Patents by Inventor Chi-hsin Chang
Chi-hsin Chang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Publication number: 20240113188Abstract: An integrated circuit (IC) structure includes a semiconductor substrate, a first gate line, a second gate line, and a first auxiliary gate portion. The semiconductor substrate comprises a semiconductor fin. The semiconductor fin extends substantially along a first direction. The first gate line and the second gate line extend substantially along a second direction different form the first direction from a top view. The first auxiliary gate portion connects the first gate line to the second gate line from the top view.Type: ApplicationFiled: March 27, 2023Publication date: April 4, 2024Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Wen-Li CHIU, Yi-Juei LEE, Yu-Jie YE, Chi-Hsin CHANG, Chun-Jun LIN
-
Patent number: 11749679Abstract: An IC fabrication method includes forming a first fin on a semiconductor substrate, forming an isolation dielectric material over the first fin, and planarizing the isolation dielectric material. A top surface of the first fin is covered by the isolation dielectric material after planarizing the isolation dielectric material. The method further includes etching back the isolation dielectric material until the first fin protrudes from the isolation dielectric material.Type: GrantFiled: July 2, 2021Date of Patent: September 5, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Yi-Juei Lee, Chia-Ming Liang, Chi-Hsin Chang, Jin-Aun Ng, Yi-Shien Mor, Huai-Hsien Chiu
-
Publication number: 20210335785Abstract: An IC fabrication method includes forming a first fin on a semiconductor substrate, forming an isolation dielectric material over the first fin, and planarizing the isolation dielectric material. A top surface of the first fin is covered by the isolation dielectric material after planarizing the isolation dielectric material. The method further includes etching back the isolation dielectric material until the first fin protrudes from the isolation dielectric material.Type: ApplicationFiled: July 2, 2021Publication date: October 28, 2021Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Yi-Juei LEE, Chia-Ming LIANG, Chi-Hsin CHANG, Jin-Aun NG, Yi-Shien MOR, Huai-Hsien CHIU
-
Patent number: 11075199Abstract: A method includes forming a first fin on a semiconductor substrate, forming an isolation dielectric material over the first fin, and planarizing the isolation dielectric material. A top surface of the first fin is covered by the isolation dielectric material after planarizing the isolation dielectric material. The method further includes etching back the isolation dielectric material until the first fin protrudes from the isolation dielectric material.Type: GrantFiled: February 11, 2019Date of Patent: July 27, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Yi-Juei Lee, Chia-Ming Liang, Chi-Hsin Chang, Jin-Aun Ng, Yi-Shien Mor, Huai-Hsien Chiu
-
Patent number: 11004747Abstract: Integrated circuit devices having optimized fin critical dimension loading are disclosed herein. An exemplary integrated circuit device includes a core region that includes a first multi-fin structure and an input/output region that includes a second multi-fin structure. The first multi-fin structure has a first width and the second multi-fin structure has a second width. The first width is greater than the second width. In some implementations, the first multi-fin structure has a first fin spacing and the second multi-fin structure has a second fin spacing. The first fin spacing is less than the second fin spacing. In some implementations, a first adjacent fin pitch of the first multi-fin structure is greater than or equal to three times a minimum fin pitch and a second adjacent fin pitch of the second multi-fin structure is less than or equal to two times the minimum fin pitch.Type: GrantFiled: May 11, 2020Date of Patent: May 11, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chia Ming Liang, Yi-Shien Mor, Huai-Hsien Chiu, Chi-Hsin Chang, Jin-Aun Ng, Yi-Juei Lee
-
