Patents by Inventor Chi Hen Lin

Chi Hen Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of preventing defects and particles produced after tungsten etch back
    Patent number: 5804091
    Abstract: The present invention is a method of preventing defects and particles produced after tungsten etch back. The method utilizes the Ar plasma process, baking process, and D.I. water flushing with megasonic shacking to reduce a lot of defects and particles on the surface of a wafer. Thus, the present invention can prevent defects and particles produced after tungsten etch back.
    Type: Grant
    Filed: July 18, 1996
    Date of Patent: September 8, 1998
    Assignee: Mosel Vitelic Inc.
    Inventors: Yung Tsun Lo, Guan Jiun Yi, Chi Hen Lin, Jyh Ming Jih