Abstract: A system for a semiconductor fabrication facility comprises a transporting tool configured to move a carrier, a first manufacturing tool configured to accept the carrier facing in a first direction, a second manufacturing tool configured to accept the carrier facing in the second direction, and an orientation tool. The carrier is moved to the orientation tool by the transporting tool prior to being moved to the first manufacturing tool or the second manufacturing tool by the transporting tool. The orientation tool rotates the carrier so that the carrier is accepted by the first manufacturing tool or the second manufacturing tool. The transporting tool, the first manufacturing tool, the second manufacturing tool and the orientation tool are physically separated from each other.

Abstract: An apparatus in an overhead transport system is provided. The apparatus includes a hanger feature configured to be hung from a ceiling, a plate-like structure having a top surface and a bottom surface, the bottom surface being rotatably coupled to the hanger feature, and at least one pair of rail members mechanically coupled to the bottom surface of the plate-like structure by way of a plurality of yoke members.

Abstract: Embodiments related to gateway arrangements for wireless communication networks are disclosed herein. For example, in some embodiments, a network controller computing system may include serving gateway (SGW) control plane circuitry to virtualize control plane functions of an SGW, packet data network gateway (PGW) control plane circuitry to virtualize control plane functions of a PGW, first communication circuitry to establish a first secure communication link between the SGW control plane circuitry and an SGW user plane computing system that is to perform user plane functions of an SGW, and second communication circuitry to establish a second secure communication link between the PGW control plane circuitry and a PGW user plane computing system that is to perform user plane functions of a PGW. Other embodiments may be disclosed and/or claimed.

Abstract: A manufacturing method of miniature fluid actuator is disclosed and includes the following steps. A flow-channel main body manufactured by a CMOS process is provided, and an actuating unit is formed by a deposition process, a photolithography process and an etching process. Then, at least one flow channel is formed by etching, and a vibration layer and a central through hole are formed by a photolithography process and an etching process. After that, an orifice layer is provided to form at least one outflow opening by an etching process, and then a chamber is formed by rolling a dry film material on the orifice layer. Finally, the orifice layer and the flow-channel main body are flip-chip aligned and hot-pressed, and then the miniature fluid actuator is obtained by a flip-chip alignment process and a hot pressing process.

Abstract: A peripheral component interconnect express (PCIe) device error reporting optimization method includes acquiring advanced error reporting data of a PCIe device, executing a removal detection process of the PCIe device for detecting if the PCIe device is plugged into a connector, transmitting error log data of the PCIe device to a baseboard management controller and an advanced configuration and power interface according to the advanced error reporting data if the PCIe device is plugged into the connector, and filtering the error log data of the PCIe device so that filtered error log data is received by the baseboard management controller and the advanced configuration and power interface if the PCIe device and the connector are electrically disconnected.

Abstract: Methods and apparatus for a baking chamber for processing a chamber component are provided herein. In some embodiments, a baking chamber includes: an enclosure defining a first chamber, wherein the first chamber comprises: a first chamber body having a first floor and first sidewalls that couple the first floor to a first lid of the first chamber body to define a first interior volume; a first support disposed in the first interior volume; a first gas line disposed in the first interior volume proximate the first lid; a first showerhead disposed between the first gas line and the first support; a first exhaust coupled to the first floor; and a first heater disposed in the first interior volume between the first support and the first floor; and wherein the enclosure includes a door configured to facilitate transferring the chamber component into and out of the enclosure.

Abstract: A filtration and purification processing method includes following steps: (1) providing a filtration and purification device; (2) performing a gas introduction, filtration, and detection procedure; (3) performing a detection and determination procedure to the purified gas; (4) performing a circulating filtration and detection procedure to the purified gas; and (5) repeating filtration and purification procedures to the purified gas several times and guiding out the purified gas.