Publication number: 20200273754Abstract: Integrated circuit devices having optimized fin critical dimension loading are disclosed herein. An exemplary integrated circuit device includes a core region that includes a first multi-fin structure and an input/output region that includes a second multi-fin structure. The first multi-fin structure has a first width and the second multi-fin structure has a second width. The first width is greater than the second width. In some implementations, the first multi-fin structure has a first fin spacing and the second multi-fin structure has a second fin spacing. The first fin spacing is less than the second fin spacing. In some implementations, a first adjacent fin pitch of the first multi-fin structure is greater than or equal to three times a minimum fin pitch and a second adjacent fin pitch of the second multi-fin structure is less than or equal to two times the minimum fin pitch.Type: ApplicationFiled: May 11, 2020Publication date: August 27, 2020Inventors: Chia Ming Liang, Yi-Shien Mor, Huai-Hsien Chiu, Chi-Hsin Chang, Jin-Aun Ng, Yi-Juei Lee
-
Patent number: 10692769Abstract: Integrated circuit devices having optimized fin critical dimension loading are disclosed herein. An exemplary integrated circuit device includes a core region that includes a first multi-fin structure and an input/output region that includes a second multi-fin structure. The first multi-fin structure has a first width and the second multi-fin structure has a second width. The first width is greater than the second width. In some implementations, the first multi-fin structure has a first fin spacing and the second multi-fin structure has a second fin spacing. The first fin spacing is less than the second fin spacing. In some implementations, a first adjacent fin pitch of the first multi-fin structure is greater than or equal to three times a minimum fin pitch and a second adjacent fin pitch of the second multi-fin structure is less than or equal to two times the minimum fin pitch.Type: GrantFiled: October 31, 2017Date of Patent: June 23, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTDInventors: Chia Ming Liang, Yi-Shien Mor, Huai-Hsien Chiu, Chi-Hsin Chang, Jin-Aun Ng, Yi-Juei Lee
-
Patent number: 10651090Abstract: Integrated circuit devices having optimized fin critical dimension loading are disclosed herein. An exemplary integrated circuit device includes a core region that includes a first multi-fin structure and an input/output region that includes a second multi-fin structure. The first multi-fin structure has a first width and the second multi-fin structure has a second width. The first width is greater than the second width. In some implementations, the first multi-fin structure has a first fin spacing and the second multi-fin structure has a second fin spacing. The first fin spacing is less than the second fin spacing. In some implementations, a first adjacent fin pitch of the first multi-fin structure is greater than or equal to three times a minimum fin pitch and a second adjacent fin pitch of the second multi-fin structure is less than or equal to two times the minimum fin pitch.Type: GrantFiled: October 31, 2017Date of Patent: May 12, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTDInventors: Chia Ming Liang, Yi-Shien Mor, Huai-Hsien Chiu, Chi-Hsin Chang, Jin-Aun Ng, Yi-Juei Lee
-
Publication number: 20190189614Abstract: A method includes forming a first fin on a semiconductor substrate, forming an isolation dielectric material over the first fin, and planarizing the isolation dielectric material. A top surface of the first fin is covered by the isolation dielectric material after planarizing the isolation dielectric material. The method further includes etching back the isolation dielectric material until the first fin protrudes from the isolation dielectric material.Type: ApplicationFiled: February 11, 2019Publication date: June 20, 2019Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Yi-Juei LEE, Chia-Ming LIANG, Chi-Hsin CHANG, Jin-Aun NG, Yi-Shien MOR, Huai-Hsien CHIU
-
Publication number: 20190067112Abstract: Integrated circuit devices having optimized fin critical dimension loading are disclosed herein. An exemplary integrated circuit device includes a core region that includes a first multi-fin structure and an input/output region that includes a second multi-fin structure. The first multi-fin structure has a first width and the second multi-fin structure has a second width. The first width is greater than the second width. In some implementations, the first multi-fin structure has a first fin spacing and the second multi-fin structure has a second fin spacing. The first fin spacing is less than the second fin spacing. In some implementations, a first adjacent fin pitch of the first multi-fin structure is greater than or equal to three times a minimum fin pitch and a second adjacent fin pitch of the second multi-fin structure is less than or equal to two times the minimum fin pitch.Type: ApplicationFiled: October 31, 2017Publication date: February 28, 2019Inventors: Chia Ming Liang, Yi-Shien Mor, Huai-Hsien Chiu, Chi-Hsin Chang, Jin-Aun Ng, Yi-Juei Lee
