell region and the first vias in the peripheral region, respectively.
    Type: Application
    Filed: December 22, 2022
    Publication date: April 27, 2023
    Applicant: Winbond Electronics Corp.
    Inventors: Chi-Ching Liu, Yu-Ting Chen, Chang-Tsung Pai, Shun-Li Lan, Yen-De Lee, Chih-Jung Ni
  • Patent number: 11538525
    Abstract: Provided is a resetting method of a resistive random access memory (RRAM) including the following steps. A first resetting operation and a first verifying operation on the at least one resistive memory cell are performed. Whether to perform a second resetting operation according to a verifying result of the first verifying operation is determined. A second verifying operation is performed after the second resetting operation is determined to be performed and is finished. To determine whether to perform a healing resetting operation according to a verifying result of the second verifying operation, which comprises: performing the healing resetting operation when a verifying current of the second verifying operation is greater than a predetermined current, wherein a resetting voltage of the healing resetting operation is greater than a resetting voltage of the second resetting operation.
    Type: Grant
    Filed: October 6, 2021
    Date of Patent: December 27, 2022
    Assignee: Winbond Electronics Corp.
    Inventors: Ping-Kun Wang, Ming-Che Lin, Yu-Ting Chen, Chang-Tsung Pai, Shao-Ching Liao, Chi-Ching Liu
  • Publication number: 20220344283
    Abstract: A semiconductor structure serves to generate a physical unclonable function (PUF) code. The semiconductor structure includes a metal layer, N Titanium (Ti) structures, and N Titanium Nitride (Ti-N) structures, where N is a positive integer. The metal layer forms N metal structures. The Ti structures are respectively formed on one end of each metal structure. The Ti-N structures are respectively formed on top of the Ti structures. The metal structures and the corresponding Ti structures and the corresponding Ti-N structures respectively form a plurality of pillars. The pillars respectively provide a plurality of resistance values, and the resistance values serve to generate the PUF code.
    Type: Application
    Filed: January 27, 2022
    Publication date: October 27, 2022
    Applicant: Winbond Electronics Corp.
    Inventors: Chi-Ching Liu, Hsiu-Pin Chen, Sung-Ying Wen, Tso-Hua Hung, Yu-An Chen, Ming-Che Lin
  • Publication number: 20220028454
    Abstract: Provided is a resetting method of a resistive random access memory (RRAM) including the following steps. A first resetting operation and a first verifying operation on the at least one resistive memory cell are performed. Whether to perform a second resetting operation according to a verifying result of the first verifying operation is determined. A second verifying operation is performed after the second resetting operation is determined to be performed and is finished. To determine whether to perform a healing resetting operation according to a verifying result of the second verifying operation, which comprises: performing the healing resetting operation when a verifying current of the second verifying operation is greater than a predetermined current, wherein a resetting voltage of the healing resetting operation is greater than a resetting voltage of the second resetting operation.
    Type: Application
    Filed: October 6, 2021
    Publication date: January 27, 2022
    Applicant: Winbond Electronics Corp.
    Inventors: Ping-Kun Wang, Ming-Che Lin, Yu-Ting Chen, Chang-Tsung Pai, Shao-Ching Liao, Chi-Ching Liu
  • Publication number: 20210366986
    Abstract: A three-dimensional semiconductor device includes multiple semiconductor device layers on a substrate, wherein each layer includes a first stacked structure, a first gate dielectric layer, a first semiconductor layer, a first channel layer, a first source region, a first drain region, and a first resistive random access memory cell. The first stacked structure on the substrate includes a first insulating layer and a first gate conductor layer. The first gate dielectric layer surrounds a sidewall of the first stacked structure. The first semiconductor layer surrounds a sidewall of the first gate dielectric layer. The first channel layer is in the first semiconductor layer. The first source region and the first drain region are on both sides of the first channel layer in the first semiconductor layer. The first resistive random access memory cell is on a first sidewall of the first semiconductor layer and connected to the first drain region.
    Type: Application
    Filed: April 7, 2021
    Publication date: November 25, 2021
    Applicant: Winbond Electronics Corp.
