Patents by Inventor Chi-Huang Wu

Chi-Huang Wu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20090065893
    Abstract: A semiconductor device and fabrication method thereof is disclosed. The method includes the steps of providing a substrate with a trench and a stacked layer thereon, performing an epitaxy process to form an epitaxial layer in the trench, conformably depositing an oxide layer on the epitaxial layer, and removing a portion of the oxide layer and the epitaxial layer on the bottom of the trench.
    Type: Application
    Filed: October 22, 2007
    Publication date: March 12, 2009
    Applicant: NANYA TECHNOLOGY CORPORATION
    Inventors: Chi-Huang Wu, Chien-Jung Yang