-
Patent number: 10204905Abstract: A semiconductor structure includes a substrate, a first gate structure, and a second gate structure. The substrate has a plurality of first fins and a plurality of second fins, wherein a first pitch between two adjacent first fins is greater than a second pitch between two adjacent second fins. The first gate structure crosses over the first fins. The second gate structure crosses over the second fins, wherein the second gate structure includes an upper portion having two first sidewalls substantially parallel to each other and a lower portion tapers toward the substrate.Type: GrantFiled: June 23, 2017Date of Patent: February 12, 2019Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Yi-Juei Lee, Chia-Ming Liang, Chi-Hsin Chang, Jin-Aun Ng, Yi-Shien Mor, Huai-Hsien Chiu
-
Publication number: 20180308842Abstract: A semiconductor structure includes a substrate, a first gate structure, and a second gate structure. The substrate has a plurality of first fins and a plurality of second fins, wherein a first pitch between two adjacent first fins is greater than a second pitch between two adjacent second fins. The first gate structure crosses over the first fins. The second gate structure crosses over the second fins, wherein the second gate structure includes an upper portion having two first sidewalls substantially parallel to each other and a lower portion tapers toward the substrate.Type: ApplicationFiled: June 23, 2017Publication date: October 25, 2018Inventors: Yi-Juei LEE, Chia-Ming LIANG, Chi-Hsin CHANG, Jin-Aun NG, Yi-Shien MOR, Huai-Hsien CHIU
-
Patent number: 8854897Abstract: A static random access memory apparatus and a bit-line voltage controller includes a controller, a pull-up circuit, a pull-down circuit and a voltage keeping circuit. The controller receives a bank selecting signal and a clock signal, and decides a pull-up time period, a pull-down time period and a voltage keeping time period according to the bank selecting signal and the clock signal. The pull-up circuit pulls up a bit-line power according to a first reference voltage within the pull-up time period. The pull-down circuit pulls down the bit-line power according to a second reference voltage within the pull-down time period. The voltage keeping circuit keeps the bit-line power to equal to an output voltage during the voltage keeping time period. The voltage keeping time period is after the pull-up time period and the pull-down time period.Type: GrantFiled: November 1, 2012Date of Patent: October 7, 2014Assignees: Faraday Technology Corp., National Chiao Tung UniversityInventors: Ching-Te Chuang, Nan-Chun Lien, Wei-Nan Liao, Chi-Hsin Chang, Hao-I Yang, Wei Hwang, Ming-Hsien Tu
-
Publication number: 20140009999Abstract: A static random access memory apparatus and a bit-line voltage controller thereof are disclosed. The bit-line voltage controller includes a controller, a pull-up circuit, a pull-down circuit and a voltage keeping circuit. The controller receives a bank selecting signal and a clock signal, and decides a pull-up time period, a pull-down time period and a voltage keeping time period according to the bank selecting signal and the clock signal. The pull-up circuit pulls up a bit-line power according to a first reference voltage within the pull-up time period. The pull-down circuit pulls down the bit-line power according to a second reference voltage within the pull-down time period. The voltage keeping circuit keeps the bit-line power to equal to an output voltage during the voltage keeping time period. The voltage keeping time period is after the pull-up time period and the pull-down time period.Type: ApplicationFiled: November 1, 2012Publication date: January 9, 2014Inventors: Ching-Te Chuang, Nan-Chun Lien, Wei-Nan Liao, Chi-Hsin Chang, Hao-I Yang, Wei Hwang, Ming-Hsien Tu
-
Patent number: 8450161Abstract: The present disclosure provides a semiconductor device that includes a semiconductor substrate and a transistor formed in the substrate. The transistor includes a gate stack having a high-k dielectric and metal gate, a sealing layer formed on sidewalls of the gate stack, the sealing layer having an inner edge and an outer edge, the inner edge interfacing with the sidewall of the gate stack, a spacer formed on the outer edge of the sealing layer, and a source/drain region formed on each side of the gate stack, the source/drain region including a lightly doped source/drain (LDD) region that is aligned with the outer edge of the sealing layer.Type: GrantFiled: May 7, 2012Date of Patent: May 28, 2013Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chien-Hao Chen, Hao-Ming Lien, Ssu-Yu Li, Jun-Lin Yeh, Kang-Cheng Lin, Kuo-Tai Huang, Chii-Horng Li, Chien-Liang Chen, Chung-Hau Fei, Wen-Chih Yang, Jin-Aun Ng, Chi Hsin Chang, Chun Ming Lin, Harry Chuang