Abstract: A method for detecting, locating and completely cleaning indoor microorganism is disclosed. At least one gas pump is widely disposed in an indoor space to provide an airflow to inhale air thereinto at any time, and collect at least one microorganism contained in the air at any time. The airflow is utilized to transport the microorganism to at least one physical first device and/or chemical first device and/or microbial first device for detecting and locating a concentration, a species or a size of the microorganism. Artificial intelligence operations are implemented through a wireless network to determine the location of the microorganism. At least one fan closest to the location of the microorganism is intelligently selected and enabled to generate a directional air convection, so that the microorganism is transported to at least one physical second device and/or chemical second device and/or microbial second device for elimination and complete clearance.

Abstract: A driving circuit of fluid pump module includes a microprocessor, a primary boost circuit, and a pump driving circuit is provided. The microprocessor receives an output signal with a large-width variable rectangular waveform, a driving voltage, a first detection current-feedback signal, and a second detection current-feedback signal. The primary boost circuit converts an inputted driving voltage into a direct current with a certain high voltage. The pump driving circuit receives the certain high voltage and is connected with the microprocessor to receive the voltage control signal and the pulse-width modulation (PWM) signal. The secondary boost circuit receives the certain high voltage to boost the certain high voltage into a working voltage for the fluid pump. The operation driving circuit receives the working voltage and provides the pulse-width modulation signal for the fluid pump through the second detection current-feedback signal.

Abstract: A fusion method and a fusion system for multiple depth information are provided. A first depth information is obtained by a first image capturing module. A second depth information is obtained by a second image capturing module. Through a non-linear transformation, the first depth information is transformed into a first transformation information, and the second depth information is processed according to the first transformation information to generate a transformed information; or the first depth information and the second depth information are merged to be a fusion information, which is then transformed into the transformed information through the nonlinear transformation.

Abstract: A piezoelectric actuator includes a square suspension plate, an outer frame, a plurality of brackets and a square piezoelectric ceramic plate. The outer frame is arranged around the suspension plate. A second surface of the outer frame and a second surface of the suspension plate are coplanar with each other. Each of the plurality of brackets has two ends, a first end is perpendicular to and connected with the suspension plate, and a second end is perpendicular to and connected with the outer frame for elastically supporting the suspension plate. Each bracket has a length in a range between 1.22 mm and 1.45 mm and a width in a range between 0.2 mm and 0.6 mm. A length of the piezoelectric ceramic plate is not larger than a length of the suspension plate. The piezoelectric ceramic plate is attached on a first surface of the suspension plate.

Abstract: The home device capable of gas detection is provided and includes a main body and a gas detection module. The main body has at least one inlet, at least one outlet and a gas flowing channel disposed between the at least one inlet and the at least one outlet. The gas detection module is disposed in the gas flowing channel of the main body and includes a piezoelectric actuator and at least one sensor. Gas is inhaled into the gas flowing channel through the inlet by the piezoelectric actuator, is discharged out through the outlet, and is transported to the at least one sensor to be detected so as to obtain gas information.

Abstract: A health monitoring device having gas detection function is disclosed. The health monitoring device includes a main body. The main body has at least one inlet and at least one outlet, and includes a gas detection module. The gas detection module includes a piezoelectric actuator and at least one sensor. Gas is inhaled into the main body through the inlet by the piezoelectric actuator, is discharged out through the outlet, and is transported to the at least one sensor to be detected so as to obtain gas information.

Abstract: A miniature fluid actuator is disclosed and includes a substrate, a chamber layer, a carrying layer and a piezoelectric assembly. The substrate has an inlet. The chamber layer is formed on the substrate and includes a first chamber in communication with the inlet, a resonance layer and a second chamber. The resonance layer has a central aperture in communication between the first chamber and the second chamber. The carrying layer includes a fixed region formed on the chamber layer, a vibration region, a connection portion and a vacant. The vibration region is located at a center of the fixed region and corresponding to the second chamber. The connection portion is connected between the fixed region and the vibration region. The vacant is formed among the fixed region, the vibration region and the connection portion. The piezoelectric assembly is formed on the vibration region.

