Patents by Inventor Chi-Fen Chen

Chi-Fen Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System for monitoring temperature and slope of a wafer and a method thereof
    Patent number: 8013748
    Abstract: A method for monitoring the temperature and slope of a wafer is presented, and the steps of the method comprises: (a) providing a cooling machine, a monitoring system, a sensing module, and a wafer; (b) cooling the wafer by the cooling machine; (c) sensing all regions of the wafer by the sensing module, and detecting the temperature and slope of the wafer relative to the cooling machine; (d) if the wafer's temperature is higher than a set temperature, the monitoring system outputs a first alarm signal, if the wafer's slope is greater than a set slope, the monitoring system outputs a second alarm signal.
    Type: Grant
    Filed: December 3, 2008
    Date of Patent: September 6, 2011
    Assignee: Inotera Memories, Inc.
    Inventors: Chi-Fen Chen, Jen Jui Cheng
  • SYSTEM FOR MONITORING TEMPERATURE AND SLOPE OF A WAFER AND A METHOD THEREOF
    Publication number: 20100079296
    Abstract: A method for monitoring the temperature and slope of a wafer is presented, and the steps of the method comprises: (a) providing a cooling machine, a monitoring system, a sensing module, and a wafer; (b) cooling the wafer by the cooling machine; (c) sensing all regions of the wafer by the sensing module, and detecting the temperature and slope of the wafer relative to the cooling machine; (d) if the wafer's temperature is higher than a set temperature, the monitoring system outputs a first alarm signal, if the wafer's slope is greater than a set slope, the monitoring system outputs a second alarm signal.
    Type: Application
    Filed: December 3, 2008
    Publication date: April 1, 2010
    Applicant: INOTERA MEMORIES, INC.
    Inventors: CHI-FEN CHEN, JEN JUI CHENG