-
Publication number: 20120225529Abstract: The present disclosure provides a semiconductor device that includes a semiconductor substrate and a transistor formed in the substrate. The transistor includes a gate stack having a high-k dielectric and metal gate, a sealing layer formed on sidewalls of the gate stack, the sealing layer having an inner edge and an outer edge, the inner edge interfacing with the sidewall of the gate stack, a spacer formed on the outer edge of the sealing layer, and a source/drain region formed on each side of the gate stack, the source/drain region including a lightly doped source/drain (LDD) region that is aligned with the outer edge of the sealing layer.Type: ApplicationFiled: May 7, 2012Publication date: September 6, 2012Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chieh-Hao Chen, Hao-Ming Lien, Ssu-Yu Li, Jun-Lin Yeh, Kang-Cheng Lin, Kuo-Tai Huang, Chii-Horng Li, Chien-Liang Chen, Chung-Hau Fei, Wen-Chih Yang, Jin-Aun Ng, Chi Hsin Chang, Chun Ming Lin, Harry Chuang
-
Patent number: 8193586Abstract: The present disclosure provides a semiconductor device that includes a semiconductor substrate and a transistor formed in the substrate. The transistor includes a gate stack having a high-k dielectric and metal gate, a sealing layer formed on sidewalls of the gate stack, the sealing layer having an inner edge and an outer edge, the inner edge interfacing with the sidewall of the gate stack, a spacer formed on the outer edge of the sealing layer, and a source/drain region formed on each side of the gate stack, the source/drain region including a lightly doped source/drain (LDD) region that is aligned with the outer edge of the sealing layer.Type: GrantFiled: February 20, 2009Date of Patent: June 5, 2012Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chien-Hao Chen, Hao-Ming Lien, Ssu-Yi Li, Jun-Lin Yeh, Kang-Cheng Lin, Kuo-Tai Huang, Chii-Horng Li, Chien-Hau Fei, Wen-Chih Yang, Jin-Aun Ng, Chi Hsin Chang, Chun Ming Lin, Harry Chuang, Chien-Liang Chen
-
Publication number: 20100044803Abstract: The present disclosure provides a semiconductor device that includes a semiconductor substrate and a transistor formed in the substrate. The transistor includes a gate stack having a high-k dielectric and metal gate, a sealing layer formed on sidewalls of the gate stack, the sealing layer having an inner edge and an outer edge, the inner edge interfacing with the sidewall of the gate stack, a spacer formed on the outer edge of the sealing layer, and a source/drain region formed on each side of the gate stack, the source/drain region including a lightly doped source/drain (LDD) region that is aligned with the outer edge of the sealing layer.Type: ApplicationFiled: February 20, 2009Publication date: February 25, 2010Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chien-Hao Chen, Hao-Ming Lien, Ssu-Yi Li, Jun-Lin Yeh, Kang-Cheng Lin, Kuo-Tai Huang, Chii-Horng Li, Chien-Liang Chen, Chung-Hau Fei, Wen-Chih Yang, Jin-Aun Ng, Chi Hsin Chang, Chun Ming Lin, Harry Chuang
-
Patent number: 5638803Abstract: The present invention relates to a fueling control device for a remote-control model to prevent fuel oil overflow and to stop fueling automatically by sensing fuel oil delivery pressure. The device has a check valve, a pump and a control device with an electronic control consisting of a DC power supply circuit, a voltage regulation circuit, a switch type voltage regulation circuit, a control key, a CPU, a differential current inspection circuit, a motor circuit, and a motor driven pump. The check valve is connected between the fuel oil tank and an air conduit connected to a muffler. The pump is connected between a fuel oil drum, and a fuel oil delivery tube for pumping fuel oil from the fuel oil drum into the fuel oil tank. When the fuel oil tank is filled, overflow fuel oil causes closure of the check valve to cause a sudden rise of fuel oil delivery pressure. The rising load on the motor is transmitted to the control device to cause the pump to stop running.Type: GrantFiled: August 18, 1995Date of Patent: June 17, 1997Inventor: Chi-hsin Chang