    Inventors: Chang-Tsung Pai, Chiung-Lin Hsu, Yu-Ting Chen, Ming-Che Lin, Chi-Ching Liu
  • Patent number: 11176996
    Abstract: Provided is a resistive random access memory (RRAM) including at least one memory cell. The at least one memory cell includes a top electrode, a bottom electrode, a data storage layer, an oxygen gettering layer, a first barrier layer, and an oxygen supplying layer. The data storage layer is disposed between the top electrode and the bottom electrode. The oxygen gettering layer is disposed between the data storage layer and the top electrode. The first barrier layer is disposed between the oxygen gettering layer and the data storage layer. The oxygen supplying layer is disposed between the oxygen gettering layer and the top electrode and/or between the oxygen gettering layer and the first barrier layer.
    Type: Grant
    Filed: May 13, 2020
    Date of Patent: November 16, 2021
    Assignee: Winbond Electronics Corp.
    Inventors: Ping-Kun Wang, Ming-Che Lin, Yu-Ting Chen, Chang-Tsung Pai, Shao-Ching Liao, Chi-Ching Liu
  • Patent number: 11152566
    Abstract: A resistive random access memory including first and second electrodes, a resistance variable layer, first and second metal layers and a resistance stabilizing layer is provided. The second electrode is disposed on the first electrode. The resistance variable layer is disposed between the first and second electrodes. The first metal layer is disposed between the resistance variable layer and the second electrode. The second metal layer is disposed between the first metal layer and the second electrode. The resistance stabilizing layer is disposed between the first and second metal layers. The oxygen content of the resistance variable layer is higher than that of the first metal layer, the oxygen content of the first metal layer is higher than that of the resistance stabilizing layer, the oxygen content of the resistance stabilizing layer is higher than that of the second metal layer.
    Type: Grant
    Filed: December 10, 2019
    Date of Patent: October 19, 2021
    Assignee: Winbond Electronics Corp.
    Inventors: Po-Yen Hsu, Bo-Lun Wu, Ping-Kun Wang, Ming-Che Lin, Yu-Ting Chen, Chang-Tsung Pai, Shao-Ching Liao, Chi-Ching Liu
  • Publication number: 20210287934
    Abstract: A method for manufacturing a semiconductor device, including the following steps. A plurality of first vias are formed in a first dielectric layer in a memory cell region and a peripheral region. A surface treatment is performed on the plurality of first vias to form a plurality of sacrificial layers. The plurality of sacrificial layers are removed to form a plurality of recesses. A plurality of protective layers are formed in the plurality of recesses. A memory device is formed on the first dielectric layer in the memory cell region. A second dielectric layer is formed on the memory device and on the first dielectric layer. A plurality of second vias is formed in the second dielectric layer in the memory cell region and the peripheral region to electrically connect the memory device in the memory cell region and the first vias in the peripheral region, respectively.
    Type: Application
    Filed: March 12, 2020
    Publication date: September 16, 2021
    Applicant: Winbond Electronics Corp.
    Inventors: Chi-Ching Liu, Yu-Ting Chen, Chang-Tsung Pai, Shun-Li Lan, Yen-De Lee, Chih-Jung Ni
  • Publication number: 20210175418
    Abstract: A resistive random access memory including first and second electrodes, a resistance variable layer, first and second metal layers and a resistance stabilizing layer is provided. The second electrode is disposed on the first electrode. The resistance variable layer is disposed between the first and second electrodes. The first metal layer is disposed between the resistance variable layer and the second electrode. The second metal layer is disposed between the first metal layer and the second electrode. The resistance stabilizing layer is disposed between the first and second metal layers. The oxygen content of the resistance variable layer is higher than that of the first metal layer, the oxygen content of the first metal layer is higher than that of the resistance stabilizing layer, the oxygen content of the resistance stabilizing layer is higher than that of the second metal layer.
    Type: Application
    Filed: December 10, 2019
    Publication date: June 10, 2021
    Applicant: Winbond Electronics Corp.
    Inventors: Po-Yen Hsu, Bo-Lun Wu, Ping-Kun Wang, Ming-Che Lin, Yu-Ting Chen, Chang-Tsung Pai, Shao-Ching Liao, Chi-Ching Liu