Abstract: A system for detecting, positioning, and cleaning indoor air pollution includes one or more blade blowers widely configured in an indoor space to provide an air flow, to inhale a gas, and to collect an air pollution in the gas. The blade blower transmits the air pollution to one or more first devices which is physical-typed or chemical-typed through the air flow to detect and ensure a qualitative property, a concentration, and a location of the air pollution. A blower which is nearest to the location of the air pollution is enabled through a wireless network and artificial intelligent computation to generate a directed air flow. The directed air flow transfers the air pollution to pass through one or more second devices which is physical-typed, chemical-typed, or biological-typed to clean the air pollution.

Abstract: A gas exchange device for filtering a gas is provided. The gas exchange device includes a gas-intake channel having a gas-intake-channel inlet and a gas-intake-channel outlet, a gas-exhaust channel disposed aside the gas-intake channel and including a gas-exhaust-channel inlet and a gas-exhaust-channel outlet, a purification unit disposed in the gas-intake channel for filtering the gas passing through the gas-intake channel, a gas-intake guider and a gas-exhaust guider for guiding the gas, a driving controller disposed in the gas-intake channel near the gas-intake guider for controlling enablement and disablement of the purification unit, the gas-intake guider and the gas-exhaust guider, and a gas detection main body for detecting the gas and generating detection data.

Abstract: An air pollution prevention system is disclosed and includes at least one detection and processing device and at least one cleaning device. The detection and processing device includes a nano actuator, a nano photodetector, a carbon nanotube and a microprocessor, which are integrated as a single chip device through semiconductor manufacturing processes. The detection and processing device configured to detect a particulate matter and gas contained in an air pollution source and output a control command. The cleaning device includes a nano blower, a nano filter and a controller. The cleaning device receives the control command outputted from the detection and processing device through the controller to control the nano blower for guiding the air pollution source to flow through the nano filter for filtration.

Abstract: A fluid pump module includes a heat dissipation board assembly, a fixing frame body, fluid pumps, a control board and a conveying pipe is provided. The fixing frame body is fixed at one side of the heat dissipation board assembly, so as to form two accommodating spaces between the heat dissipation board assembly and the fixing frame body. Two fluid pumps are respectively disposed in the two accommodating spaces. The control board is disposed at another side of the heat dissipation board assembly. The conveying pipe connects the two fluid pumps in series so as to form a series connection therebetween. The control board controls operations of the fluid pumps, and the heat dissipation board assembly dissipates heats produced by a module formed by the two fluid pumps.

Abstract: An ozone purification device is disclosed. The ozone purification device comprises an ultraviolet light source and a filter. The ultraviolet light source includes an ultraviolet lamp and a LED lamp. The ultraviolet lamp generates ultraviolet rays and the LED lamp generates heat. The filter is composed of a metal composite catalyst coated with an active carbon. When ozone passes through the ultraviolet light source, ozone is irradiated by the ultraviolet light lamp and the LED lamp of the ultraviolet light source, and then passes through the metal composite catalyst and the active carbon of the filter to accelerate the decomposition of ozone into oxygen.

Abstract: System and method for cross-fab wafer transportation are provided. A method includes providing a first FAB building and a second FAB building connected via a bridging area, the second FAB building comprising fabrication tools configured to perform fabrication processes different than fabrication processes performed by fabrication tools in the first FAB building, after performing fabrication processes in the first FAB building, configuring a first vehicle of the first FAB building to travel along a first OHT track and take the wafer to the bridging area, configuring a second vehicle of the second FAB building to travel along a second OHT track and arrive at the bridging area, where a portion of the first OHT is in parallel with a portion of the second OHT track at the bridging area, when some predetermined conditions are met, configuring the first vehicle to transfer the wafer to the second vehicle.